532*-
8696/>?<2 5645 ;:@2< 7/>05694 <27/A
3FCRSPFQ
{ 9<B3 ;7B lpbm\abg` \ZiZ[bebmr
{ KZm\abg` k^eZr
{ LZgnZe lpbm\a _ng\mbhg ZoZbeZ[e^
{ Dk^^iZ`^ ]blmZg\^A ?ff
{ Eb^e^\mkb\ lmk^g`maA fhk^ maZg ;dU
0[^mp^^g \hbe Zg] \hgmZ\ml1
{ Fgobkhgf^gmZe _kb^g]er ikh]n\m 0QhIR \hfiebZgm1
{ Nnmebg^ Ebf^glbhglA 0:?5? q 8<57 q 9?5>1ff
0:9>/0> 1/>/
DhgmZ\m ZkkZg`^f^gm
DhgmZ\m k^lblm^g\^
DhgmZ\m fZm^kbZe
DhgmZ\m kZmbg`
0Q^l5 ehZ]1
LZq5 lpbm\abg` ohemZ`^
LZq5 lpbm\abg` \nkk^gm
LZq5 lpbm\abg` ihp^k
LZq5 \hgmbgnhnl \nkk^gm
L^\aZgb\Ze ^g]nkZg\^
Fe^\mkb\Ze ^g]nkZg\^
8B3 8D
9f fZq5 0Zm 8B 9;UED1
B`RgN
9
8DA 9<B 9<7UBD
8BA ;7B 9<7UBD
9<7UBD
;7B
87777UB
;7B
8 q 87
=
NOR
: q 87
;
NOR
0:67
Dhbe ihp^k
9<BA Rbg`e^ \hbe eZm\abg`A Biikhq5 857V
Ehn[e^ \hbel eZm\abg`A Biikhq5 957V
;7BA Rbg`e^ \hbe eZm\abg`A Biikhq5 85<V
Ehn[e^ \hbel eZm\abg`A Biikhq5 :57V
0:67 1/>/
9<B
MhfbgZe
UhemZ`^
UED
<
=
@
89
8<
9;
R^m 6 Q^l^m
UhemZ`^
UED
fZq5
;
;5?
>59
@5=
89
8@59
:?5;
;
;5?
>59
@5=
89
8@59
:?5;
Onel^
EnkZmbhg
fl
fbg5
<7
<7
<7
<7
<7
<7
<7
<7
<7
<7
<7
<7
<7
<7
Ehn[e^
\hbel
eZm\abg`
Rbg`e^
\hbe
eZm\abg`
Zm 9:
Dhbe Q^lblmZg\^
q 08 87-1
9<
:=
?8
8;;
99<
<>=
9:7;
895<2895<
8?28?
;82;8
>92>9
88:288:
9??29??
88<9288<9
05/</0>2<6=>60=
JglneZmbhg k^lblmZg\^
Eb^e^\mkb\ C^mp^^g \hbe . \hgmZ\ml
lmk^g`ma C^mp^^g hi^g \hgmZ\ml
Dk^^iZ`^ ]blmZg\^
0bginm mh hnminm1
Ni^kZm^ mbf^ 0Zm ghfb5 ohem51
Q^e^Zl^ mbf^ 0Zm ghfb5 ohem51
Rah\d k^lblmZg\^
Gng\mbhgZe
E^lmkn\mbo^
8777L
0Zm <77UED1
;777UBD 8fbg
8<77UBD 8fbg
?ff
87fl fZq5
87fl fZq5
@?f6l
9
@?7f6l
9
87Is mh <<Is 85<ff EB
<- mh ?<- QI
4;7
4;7
mh >7
mh 877
ODC . PD
Biikhq5 :=`
Enlm ikhm^\m^]
;?
<
=
@
89
8<
9;
;?
