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Silicon Wafer Mapping Sensor
Allows Simultaneous Mapping of Up
to 25 Silicon Wafers
H
Economical—one sensor detects most
wafer types
F3M-S825-1
H
200 mm wafer size
H
Automatic and remote teaching
capability
H
Self-diagnostic functions reduce
downtime
Ordering Information
Applicable wafer size
8 inches (6.35-mm pitch)
Number of cassette slots
25
Function
Self-diagnosis
Remarks
CE marking
Part number
F3M-S825-1
Application Examples
Detects Transparent Glass Wafers
With a Transparency of 92%
The F3M-S825-1 allows the mapping of cassettes that have both
silicon wafers and glass wafers.
Answer-back Alarms for Setting Errors and
Self-diagnostic Alarms for Operation Errors
These alarms help reduce system downtime and shorten
troubleshooting time.
Automatic Teaching Saves Setting Time
(Remote Teaching Available)
The F3M-S825-1 has an automatic teaching function that ensures
easy adjustments in minimal time. The remote teaching function
allows quick, on-the-fly set up.
Static Electricity Protection
OMRON’s optical system (including emitter and receiver)
prevents malfunction and damage—protecting the Sensor from
static electricity if charged on the semiconductor wafers at the
time of mapping.
F3M-S825-1
F3M-S825-1
Specifications
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RATINGS/CHARACTERISTICS
Item
Target object
Number of channels
Optical axis pitch
Optical axis width
Light source
Power supply voltage
Current consumption
Output
Control output
F3M-S825-1
8-inch semiconductor silicon wafers and transparent wafers
(with transparency of 92% max.) (See Note.)
25
6.35 mm
1.5 mm
Infrared LED (940 nm)
12 to 24 VDC 10%, ripple (p-p): 10% max.
120 mA max.
Load power supply voltage: 30 VDC
Load current: 20 mA max. (residual voltage: 1 V max.);
Inflow current: 20 mA.;
Parallel output from all channels, NPN open collector;
Dark-ON operation.
When remote teaching is ON, pin 28 will be used for this function.
Load power supply voltage: 30 VDC max.;
Load current: 20 mA max.
(Residual voltage: 1 V max.);
Inflow current: 20 mA;
NPN open collector.
Green indicator is ON when power is being supplied.
Red indicator is ON under the following conditions:
Teaching, no target object, insufficient light, or error.
10 ms max.
All outputs interrupted: GND and control output interrupt input terminals are
short-circuited and 0-V short-circuit current is 1 mA max.;
Output interrupt reset: GND and control output interrupt input terminals are
opened or the voltage is between 9 V and the working power supply
voltage.
ON
OFF
Teaching check function
Ambient temperature
p
Relative humidity
Ambient illumination
Noise resistance
Vibration resistance
Shock resistance
Degree of protection
Connection
Weight (packed state)
Material
Optical axis
Case
Cable
Accessories
Operating
Storage
GND and remote input terminals are short-circuited and 0-V short-circuit
current is 1 mA max.
GND and remote input terminals are opened or the voltage is between
9 V and the working power supply voltage.
Orange LED indicator
0 C to 40 C (32 F to 104 F) with no icing or condensation
--25 C to 60 C (--13 F to 140 F)
35% to 85% with no condensation
Fluorescent lamp: 1,500 x max.
Power supply line: 480 V in normal mode with noise simulator
Static electrical noise: No malfunction or destruction at 8 kV
10 to 55 Hz, 0.5 mm double amplitude for 2 hrs each in X, Y, and Z axes
300 m/s
2
(30G) 3 times each in X, Y, and Z axes
IEC60529 IP40
Pre-wired cable (length: 500 mm 35 mm)
IDC connector (insulation displacement)
Approx. 110 g (3.8 oz)
Polycarbonate
ABS
Vinyl-insulated, bending type
Spacer and instruction manual
Answer-back output
Self-diagnostic output
Indicators
Power
Warning
Response time
Control output interrupt input
Remote teaching input
Note: Operating conditions are restricted for the detection of transparent wafers. Contact your OMRON representatives for details.
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F3M-S825-1
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AUTOMATIC TEACHING FUNCTION
F3M-S825-1
Power indicator
Warning indicator
F3M-S825-1
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ANSWER-BACK FUNCTION AND
SELF-DIAGNOSTIC FUNCTION
The F3M-S825-1 has an answer-back function to warn the
user about setting errors and a self-diagnostic function to
warn the user about operational errors.
