D6F-P
MEMS Flow Sensor
A Compact, High-accuracy Flow
Sensor with Superior Resistance
to Environments.
• Anti-dust performance is improved using the Cyclon method.
• A full lineup of models with different connector types: bamboo
joints, lead terminals for direct mounting on-board, and mani-
folds.
• High accuracy of
±
5% FS.
RoHS Compliant
Refer to the
Common Precautions for the D6F Series
on page 40.
Ordering Information
MEMS Flow Sensor
Flow Port Type
Bamboo joint
Manifold
Connection
Lead terminals
Air
Connector
Applicable fluid
Flow rate range
0 to 0.1 L/min
0 to 1 L/min
Model
D6F-P0001A1
D6F-P0010A1
D6F-P0010A2
D6F-P0010AM2
Accessory (Sold separately)
Type
Cable
Model
D6F-CABLE2
D6F-CABLE2-L
Note: Refer to
Accessories for the D6F Series
on page 39.
Output Voltage Characteristics
D6F-P0001A1
3.0
2.5
D6F-P0010A1/-P0010A2/-P0010AM2
3.0
2.5
Output voltage (V)
Output voltage (V)
2.0
1.5
1.0
0.5
0.0
0
0.02
0.04
0.06
Flow rate (L/min)
0.08
0.10
2.0
1.5
1.0
0.5
0.0
0
0.25
0.5
0.75
Flow rate (L/min)
1
Flow rate
L/min (normal)
Output voltage
V
0
0.50
±
0.10
0.02
0.90
±
0.10
0.04
1.30
±
0.10
0.06
1.70
±
0.10
0.08
2.10
±
0.10
0.10
2.50
±
0.10
Flow rate
L/min (normal)
Output voltage
V
0
0.50
±
0.10
0.25
1.60
±
0.10
0.50
2.10
±
0.10
0.75
2.31
±
0.10
1.00
2.50
±
0.10
Measurement conditions: Power supply voltage of 5.0± 0.1 VDC, ambient tem-
perature of 25± 5°C, and ambient humidity of 35% to 75%.
Measurement conditions: Power supply voltage of 5.0± 0.1 VDC, ambient tem-
perature of 25± 5°C, and ambient humidity of 35% to 75%.
25
D6F-P
Characteristics/Performance
Model
Flow Range (See note 1.)
Calibration Gas (See note 2.)
Flow Port Type
Electrical Connection
Power Supply
Current Consumption
Output Voltage
Accuracy
Repeatability (See note 3.)
Output Voltage (Max.)
Output Voltage (Min.)
Rated Power Supply Voltage
Rated Output Voltage
Case
Degree of Protection
Withstand Pressure (See note 3.)
Pressure Drop (See note 3.)
Operating Humidity (See note 4.)
Storage Temperature (See note 4.)
Storage Humidity (See note 4.)
Temperature Characteristics
Insulation Resistance
Dielectric Strength
Weight
Note: 1.
Note: 2.
Note: 3.
Note: 4.
Air
Bamboo joint
Maximum outside diameter: 4.9 mm, minimum outside diameter: 4.0 mm
Lead terminals
4.75 to 5.25 VDC
15 mA max. with no load and a Vcc of 5.0 V
0.5 to 2.5 VDC (Load resistance: 10 kΩ)
±
5% FS (25°C characteristic)
±
1.0% FS
±
0.4% FS
3.1 VDC (Load resistance: 10 kΩ)
0 VDC (Load resistance: 10 kΩ)
10 VDC
4 VDC
PBT
IEC IP40 (Excluding tubing sections.)
50 kPa
0.005 kPa
35% to 85%
−
to +80°C
40
35% to 85%
±
5% FS for 25°C characteristic at an ambient temperature of -10 to +60°C
Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
0.19 kPa
Three-pin connector
D6F-P0001A1
0 to 0.1 L/min
D6F-P0010A1
0 to 1 L/min
D6F-P0010A2
MEMS Flow Sensor
D6F-P0010AM2
Manifold
0.67 kPa
Operating Temperature (See note 4.)
−
to +60°C
10
Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
8.5 g
8.0 g
Volumetric flow rate at 0°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
Tubing
You can measure large flows by mounting the Sensor on a bypass.
D6F-P
Flow Sensor
P1
P2
Resistance to flow
Mounting Direction
Bamboo joint Sensor
Manifold-type Sensor
26
D6F-P
Connections/Dimensions
(Unit: mm)
●
Lead Terminals
D6F-P0001A1/D6F-P0010A1
Label: Gives model and lot numbers.
MEMS Flow Sensor
Two, 3-dia.
through hole
13.5
4.76
Three, 1.3-dia. lands
Three, 0.8-dia.
through holes
10
23.3
11.7
Two, 4.9 dia.
2.6 dia.
7.3
Two, 1.1 dia.
Label
7.2
2.54
14
7.6
±0.2
5.04
D6F
MADE IN JAPAN
27.2
6
1.7
17.2
Two, R: 1.4
13.5
1.5
16.2
1.2
9.8
2.8 dia.
Recommended Dimensions for
Connector Mounting Holes
(Bottom view)
6
A
Connector
XG8V-0344
(manufactured
by OMRON)
3. GND
2.54
5.08
1. Vcc
2. Vout
7.2
13.2
4.76
Detailed View of A
●
Connectors
D6F-P0010A2
Label: Gives model and lot numbers.
10
23.3
11.7
Two, 4.9 dia.
2.6 dia.
7.3
Two, 1.1 dia.
D6F
MADE IN JAPAN
27.2
8.5
14
7.6
±0.2
1.Vcc
Label
2.Vout
A
6
1.7
17.2
Two, R: 1.4
16.2
3.GND
1.2
13.5
1.5
2.8 dia.
8.5
Detailed View of A
13.2
D6F-P0010AM2
1
±0.1
dia.,
Depth: 2.4
±0.1
18
6.7
±0.1
*1
Two,
4
−
0
dia.
0.05
22
2
8
Pin No.
3.5 dia.
27.2 14
±0.05
22.1
1
+0.1
0
B
A
1: Vcc
2: Vout
3: GND
Connector SM03B-SRSS-TB (made by J.S.T. Mfg. Co.)
Note:
Use one of the following connectors from JST Mfg.
Co., Ltd. to connect to the D6F.
1) Pressure welding connector
Socket: 03SR-3S
Wire: AWG#30
Or
2) Crimp type connector
Contact: SSH-003T-P0.2
Housing: SHR-03V-S
Wire: AWG#32 to #28
Tubes
Install tubes made of materials such as rubber or urethane
so that they will not come out.
For urethane tubes, tubes with an outer diameter of 6 mm
and an inner diameter of 4 mm are recommended.
Soldering Conditions
Use a soldering iron for 5 s at 350°C with a pressure of 100
gf max.
(This applies only to PCB-mounting Sensors.)
6.4 9.6
2-R6
Two, C0.3
(entire circumference)
2.7
±0.1
0.3
±0.1
0.3
±0.1
3.GND
2.Vout
1.Vcc
6
Detailed View of A
Grooves to stop rotation
*1. Recommended Installation Dimensions
Detailed View of B
Connector Details
Lot number label
O-ring Installation Hole Dimensions
Depth: 2.6 to 3.0
6.7
±0.1
Two, 7
+0.5
dia.
0
M3 threaded
14
±0.05
C0.4 (entire circumference)
7
+0.5
0
The recommended
O-ring is JIS B 2401,
nominal number P4.
27
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