D6F-A7D/-AB71D
MEMS Flow Sensor
Digital Compensation for High
Accuracy
• Temperature compensation and linear compensation produce
high accuracy (±3% RD (25% to 100% FS)).
• Compact models for 10 to 70 L/min.
• Reduced piping work with quick-fastening feature.
RoHS Compliant
Refer to the
Common Precautions for the D6F Series
on page 40.
Ordering Information
MEMS Flow Sensor
Joint
Quick joint P10
Quick joint P14
Applicable fluid
Flow rate range
0 to 10 L/min
Air
0 to 20 L/min
0 to 50 L/min
0 to 70 L/min
Model
D6F-10A7D-000-0
D6F-20A7D-000-0
D6F-50A7D-000-0
D6F-70AB71D-000-0
Output Characteristics
D6F-10A7D-000-0
70000
60000
D6F-20A7D-000-0
70000
Output (Count)
60000
50000
40000
30000
20000
10000
0
Output (Count)
50000
40000
30000
20000
10000
0
0
2
4
6
8
10
Flow rate (L/min)
0
5
10
Flow rate (L/min)
15
20
Accessories (Sold separately)
Type
Cable
Pipe fittings (for P10)
Model
D6F-CABLE3
D6F-PLG1
D6F-50A7D-000-0
70000
60000
Output (Count)
50000
40000
30000
20000
10000
0
0
10
20
30
40
50
Flow rate (L/min)
D6F-70AB71D-000-0
50000
Output (Count)
40000
30000
20000
10000
0
0
10
20
30
40
50
60
70
Flow rate (L/min)
Quick fastener (for P10)
D6F-FASTENER-P10
Note: Refer to
Accessories for the D6F Series
on page 39.
Connections
D6F-10A7D-000-0
D6F-20A7D-000-0
D6F-50A7D-000-0
D6F-70AB71D-000-0
Pin No.
1: Vcc
2: SDA
3: SCL
4: GND
BM04B-GHS (made by J.S.T. Mfg. Co.)
D6F-10A7D-000-0
Flow rate
L/min (normal)
Output
(HEX)
0
1024
(0400)
2
13024
(32E0)
4
25024
(61C0)
6
37024
(90A0)
8
49024
(BF80)
10
61024
(EE60)
Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temper-
ature 25±5°C and ambient humidity 35 to 75%RH.
Flow rate = (Output value - 1,024)/60,000 x 10
D6F-20A7D-000-0
Flow rate
L/min (normal)
Output
(HEX)
0
1024
(0400)
4
13024
(32E0)
8
25024
(61C0)
12
37024
(90A0)
16
49024
(BF80)
20
61024
(EE60)
Connector
Use the following connectors for connections to the D6F:
Housing
GHR-04V-S (made by J.S.T. Mfg. Co.)
Terminals
SSHL-002T-P0.2 (made by J.S.T. Mfg. Co.)
Wires
AWG26 to AWG30
3: SCL
4: GND
2: SDA
1: Vcc
Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temper-
ature 25±5°C and ambient humidity 35 to 75%RH.
Flow rate = (Output value - 1,024)/60,000 x 20
D6F-50A7D-000-0
Flow rate
L/min (normal)
Output
(HEX)
0
1024
(0400)
10
13024
(32E0)
20
25024
(61C0)
30
37024
(90A0)
40
49024
(BF80)
50
61024
(EE60)
Enlarged View
Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temper-
ature 25±5°C and ambient humidity 35 to 75%RH.
Flow rate = (Output value - 1,024)/60,000 x 50
D6F-70AB71D-000-0
Flow rate
L/min (normal)
Output
(HEX)
0
1024
(0400)
20
13024
(32E0)
40
25024
(61C0)
60
37024
(90A0)
70
43024
(A810)
Measurement conditions: Power-supply voltage 3.3±0.1 VDC, ambient temper-
ature 25±5°C and ambient humidity 35 to 75%RH.
Flow rate = (Output value - 1,024)/60,000 x 100
20
D6F-A7D/-AB71D
Characteristics/Performance
Model
Flow Range (See note 1.)
Calibration Gas (See note 2.)
Flow Port Type
Electrical Connection
Power Supply
Current Consumption
Resolution
Accuracy (See note 3.)
Response time
Repeatability (See note 4.)
Interface (See note 5.)
Case
Degree of Protection
Withstand Pressure
Pressure Drop (See note 4.)
Operating Temperature (See note 6.)
Operating Humidity (See note 6.)
Storage Temperature (See note 6.)
Storage Humidity (See note 6.)
Insulation Resistance
Dielectric Strength
Weight
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Note: 5.
Note: 6.
Note: 7.
Air
Quick joint P10
Four-pin connector
3.0 to 3.6 VDC
10 mA max. with no load, Vcc = 3.3 VDC, GND = 0 VDC, 25°C
15 bit
±5%RD (10%F.S.
≤
Flow rate < 25%F.S.)
±3%RD (25%F.S.
≤
Flow rate
≤
100%F.S.)
90 ms max.
0.3 %RD
I2C
PPS
IEC IP40 (Excluding tubing sections.)