Answer-back Function: Normal or error teaching output
turns ON.
Self-diagnostic Function: Warning output turns ON for a
decrease in optical input.
Teaching button
RUN/TEACH mode selector
Teaching indicator
The remote or manual automatic teaching of the F3M-S825-1 is
possible with the following two sensitivity settings:
1. Max. Sensitivity Setting: Detects semiconductor silicon
wafers, and SIC wafers.
2. Teaching with No Target Object: Detects transparent wafers.
The sensitivity is set to maximum before shipping. Refer to the
Instruction Manual when setting the sensitivity of the F3M-S825-1.
Operation
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OUTPUT CIRCUIT DIAGRAM
+V
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I/O TERMINAL ARRANGEMENT
Output
(OUT1)
Pin assignment
Pin
Assignment
GND (0 V)
V
CC
(12 to 24 V)
OUT1
OUT2
OUT3
OUT4
OUT5
OUT6
OUT7
OUT8
OUT9
OUT10
OUT11
OUT12
OUT13
Pin
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
Assignment
OUT14
OUT15
OUT16
OUT17
OUT18
OUT19
OUT20
OUT21
OUT22
OUT23
OUT24
OUT25
Self-diagnostic output/OUT26
(See Note.)
Control output interrupt input
Remote teaching input
Main circuit
Output (see note)
(OUT26)
1
2
3
4
5
Control output interrupt input
6
7
8
9
10
11
12
13
14
15
Remote teaching input
0V
Note: Pin 28 will have answer-back output only when remote
teaching input is turned ON. Otherwise, this output is a
self-diagnostic output.
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F3M-S825-1
F3M-S825-1
Dimensions
Unit: mm (inch)
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F3M-S825-1
170 (6.69)
14 (0.55)
Optical axis
18.5 (0.71)
18.5 (0.71)
Two, M4
Two, R5
50
(1.97)
Mounting Dimensions
(6.30)
Side mark
Thirty, (19/0.08 dia.)
vinyl-insulated,
flat bending cable
500 L x 38.1 W
Pitch: 1.27
Two,
4.2-dia.
mounting
holes
(3.94)
OMRON XG4E-3031
Connector
Teaching button
RUN/TEACH mode selector
Warning indicator
Teaching indicator
Power indicator
Precautions
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CORRECT USE—TO AVOID DAMAGE
Do not use the F3M-S825-1 at a voltage that exceeds the
rated voltage range.
Do not make mistakes in wiring, such as mistakes in polarity.
Do not short-circuit the load.
Do not connect AC to the F3M-S825-1
.
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CONNECTION AND MOUNTING
A maximum of 24 VDC+10% can be imposed on the
F3M-S825-1. Check that the voltage of the power supply is
within the permissible range before turning on the
F3M-S825-1. The power supply must be constructed so that
the secondary circuit is insulated with an isolating
transformer.
Do not wire power lines or high-voltage lines within the
same conduit with the lines of the F3M-S825-1, or the sensor
may be damaged or malfunction.
Avoid mechanical impact when mounting the F3M-S825-1, or
its water-resistant properties will be reduced.
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INSTALLATION/ENVIRONMENT
Do NOT use the F3M-S825-1 in the following locations:
Locations exposed to direct sunlight.
Locations with high humidity that may cause condensation.
Locations with corrosive gas.
Locations where vibration or shock directly affects the
Sensor.
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POWER SUPPLY
If a standard switching power supply is connected to the
F3M-S825-1, be sure to ground the FG (frame ground) and
G (ground) terminals of the power supply. If these terminals are
not grounded, the Sensor may malfunction due to switching noise
that will be generated from the power supply.
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CLEANING
Do not attempt to clean the F3M-S825-1 using paint thinner, to
avoid damaging the surface of the Sensor.
NOTE: DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters to inches divide by 25.4.
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OMRON ELECTRONICS, INC.
1-800-55-OMRON
Cat. No. D063-E3-825
7/00
Specifications subject to change without notice.
One East Commerce Drive
Schaumburg, IL 60173
OMRON CANADA, INC.
416-286-6465
885 Milner Avenue
Scarborough, Ontario M1B 5V8
Printed in U.S.A.
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