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Miniature Amplified Low Pressure Sensors
Low Pressure (0.5” H
2
O to 30 “ H
2
O) Sensors
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Features
• 0 to 0.5” H
2
O to 0 to 30” H
2
O Pressure Ranges
• Temperature Compensated
• Calibrated Zero and Span
Applications
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General Description
The Miniature Amplified Output pressure sensor is based upon a proprietary technology to reduce all output offset or common
mode errors. This model provides a calibrated amplified output with superior output offset characteristics. Output offset errors
due to change in temperature, stability to warm-up, stability to long time period, and position sensitivity are all significantly
reduced when compared to conventional compensation methods. In addition the sensor utilizes a silicon, micromachined, stress
concentration enhanced structure to provide a very linear output to measured pressure.
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• Medical Instrumentation
• Environmental Controls
• HVAC
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These calibrated and temperature compensated sensors give an accurate and stable output over a wide temperature range. This
series is intended for use with non-corrosive, non-ionic working fluids such as air, dry gases and the like.
The output of the device is ratiometric to the supply voltage and operation from any D.C. supply voltage between 4.5 and 5.5
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Physical Dimensions
Product Label Placement on Backside Lid
7.17
0.282
1.78
0.070
1.16
0.046
15.75
0.620
2.04
0.080
2.14
0.084
1.01
0.040
9.81
0.386
6.45
0.254
10.79
0.425
2.12
0.084
0.64
0.025
2.12
0.084
12.70
0.500
10.79
0.425
2.09
0.082
Equivalent Circuit
Vs
Port B
-
+
Vout
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Gnd
Port A
[9.65]
0.380 (nom)
2.73
0.108
0.51
0.020
0.25
0.010
2.54
0.100
NOTES
1) Dimensions are in inches [mm].
2) For suggested pad layout, see drawing: PAD-01
Pin 1 2 3 4
D1 version, D2 version, G verison
Original On File
Pin 1: Vs
Pin 2: Gnd
Pin 3: Vout
Pin 4: Do Not Connect
DATE
ENG
DATE
QA
DATE
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Approvals
MKT
DATE
MFG
As Is
With Change
As Is
With Change
As Is
With Change
As Is
With Change
All Sensors
DS-0101 Rev B
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Pressure Sensor Characteristics Maximum Ratings
Supply Voltage, Vs
Common-mode pressure
Lead Temperature
(soldering 2-4 sec.)
+4.5 to +5.5 Vdc
10 psig
250°C
Environmental Specifications
Temperature Ranges
Compensated
Operating
Storage
Humidity Limits
5 to 50° C
-25 to 85° C
-40 to 125° C
0 to 95% RH
(non condensing)
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Standard Pressure Ranges
Part Number
0.5 INCH-Dx-4V-MINI
1 INCH-Dx-4V-MINI
1 INCH-G-4V-MINI
5 INCH-Dx-4V-MINI
5 INCH-G-4V-MINI
10 INCH-Dx-4V-MINI
10 INCH-G-4V-MINI
20 INCH-Dx-4V-MINI
20 INCH-G-4V-MINI
30 INCH-Dx-4V-MINI
30 INCH-G-4V-MINI
Operating Pressure
± 0.5 inH2O
±1 inH2O
0 - 1 inH2O
± 5 inH2O
0 - 5 inH2O
±10 inH2O
0 - 10 inH2O
±20 inH2O
0 - 20 inH2O
±30 inH2O
0 - 30 inH2O
Nominal Span
4V
4V
4V
4V
4V
4V
4V
4V
4V
4V
4V
Proof Pressure
100 inH2O
100 inH2O
100 inH2O
200 inH2O
200 inH2O
200 inH2O
200 inH2O
300 inH2O
300 inH2O
500 inH2O
500 inH2O
Burst Pressure
200 inH2O
200 inH2O
200 inH2O
300 inH2O
300 inH2O
300 inH2O
300 inH2O
500 inH2O
500 inH2O
800 inH2O
800 inH2O
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For differential pressure D1 is the package with two pressure ports the same side, D2 has two ports the opposite sides.
