Small, Gauge Pressure Sensor
SM5G-GG Series
FEATURES
•
•
•
•
•
•
Improved stability with integrated field shields
Small SO8 surface-mount package
90 millivolt output
Constant current or constant voltage drive
Ported configuration
Wide operating temperature range (-40° to +125°C)
DESCRIPTION
The SM5G-GG Series is a small outline SO8 packaged pressure
sensor that incorporates SMI’s new SM30G MEMS piezoresistive
pressure sensing die. The SM5G-GG Series has been optimized to
provide the highest possible accuracy for a package of this size.
Performance is achieved through careful resistor placement and
mechanical configuration along with advanced MEMS processing.
The packaged sensor is intended for high volume applications where
cost is a critical factor, such as industrial and medical products.
Samples of the SM5G-GG Series are available as a gauge pressure
sensors in several pressure ranges. It is designed to be surface-
mounted on ceramic or PC board substrates by high-volume OEM
manufacturers.
The SM5G-GG Series is in a ported package. It can be used to sense
pressure in a manifold configuration with an O-ring seal.
The SM5G-GG Series is available in sticks or in tape & reel.
Industrial
Handheld Meters
Pneumatic Gauges
Pressure Switches
Consumer
Sports Equipment
Appliances
Medical
Wound Therapy
Health Monitoring
Blood Pressure
Bioreactors
Silicon Microstructures, Inc. 2001-2016. All rights reserved
DOC # 40DS3008.04
+1-(408) 577-0100
|
sales@si-micro.com
I
www.si-micro.com
Page 1
SM5G-GG Series
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ABSOLUTE MAXIMUM RATING TABLE
All parameters are specified at V
DD
= 5.00 V DC SUPPLY at 25
o
C, unless otherwise noted.
No.
1
2
3
Characteristic
Supply Voltage
(a)
Operating Temperature Range
Storage Temperature Range
Symbol
V
DD
T
OP
T
STG
Minimum
0.0
-40
-40
Typical
Maximum
10
+125
Units
V
°C
°C
-
+125
Notes:
a.
If driven with constant current, the maximum supply voltage must not exceed 10 V.
No.
4a
4b
4c
4d
Product
SM5G-005S
SM5G-015S
SM5G-030S
(b)
SM5G-080S
(b)
Operating Pressure
0-5 PSI
0-15 PSI
0-30 PSI
0-80 PSI
Proof Pressure
(P
PROOF
)
15 PSI
45 PSI
TBD
TBD
Burst Pressure
(P
BURST
)
25 PSI
75 PSI
TBD
TBD
Notes:
b.
This product is in development
Silicon Microstructures, Inc. 2001-2016. All rights reserved
DOC # 40DS3008.04
+1-(408) 577-0100
|
sales@si-micro.com
I
www.si-micro.com
Page 2
SM5G-GG Series
www.si-micro.com
OPERATING CHARACTERISTICS TABLE
All parameters are specified at V
DD
= 5.0 V DC SUPPLY at 25°C, unless otherwise noted.
No.
5
6
7
8
9
10
11
12
13
Characteristic
5, 15, 80
(b)
PSI
Span
(c, d)
30
(b)
PSI
Zero Offset
TC Span
(c, e, f)
TC Zero Offset
(c, e, f)
TC Resistance
(c, e, f)
5 PSI
Linearity
(c, f)
15, 30
(b)
, 80
(b)
PSI
Bridge Resistance
Pressure Hysteresis
(g)
Thermal Hysteresis
(h)
Symbol
V
SPAN
V
ZERO
TCS
TCZ
TCR
NL
Minimum
60
55
-25
-0.240
-75
0.24
-0.35
-0.2
Typical
90
80
10
-0.19
-
0.275
-
-
5.0
0.1
0.15
Maximum
120
105
45
-0.155
75
0.33
0.35
Units
mV
mV
mV
%FS/
o
C
μV/
o
C
%R
B
/°C
%FS
0.2
6.0
kOhm
%FS
%FS
R
B
Phys
Thys
4.0
Notes:
b.
c.
d.
e.
f.
g.
This product is in development.
Tested on a sample basis.
The device can only be driven with the supply voltage connected to the pins as shown.
Determined by measurements taken at -40°C and 125°C.
Defined using best fit straight line.
Pressure hysteresis describes a phenomenon whereby the same applied pressure results in different output signals, depending upon
whether the pressure is approached from a lower or higher pressure. The values shown represent the maximum values over the specified
operating pressure and temperature range.
Temperature hysteresis describes a phenomenon whereby the same applied temperature results in different output signals depending
upon whether the temperature is approached from a lower or higher temperature. The values shown represent the maximum change of
zero offset at 25°C when the device is cycled over the specified operating temperature range.
h.
Silicon Microstructures, Inc. 2001-2016. All rights reserved
DOC # 40DS3008.04
+1-(408) 577-0100
|
sales@si-micro.com
I
www.si-micro.com
Page 3
SM5G-GG Series
Diagrams & Dimensions
www.si-micro.com
-
-
All dimensions are for reference only
All dimensions are in mm
Silicon Microstructures, Inc. 2001-2016. All rights reserved
DOC # 40DS3008.04
+1-(408) 577-0100
|
sales@si-micro.com
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www.si-micro.com
Page 4
SM5G-GG Series
www.si-micro.com
Pin 1
Pin 8
Pin 2
Pin 7
Pin 3
Pin 6
Pin 4
Pin 5
Pin-Out
PIN
1
2
3
4
5
6
7
8
Description
NC
+Sig
NC
Gnd
NC
-Sig
NC
+Vexc
Pin No.
2
4
6
8
Typical Operation
Description
Type
+Sig
Gnd
-Sig
+Vexc
Analog Out
Gnd
Analog Out
Power
Value
-
0V
-
+5 V
Page 5
Silicon Microstructures, Inc. 2001-2016. All rights reserved
DOC # 40DS3008.04
+1-(408) 577-0100
|
sales@si-micro.com
I
www.si-micro.com
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