Ub[kZmbhg k^lblmZg\^
Infb]bmr
Bf[b^gm m^fi^kZmnk^
RmhkZ`^ m^fi^kZmnk^
S^kfbgZmbhg
Tgbm p^b`am
Dhglmkn\mbhg
9:>602
85 Q^eZr bl hg ma^ vk^l^mw hk ,l^m, lmZmnl pa^g [^bg` k^e^Zl^]
_khf lmh\d3 pbma ma^ \hglb]^kZmbhg h_ lah\d kbl^g _khf mkZglbm
Zg] k^eZr fhngmbg`3 k^eZr phne] [^ \aZg`^] mh vl^mw hk ,k^l^m,
lmZmnl3 ma^k^_hk^3 pa^g Ziieb\Zmbhg 0\hgg^\mbg` ma^ ihp^k
lniier13 ie^Zl^ k^l^m ma^ k^eZr mh vl^mw hk vk^l^mw lmZmnl hg
k^jn^lm5
95 Jg hk]^k mh fZbgmZbg vl^mw hk vk^l^mw lmZmnl3 ^g^k`bs^] ohemZ`^
mh \hbe lahne] k^Z\a ma^ kZm^] ohemZ`^3 bfinel^ pb]ma lahne]
[^ < mbf^l fhk^ maZg vl^mw hk vk^l^mw mbf^5 Eh ghm ^g^k`bs^
ohemZ`^ mh vl^mw \hbe Zg] vk^l^mw \hbe lbfnemZg^hnler5 Bg] Zelh
ehg` ^g^k`bs^] mbf^ 0fhk^ maZg 8 fbg1 lahne] [^ Zohb]^]5
9NRFQ.
Sa^ ]ZmZ lahpg Z[ho^ Zk^ bgbmbZe oZen^l5
INMHGB QFKBX
JRN@7783 JRN6SR8=@;@ 3 JRN8;7783 NIRBR8?7783 JFDP PD 7?7777 DFQSJGJFE
978; Q^o5 8577
:@
0:67 1/>/
;7B
MhfbgZe
UhemZ`^
UED
<
=
@
89
8<
9;
;?
R^m 6 Q^l^m
UhemZ`^
UED
fZq5
;
;5?
>59
@5=
89
8@59
:?5;
Onel^
EnkZmbhg
fl
fbg5
<7
<7
<7
<7
<7
<7
<7
Rbg`e^ \hbe
eZm\abg`
Dhbe Q^lblmZg\^
q 08 87-1
8=5?
9;
<;
@=
8<7
:?;
8<:=
Zm 9:
;7B
MhfbgZe
UhemZ`^
UED
<
=
@
89
8<
9;
;?
R^m 6 Q^l^m
UhemZ`^
UED
fZq5
;
;5?
>59
@5=
89
8@59
:?5;
Onel^
EnkZmbhg
fl
fbg5
<7
<7
<7
<7
<7
<7
<7
Ehn[e^ \hbel
eZm\abg`
Dhbe Q^lblmZg\^
q 08 87-1
?5;2?5;
89289
9>29>
;?2;?
><2><
8@928@9
>=?2>=?
:<12<694 693:<8/>6:9
z
IGF9= 4;76 89 4Y
B
S 4K9 48 4Q 0WWW1
>VOF
0NMRCDR PCRJMH
0NJK TNKRCHF
0NMRCDR GNPL
8CMSCK QUJRDI
0NMRCDR LCRFPJCK
=NPR
7CVNSR NG RIF DNJK OJM
;NKCPJRV
+}.
;7B
*,.
9<B
<3 =3 @3 893 8<3 9;3 ;?UED
5.
8 Ghkf B 0Nger _hk ;7B1
B.
8 Ghkf D 0Nger _hk 9<B1
/.
Vbma fZgnZe lpbm\a
>.
B`RgN
9
7~.
Rbg`e^ \hbe eZm\abg`
7*.
Ehn[e^ \hbel eZm\abg`
C. Mh fZgnZe lpbm\a
0 _hk ]^mZbel ie^Zl^ \a^\d
ma^ hnmebg^ ]bf^glbhgl 1
~. Jg iZkZee^e pbma ma^ k^eZr/l ehg`^k ^]`^
*.
Jg iZkZee^e pbma ma^ k^eZr/l lahkm^k ^]`^
9JK.
Ohlbmbo^ iheZkbmr
<.