Performance Characteristics for 0.5 INCH-Dx-4V-MINI
Parameter, note 1
Operating Range, differential pressure
Output Span, note 5
Offset Voltage @ zero differential pressure
Offset Temperature Shift (5°C-50°C), note 2
Offset Warm-up Shift, note 3
Offset Position Sensitivity (±1g)
Offset Long Term Drift (one year)
Linearity, hysteresis error, note 4
Minimum
-
±1.90
2.15
-
-
-
-
-
-
Nominal
±0.5
±2.0
2.25
-
±10
±5
±10
0.05
-
Maximum
-
±2.10
2.35
±120
-
-
-
0.25
±2
Units
inH2O
V
V
mV
mV
mV
mV
%FSS
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Span Shift (5°C-50°C), note 2
%FSS
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Performance Characteristics for 1 INCH-Dx-4V-MINI
Parameter, note 1
Operating Range, differential pressure
Output Span, note 5
Offset Voltage @ zero differential pressure
Offset Temperature Shift (5°C-50°C), note 2
Offset Warm-up Shift, note 3
Offset Position Sensitivity (±1g)
Offset Long Term Drift (one year)
Minimum
-
±1.90
2.15
-
-
-
-
-
-
Nominal
±1.0
±2.0
2.25
-
±10
±5
±10
0.05
-
Maximum
-
±2.10
2.35
±60
-
-
-
0.25
±2
Units
inH2O
V
V
mV
mV
mV
mV
%FSS
%FSS
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Linearity, hysteresis error, note 4
Span Shift (5°C-50°C), note 2
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Parameter, note 1
Operating Range, gage pressure
Output Span, note 5
Offset Voltage @ zero pressure
Offset Temperature Shift (5°C-50°C), note 2
Offset Warm-up Shift, note 3
Offset Position Sensitivity (±1g)
Offset Long Term Drift (one year)
Linearity, hysteresis error, note 4
Minimum
-
3.90
0.15
-
-
-
-
-
-
Nominal
1.0
4.0
0.25
-
±10
±5
±10
0.05
-
Maximum
-
4.10
0.35
±60
-
-
-
0.25
±2
Units
inH2O
V
V
mV
mV
mV
mV
%FSS
%FSS
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Performance Characteristics for 1 INCH-G-4V-MINI
sensors
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Nominal
±5.0
±2.0
2.25
-
±5
±5
±5
0.05
-
Maximum
-
±2.10
2.35
±40
-
-
-
0.25
±1
Units
inH2O
V
V
mV
mV
mV
mV
%FSS
%FSS
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Span Shift (5°C-50°C), note 2
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Performance Characteristics for 5 INCH-Dx-4V-MINI
Parameter, note 1
Operating Range, differential pressure
Output Span, note 5
Offset Voltage @ zero differential pressure
Offset Temperature Shift (5°C-50°C), note 2
Offset Warm-up Shift, note 3
Offset Position Sensitivity (±1g)
Offset Long Term Drift (one year)
Linearity, hysteresis error, note 4
Minimum
-
±1.90
2.15
-
-
-
-
-
-
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Span Shift (5°C-50°C), note 2
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Performance Characteristics for: 5 INCH-G-4V-MINI
Parameter,
NOTE
1
Operating Range, gage pressure
Output Span,
NOTE
5
Offset Voltage @ zero pressure
Offset Temperature Shift (5°C-50°C),
NOTE
2
Offset Warm-up Shift,
NOTE
3
Offset Position Sensitivity (±1g)
Minimum
-
3.90
0.15
-
-
-
-
-
-
Nominal
5.0
4.0
0.25
-
±5
±5
±5
0.05
-
Maximum
-
4.10
0.35
±40
-
-
-
0.25
±1
Units
inH2O
V
V
mV
mV
mV
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Offset Long Term Drift (one year)
Linearity, hysteresis error,
NOTE
4
Span Shift (5°C-50°C),
NOTE
2
mV
%FSS
%FSS
