D6F-A3
MEMS Flow Sensor
High-accuracy Sensing with a Thin,
Compact Body.
• A thin, lightweight flow sensor.
• Unique flow path structure provides high precision and fast
response.
RoHS Compliant
Refer to the
Common Precautions for the D6F Series
on page 40.
Ordering Information
MEMS Flow Sensor
Applicable fluid
Air
Flow rate range
0 to 3 L/min
Model
D6F-03A3-000
Output Voltage Characteristics
D6F-03A3-000
6.0
5.0
Output voltage (V)
4.0
3.0
2.0
1.0
0.0
0.0
0.6
1.2
1.8
Flow rate (L/min)
2.4
3.0
Accessory (Sold separately)
Type
Cable
Model
D6F-CABLE2
D6F-CABLE2-L
D6F-03A3-000
Flow rate
L/min (normal)
Output voltage
V
0
1.00
±
0.2
0.6
2.83
±
0.2
1.2
3.77
±
0.2
1.8
4.34
±
0.2
2.4
4.72
±
0.2
3.0
5.00
±
0.2
Note: Refer to
Accessories for the D6F Series
on page 39.
Connections
D6F-03A3-000
1: GND
2: Vout
3: Vcc
Measurement conditions: Power supply voltage of 12± 0.1 VDC, ambient
temperature of 25± 5°C, and ambient humidity of 35% to 75%.
Enlarged View
Pin No.
1: GND
2: Vout
3: Vcc
Connector
SM03B-SRSS-TB (Made by J.S.T. Mfg. Co.)
Use the following connectors made by J.S.T. Mfg. Co. for
connections to the Sensor:
• Pressure-welded Connector
Socket: 03SR-3S
Wires: AWG30
Or
• Crimp Connector
Contacts: SSH-003T-P0.2
Housing: SHR-03V-S or SHR-03V-S-B
Wires: AWG32 to AWG28
12
D6F-A3
Characteristics/Performance
Model
Flow Range (See note 1.)
Calibration Gas (See note 2.)
Flow Port Type
Electrical Connection
Power Supply
Current Consumption
Output Voltage
Accuracy
Repeatability (See note 3.)
Output Voltage (Max.)
Output Voltage (Min.)
Rated Power Supply Voltage
Rated Output Voltage
Case
Degree of Protection
Withstand Pressure
Pressure Drop (See note 3.)
Operating Temperature (See note 4.)
Operating Humidity (See note 4.)
Storage Temperature (See note 4.)
Storage Humidity (See note 4.)
Temperature Characteristics
Insulation Resistance
Dielectric Strength
Weight
Note: 1.
Note: 2.
Note: 3.
Note: 4.
0 to 3 L/min
Air
M5 thread
Three-pin connector
10.8 to 26.4 VDC
15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C
1 to 5 VDC (non-linear output, load resistance of 10 kΩ)
±
5% FS (25°C characteristic)
±
0.7% FS
5.7 VDC (Load resistance: 10 kΩ)
0 VDC (Load resistance: 10 kΩ)
26.4 VDC
6 VDC
PPS
IEC IP40 (Excluding tubing sections.)
200 kPa
0.45 kPa
0 to 50°C
35% to 85%
−
to 60°C
10
35% to 85%
±
5% FS for 25°C characteristic at an ambient temperature of 0 to 50°C
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
D6F-03A3-000
MEMS Flow Sensor
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
5.3 g
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Dimensions
(Unit: mm)
●
MEMS Flow Sensors
D6F-03A3-000
Mounting Hole Dimensions
OUT side
M5 threads
(Effective thread depth: 3.1)
3.1
−
0.05
+0.15
MADE IN JAPAN
D6F
-03A3-000
IN side
8
Two,
18
±0.05
M3 screw holes
14
16.8
6.8
3.4-dia.
18
±0.15
36.6
3.1
+0.15
dia. through hole
−
0.05
13
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