M^`Zmbo^ iheZkbmr
0SQRNLFP QOFDJCK DNEF
:?>7692 16829=6:9= /91 @6<694 16/4</8
IGF9=4;76WW4IWW4KW48
8<
758<
TgbmA ff
Nnmebg^ Ebf^glbhgl
=
9?5>
758<
:
75=; W 75=;
9
<
75:
Mh mabl m^kfbgZe
mh lbg`e^ \hbe
758<
<
<
8
:?5?
:<5@
;5?
9<58
758<
95=
758
<5?
<5=
C
:
B
759<
8=5:
75<
8
>5?
75:
:85:
75<
85=
?5?
:
:5?
758
;7
85<
75<
:?>7692 16829=6:9= /91 @6<694 16/4</8
IGF9=49<6WW4YWW4KW49
=5?
75:
TgbmA ff
=5?
75:
8
95=
758
9
75<
759<
8>58
85<
B
D
C
758<
:?5?
759
<
<
9:5@
Mh mabl m^kfbgZe
mh lbg`e^ \hbe
75=; W 75=;
:
;
9
95?
8<
758<
9?5>
758<
95@
<
<
95;
Vbkbg` EbZ`kZf
Ohlbmbo^
iheZkbmr
Rbg`e^ \hbe eZm\abg`3 8 Ghkf B Ehn[e^ \hbel eZm\abg`3 8 Ghkf B
Rbg`e^ \hbe eZm\abg`3 8 Ghkf Y Ehn[e^ \hbel eZm\abg`3 8 Ghkf Y
B
C
B
C
B
C
B
C
C
B
D
C
B
D
C
B
D
C
B
D
8021 9041
:021 9041
8041 9021
:041 9021
8041 <021
:041 ;021
<021 9041
;021 9041
8021 9041
:021 9041
8041 9021
:041 9021
8041 <021
:041 ;021
<021 9041
;021 9041
M^`Zmbo^ iheZkbmr
Rbg`e^ \hbe eZm\abg`3 8 Ghkf B Ehn[e^ \hbel eZm\abg`3 8 Ghkf B
Rbg`e^ \hbe eZm\abg`3 8 Ghkf Y Ehn[e^ \hbel eZm\abg`3 8 Ghkf Y
B
C
B
C
B
C
B
C
C
B
D
C
B
D
C
B
D
C
B
D
8041 9021
:041 9021
8021 9041
:021 9041
8021 <041
:021 ;041
<041 9021
;041 9021
8041 9021
:041 9021
8021 9041
:021 9041
8021 <041
:021 ;041
<041 9021
;041 9021
Ebl\eZbf^k
Sa^ li^\b_b\Zmbhg bl _hk k^_^k^g\^ hger5 R^^ mh ,S^kfbgheh`r Zg] Hnb]^ebg^l, _hk fhk^ bg_hkfZmbhg5 Ri^\b_b\Zmbhgl ln[c^\m mh \aZg`^ pbmahnm ghmb\^5
V^ \hne] ghm ^oZenZm^ Zee ma^ i^k_hkfZg\^ Zg] Zee ma^ iZkZf^m^kl _hk ^o^kr ihllb[e^ Ziieb\Zmbhg5 Sanl ma^ nl^k lahne] [^ bg Z kb`am ihlbmbhg mh
\ahhl^ ma^ lnbmZ[e^ ikh]n\m _hk ma^bk hpg Ziieb\Zmbhg5 J_ ma^k^ bl Zgr jn^kr3 ie^Zl^ \hgmZ\m Ihg`_Z _hk ma^ m^\agb\Ze l^kob\^5 Ihp^o^k3 bm bl ma^ nl^k/l
k^lihglb[bebmr mh ]^m^kfbg^ pab\a ikh]n\m lahne] [^ nl^] hger5
t
WbZf^g Ihg`_Z Fe^\mkhZ\hnlmb\ Dh53 Km]5 Bee kb`aml h_ Ihg`_Z Zk^ k^l^ko^]5
;9
MEMS传感器
京公网安备 11010802033920号
Copyright © 2005-2026 EEWORLD.com.cn, Inc. All rights reserved
电子工程世界
