D6F-N2/-L2
MEMS Flow Sensor
A Compact, High-accuracy Sensor
That Measures Low Flow Rates.
• High accuracy of
±3%
FS.
• Flow rates can be measured without being affected by
temperature or pressure.
RoHS Compliant
Refer to the
Common Precautions for the D6F Series on page 40.
on page 40.
Ordering Information
MEMS Flow Sensor
Applicable fluid
Natural gas (13A)
LP gas
Flow rate range
0 to 1 L/min
0 to 5 L/min
0 to 2 L/min
Model
D6F-01N2-000
D6F-05N2-000
D6F-02L2-000
Output Voltage Characteristics
D6F-01N2-000
6.0
Output voltage (V)
D6F-05N2-000
6.0
5.0
Output voltage (V)
5.0
4.0
3.0
2.0
1.0
0.0
0.0
0.2
0.4
0.6
Flow rate (L/min)
0.8
1.0
4.0
3.0
2.0
1.0
0.0
0.0
1.0
2.0
3.0
Flow rate (L/min)
4.0
5.0
Accessory (included)
Type
Cable
Model
D6F-CABLE1
D6F-02L2-000
6.0
Output voltage (V)
5.0
4.0
3.0
2.0
1.0
0.0
0.0
0.4
0.8
1.2
Flow rate (L/min)
1.6
2.0
Connections
D6F-01N2-000
D6F-05N2-000
D6F-02L2-000
Pin No.
1: Vcc
2: Vout
3: GND
53398-03** (Made by Molex Japan)
D6F-01N2-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±
0.12
0.2
1.90
±
0.12
0.4
2.81
±
0.12
0.6
3.64
±
0.12
0.8
4.37
±
0.12
1.0
5.00
±
0.12
Connector
Use the following connectors for connections to the D6F:
Housing
51021-0300 (Made by Molex Japan)
Terminals
50079 (Made by Molex Japan)
Wires
AWG28 to AWG26
D6F-05N2-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±
0.12
1.0
2.91
±
0.12
2.0
3.92
±
0.12
3.0
4.47
±
0.12
4.0
4.79
±
0.12
5.0
5.00
±
0.12
2: Vout
1: Vcc
3: GND
D6F-02L2-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±
0.30
0.4
3.02
±
0.08
0.8
3.95
±
0.08
1.2
4.47
±
0.08
1.6
4.79
±
0.08
2.0
5.00
±
0.12
Enlarged View
Measurement conditions: Power supply voltage of 12± 0.1 VDC, ambient tem-
perature of 25± 5°C, and ambient humidity of 35% to 75%.
10
D6F-N2/-L2
Characteristics/Performance
Model
Flow Range (See note 1.)
Calibration Gas (See note 2.)
Flow Port Type
Electrical Connection
Power Supply
Current Consumption
Output Voltage
Accuracy
Repeatability (See note 3.)
Output Voltage (Max.)
Output Voltage (Min.)
Rated Power Supply Voltage
Rated Output Voltage
Case
Degree of Protection
Withstand Pressure
Pressure Drop (See note 3.)
Operating Temperature (See note 4.)
Operating Humidity (See note 4.)
Storage Temperature (See note 4.)
Storage Humidity (See note 4.)
Temperature Characteristics
Insulation Resistance
Dielectric Strength
Weight
Note: 1.
Note: 2.
Note: 3.
Note: 4.
0 to 1 L/min
Natural gas (13A)
Rc 1/4 thread
Three-pin connector
10.8 to 26.4 VDC
15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C
1 to 5 VDC (non-linear output, load resistance of 10 kΩ)
±
3% FS (25°C characteristic)
±
0.2% FS
5.7 VDC (Load resistance: 10 kΩ)
0 VDC (Load resistance: 10 kΩ)
26.4 VDC
6 VDC
Aluminum alloy
IEC IP40 (Excluding tubing sections.)
200 kPa
0.017 kPa
−
to 60°C
10
35% to 85%
−
to 80°C
40
35% to 85%
±
3% FS for 25°C characteristic at
−
to 60°C
10
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
0.10 kPa
D6F-01N2-000
0 to 5 L/min
D6F-05N2-000
MEMS Flow Sensor
D6F-02L2-000
0 to 2 L/min.
Propane gas
±
2% to
±
7.5% F.S. (25°C
characteristic)
±
0.3% FS
0.14 kPa
±
4% FS for 25°C characteristic at
−
10
to 60°C
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
35.3 g
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions
(Unit: mm)
D6F-01N2-000
D6F-05N2-000
D6F-02L2-000
Two, M3 holes with a depth of at least 5 mm
16.2
Mounting Hole Dimensions
16.2
±0.05
Two, 3.5 dia.
62
±0.5
(3.7)
37
37
±0.05
(6)
21.6
±0.5
3-17
10
10
Cable (included): D6F-CABLE1
200
±35
100
±15
Brown wire
Black wire
1. Vcc
2. Vout
22.1
±0.5
8.85
Two, tapped threads 0.35
for Rc 1/4 pipe
Connector :51021 (Manufactured by Molex, LLC)
Terminal :50079 (Manufactured by Molex, LLC)
Wire
:0.14SQ
Blue wire
3. GND
11
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