Model 86 UltraStable
316L SS Pressure Sensor
High Performance, Small Profile
0-100 mV Output
Absolute and Gage
Low Pressure
Hydraulic Controls
Process Control
Oceanography
Refrigeration/Compressors
Pressure Transmitters
Level Systems
DESCRIPTION
The Model 86 is a small profile, media compatible,
piezoresistive silicon pressure sensor packaged in a 316L
stainless steel housing. The Model 86 is designed for O-ring
mounting. The sensing package utilizes silicone oil to transfer
pressure from the 316L stainless steel diaphragm to the sensing
element.
The Model 86 is designed for high performance, low
pressure applications. A ceramic substrate is attached to the
package that contains laser-trimmed resistors for temperature
compensation and offset correction. An additional laser-
trimmed resistor is included which can be used to adjust an
external differential amplifier and provide span
interchangeability to within ±1%.
Sensors with threaded pressure fittings, weldable flush
FEATURES
O-Ring Flush Mount
–20°C to +85°C Compensated
Temperature Range
±0.1% Pressure Non-linearity
±1.0% Interchangeable Span
(provided by gain set resistor)
Solid State Reliability
Low Power
sensors and high pressure stainless steel sensors are also
available. Please contact the factory for more information.
DIMENSIONS
STANDARD RANGES
Range
0 to 15
0 to 30
0 to 50
0 to 100
0 to 300
0 to 500
psig
psia
●
●
●
●
●
●
●
●
●
●
●
●
1-70
ISO – Wide Temperature Range
316L SS Pressure Sensor
PERFORMANCE SPECIFICATIONS
Model 86 UltraStable
All parameters specified at 1.5mA and at 25°C, after 10 second warm up, unless otherwise indicated. Unless specifically indicated, only those parameters
indicated as tested are verified on each part. Parameters are specified for the compensated version only.
PARAMETERS
Full Scale Output Span
Zero Pressure Output (Offset)
Pressure Non Linearity
Pressure Hysteresis
Repeatability
Input Resistance
Output Resistance
Temperature Error - Span (–20 to +85°C)
Temperature Error - Offset (–20 to +85°C)
Thermal Hysteresis - Span
Thermal Hysteresis - Offset
Long Term Stability - Span
Long Term Stability - Offset
Supply Current
Output Load Resistance
Insulation Resistance (50 VDC)
Pressure Overload
Compensated Temperature Range
Operating Temperature Range
Storage Temperature Range
Media - Pressure Port
Media - Reference Port
Weight
–20°C to +85°C
–40°C to +125°C
–50°C to +125°C
Liquids and Gases compatible with 316L Stainless Steel
Compatible with Silicon, Pyrex, Gold, Fluorosilicone Rubber and
316L Stainless Steel
13 g
0.5
5
50
3X
2000
4000
–0.75
–0.5
0.05
0.05
0.1
0.1
1.5
2.0
MIN
75
–1
–0.10
–0.05
0.02
0.02
3500
4500
25000
+0.75
+0.5
TYP
100
0
MAX
150
1
0.10
+0.05
UNITS
mV
mV
±% Span
±% Span
±% Span
NOTES
1
2
3
Ω
Ω
% Span
% Span
% Span
% Span
±% Span/year
±% Span/year
mA
M
Ω
M
Ω
Rated
9
9
9
6
7
8
4
4, 5
4
4
Notes
1. For amplified output circuits see application note TN-003.
2.
3.
4.
5.
Measured at vacuum for absolute (A), ambient for gage (G).
Best fit straight line.
Over the temperature range –20°C to +85°C with respect to +25°C.
15 psi range sensors have an offset temperature error of ±0.75%
(Max) from –20°C to +85°C.
6.
7.
8.
9.
Guarantees output/input ratiometricity.
Load resistance to reduce measurement errors due to output loading.
Between case and sensing element.
Maximum temperature range for product with standard cable and
connector is –20°C to +105°C.
10. For gage units used at pressures below atmosphere, the span accuracy
is not guaranteed.
ORDERING INFORMATION
6
APPLICATION SCHEMATIC
CONNECTIONS
PAD/CONDUCTOR NO
1
2
3
4
5
6
FUNCTION
+OUT
-EX
+EX
-OUT
GAIN
GAIN
Feel free to contact customer service with any questions at
Toll free 1(800)745-8008; Phone (757)766-1500; Fax (757)766-4297
June 2001
ISO – Wide Temperature Range
1-71
MEMS传感器
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