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Performance Characteristics for: 10 INCH-Dx-4V-MINI
Parameter,
NOTE
1
Operating Range, differential pressure
Output Span,
NOTE
5
Offset Voltage @ zero differential pressure
Offset Temperature Shift (5°C-50°C),
NOTE
2
Offset Warm-up Shift,
NOTE
3
Offset Position Sensitivity (±1g)
Minimum
-
±1.90
2.15
-
-
-
-
-
-
Nominal
±10.0
±2.0
2.25
-
±5
±5
±5
0.05
-
Maximum
-
±2.10
2.35
±20
-
-
-
0.25
±1
Units
inH2O
V
V
mV
mV
mV
mV
%FSS
%FSS
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Offset Long Term Drift (one year)
Linearity, hysteresis error,
NOTE
4
Span Shift (5°C-50°C),
NOTE
2
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Performance Characteristics for: 10 INCH-G-4V-MINI
Parameter,
NOTE
1
Operating Range, gage pressure
Output Span,
NOTE
5
Offset Voltage @ zero pressure
Offset Temperature Shift (5°C-50°C),
NOTE
2
Offset Warm-up Shift,
NOTE
3
Offset Position Sensitivity (±1g)
Offset Long Term Drift (one year)
Minimum
-
3.90
0.15
-
-
-
-
-
-
Nominal
10.0
4.0
0.25
-
±5
±5
±5
0.05
-
Maximum
-
4.10
0.35
±20
-
-
-
0.25
±1
Units
inH2O
V
V
mV
mV
mV
mV
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Linearity, hysteresis error,
NOTE
4
Span Shift (5°C-50°C),
NOTE
2
%FSS
%FSS
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Miniature Amplified Low Pressure Sensors
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Performance Characteristics for 20 INCH-Dx-4V-MINI
Parameter, note 1
Operating Range, differential pressure
Output Span, note 5
Offset Voltage @ zero differential pressure
Offset Temperature Shift (5°C-50°C), note 2
Offset Warm-up Shift, note 3
Offset Position Sensitivity (±1g)
Minimum
-
±1.90
2.15
-
-
-
-
-
-
Nominal
±20.0
±2.0
2.25
-
±5
±5
±5
0.05
-
Maximum
-
±2.10
2.35
±20
-
-
-
0.25
±1
Units
inH2O
V
V
mV
mV
mV
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Offset Long Term Drift (one year)
Linearity, hysteresis error, note 4
Span Shift (5°C-50°C), note 2
mV
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%FSS
Performance Characteristics for 20 INCH-G-4V-MINI
Parameter, note 1
Operating Range, gage pressure
Output Span, note 5
Offset Voltage @ zero pressure
Offset Temperature Shift (5°C-50°C), note 2
Offset Warm-up Shift, note 3
Offset Position Sensitivity (±1g)
Offset Long Term Drift (one year)
Minimum
-
3.90
0.15
-
-
-
-
-
-
Nominal
20.0
4.0
0.25
-
±5
±5
±5
0.05
-
Maximum
-
4.1
0.35
±20
-
-
-
0.25
±1
Units
inH2O
V
V
mV
mV
mV
mV
%FSS
%FSS
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%FSS
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Linearity, hysteresis error, note 4
Span Shift (5°C-50°C), note 2
Performance Characteristics for 30 INCH-Dx-4V-MINI
Parameter, note 1
Operating Range, differential pressure
Output Span, note 5
Offset Voltage @ zero differential pressure
Offset Temperature Shift (5°C-50°C), note 2
Offset Warm-up Shift, note 3
Offset Position Sensitivity (±1g)
Offset Long Term Drift (one year)
Minimum
-
±1.90
2.15
-
-
-
-
-
-
Nominal
±30.0
±2.0
2.25
-
±5
±5
±5
0.05
-
Maximum
-
±2.10
2.35
±20
-
-
-
0.25
±1
Units
inH2O
V
V
mV
mV
mV
mV
%FSS
%FSS
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Linearity, hysteresis error, note 4
Span Shift (5°C-50°C), note 2
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