100 kPa
0.034 kPa
–10 to +60°C
35 to 85%RH
–30 to +80°C
35 to 85%RH
Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
0.083 kPa
0.28 kPa
0.3%RD
0.5%RD
D6F-10A7D-000-0
0 to 10L/min
D6F-20A7D-000-0
0 to 20 L/min
D6F-50A7D-000-0
0 to 50 L/min
MEMS Flow Sensor
D6F-70AB71D-000-0
0 to 70 L/min
Quick joint P14
±5%RD (10L/min
≤
Flow rate < 20L/min)
±3%RD (20L/min
≤
Flow rate
≤
70L/min)
1.3%RD
0.57 kPa
Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
57.3 g
64.4 g
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas (must not contain large particles, e.g., dust, oil, or mist.)
-10
≤
Operating Temperature
≤
60°C
Reference (typical)
Refer to the D6F-@@@@D-000-@ Application Notes for details.
With no condensation or icing.
The following custom options are available.
Ask your OMRON representative for details.
- Temperature measurement
- Address settings (up to four addresses)
- Fault detection
- Threshold setting
Communication
Serial Interface
Master/Slave
Speed mode
Signal
SCL
SDA
Serial Clock
Data Signal
I2C
Slave / Address:
HEX : 0x6C
BIN : 110_1100 (7bit)
Fast Mode 400kHz
21
D6F-A7D/-AB71D
Dimensions
(Unit: mm)
●
MEMS Flow Sensors
D6F-10A7D-000-0
D6F-20A7D-000-0
D6F-50A7D-000-0
Lot No. Display
A
MEMS Flow Sensor
Recommended Quick joint male P10 type
9 max.
1.6 max
2.5
±
0.05
2 min.
A
X
2 min.
R0.4
X
R0.4
84.6
±0.5
(66.6)
(4.4)
(60.6)
17 dia.
20 dia.
max.
(34.9)
B
10
+0
dia.
-0.05
12.85
±
0.05
dia.
C0.1
Y
C0.5
C0.3
2.5
+0.25
-0
B
CROSS X-X
Description Y
30°
20
±0.5
dia.
17
±0.5
dia.
3
±0.15
0.9
±0.5
13
+0.1
-0.05
dia.
(7.9)
30
±0.5
Note
30
±0.5
If using a Rc3/8 converter joint, the following is recommended.
REGAL JOINT CO., LTD http://www.rgl.co.jp/
Converter male joint (Rc3/8-Quick male joint): Adapter Rc3/8-QJM10
O ring: O ring P10 fluororubber (material)
Note 1. Note . The Port type of pipe fitting based on “Quick Joint P10 Type”.
* P10 shows the name of an O-ring prescribed by JIS B 2401.
* The port of O-ring ditch is based on P10 of JIS B 2406.
* Please obtain a male joint separately.
Note 2. Use the following connectors to connect to the Sensor.
Connector
:GHR-04V-S (JST)
Terminals
:SSHL-002T-P0.2 (JST)
Wires
:AWG26 to AWG30
Circuit numbers :1.Vcc, 2.SDA, 3.SCL, 4.GND
6
C0.5 (circumference)
R2 (circumference)
C0.5 (circumference)
CROSS A-A (B-B)
D6F-70AB71D-000-0
20.5
±0.2
Lot No. Display
A
2-2.6 dia. Depth 6.5
A
20.5
±0.2
Recommended Quick joint male P14 type
9 max.
1.6 max
2.5
±
0.05
2 min.
X
2 min.
R0.4
X
R0.4
25.8
±0.2
25.8
±0.2
84.6
±0.5
(64.5)
(66.6) (60.6)
(4.4)
22 dia.
26 dia.
max.
Two, 4
±0.1
dia.
14
+0
dia.
-0.05
17.85
±
0.05
dia.
C0.1
30.9
±0.5
Recommended
Installation
Dimensions
from back side
(See note 2.)
(34.8)
B
Y
C0.5
C0.3
2.5
+0.25
-0
CROSS X-X
B
Description Y
30°
26
±0.5
dia.
22
±0.5
dia.
18
-0.05
dia.
3
±0.15
0.9
±0.5
+0.1
(7.9)
30
±0.5
Note 1
32
±0.5
30
±0.5
If using a Rc3/8 converter joint, the following is recommended.
REGAL JOINT CO., LTD http://www.rgl.co.jp/
Converter male joint (Rc3/8-Quick male joint): Adapter Rc3/8-QJM14
O ring: O ring P14 fluororubber (material)
Note 1. The Port type of pipe fitting based on “Quick Joint P14 Type”.
* P14 shows the name of an O-ring prescribed by JIS B 2401.
* The port of O-ring ditch is based on P14 of JIS B 2406.
* Please obtain a male joint separately.
Note 2. To mount the Sensor with 2.6-dia. holes, use P-type
self-tapping screws with a nominal diameter of 3 mm and
tighten them to a torque of 1.2 N·m max.
The screw threads must engage for 5.5 mm min.
Note 3. Use the following connectors to connect to the Sensor.
Connector
:GHR-04V-S (JST)
Terminals
:SSHL-002T-P0.2 (JST)
Wires
:AWG26 to AWG30
Circuit numbers :1.Vcc, 2.SDA, 3.SCL, 4.GND
C0.5 (circumference)
R2 (circumference)
C0.5 (circumference)
6
CROSS A-A (B-B)
22
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