D6F-W
MEMS Flow Sensor
A Compact Sensor That Uses
OMRON’s Unique Flow Path Structure
for High-Performance Flow Velocity*
Measurement.
• Anti-dust performance enhanced by OMRON’s unique three-dimensional
flow path structure.
• High accuracy of
±5%
FS.
*
The flow velocity is the value calculated from the mass flow rate in OMRON's specified wind tunnel.
It does not indicate the flow velocity determined by the Measurement Law of JAPAN.
RoHS Compliant
Refer to the
Common Precautions for the D6F Series
on page 39.
Ordering Information
MEMS Flow Sensor
Applicable fluid
Air
Flow rate range
0 to 1 m/s
0 to 4 m/s
0 to 10 m/s
Model
D6F-W01A1
D6F-W04A1
D6F-W10A1
Output Voltage Characteristics
D6F-W01A1
6.0
5.0
D6F-W04A1
6.0
5.0
Output voltage (V)
Output voltage (V)
4.0
3.0
2.0
1.0
0.0
0.00
0.25
0.50
0.75
Flow velocity (m/s)
1.00
4.0
3.0
2.0
1.0
0.0
0.0
1.0
2.0
3.0
Flow velocity (m/s)
4.0
Accessory (Sold separately)
Type
Cable
Model
D6F-W CABLE
Output voltage (V)
D6F-W10A1
6.0
5.0
4.0
3.0
2.0
1.0
0.0
0
2
4
6
Flow velocity (m/s)
8
10
D6F-W CABLE-L
Note: Refer to
Accessories for the D6F Series
on page 38.
Connections
D6F-W01A1
D6F-W04A1
D6F-W10A1
2. Vout.
1. Vcc.
3. GND.
D6F-W01A1
Flow velocity
m/s
Output voltage V
0
1.00±0.2
0.25
1.35±0.2
0.50
2.01±0.2
0.75
3.27±0.2
1.00
5.00±0.2
D6F-W04A1
Pin No.
Flow velocity
m/s
Output voltage V
0
1.00±0.2
1.0
1.58±0.2
2.0
2.88±0.2
3.0
4.11±0.2
4.0
5.00±0.2
1: Vcc
2: Vout
Enlarged View
3: GND
Connector S3B-ZR-SM2-TF
(made by J.S.T. Mfg. Co.)
Use the following connectors from
J.S.T. Mfg. Co. Ltd. to connect the D6F:
Housing: ZHR-3
Contacts: SZH-002T-P0.5
Wires:
AWG28 to AWG26
Or
Contacts: SZH-003T-P0.5
Wires:
AWG32 to AWG28
The flow velocity is the value calculated from the mass flow rate in OMRON’s specified
48-mm-dia. wind tunnel. It does not indicate the flow velocity determined by the Mea-
surement Law of Japan. The wind tunnel conditions are shown in
Figure 1,
below.
Figure 1: Wind Tunnel
48 dia.
Air volume sensor
Flow velocity measurement
position
20.8
60
Measurement conditions: Power supply voltage of 12 VDC, ambient tempera-
ture of 25°C, and ambient humidity of 35% to 75%.
D6F-W10A1
Flow velocity
m/s
Output voltage V
0
2.0
4.0
6.0
8.0
10.0
1.00±0.24 1.94±0.24 3.23±0.24 4.25±0.24 4.73±0.24 5.00±0.24
The flow velocity is the value calculated from the mass flow rate in OMRON’s specified
155-mm-dia. wind tunnel. It does not indicate the flow velocity determined by the Mea-
surement Law of Japan. The wind tunnel conditions are shown in
Figure 2,
below.
Figure 2: Wind Tunnel
Air volume sensor Honeycomb flow grate
155 dia.
18
Flow velocity measurement position
10
100
Measurement conditions: Power supply voltage of 12 VDC and ambient temper-
ature of 25°C
34
D6F-W
Characteristics/Performance
Model
Flow Range (See note 1.)
Calibration Gas (See note 2.)
Electrical Connection
Power Supply
Current Consumption
Output Voltage
Accuracy
Repeatability (See note 3.)
Output Voltage (Max.)
Output Voltage (Min.)
Rated Power Supply Voltage
Rated Output Voltage
Case
Degree of Protection
Operating Humidity (See note 4.)
Storage Temperature (See note 4.)
Storage Humidity (See note 4.)
Temperature Characteristics
Insulation Resistance
Dielectric Strength
Weight
Note: 1.
Note: 2.
Note: 3.
Note: 4.
0 to 1 m/s
Air
Three-pin connector
10.8 to 26.4 VDC
15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C
1 to 5 VDC (non-linear output, load resistance of 10 kΩ)
±5%
FS (25°C characteristic)
±0.4%
FS
5.7 VDC (Load resistance: 10 kΩ)
0 VDC (Load resistance: 10 kΩ)
26.4 VDC
6 VDC
PPS
IEC IP40 (except for flow inlet and outlet)
35% to 85%
−40
to 80°C
35% to 85%
±5%
FS for 25°C characteristic at an ambient temperature of
−10
to 60°C
Between sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
D6F-W01A1
0 to 4 m/s
D6F-W04A1
MEMS Flow Sensor
D6F-W10A1
0 to 10 m/s
±6%
FS (25°C characteristic)
Operating Temperature (See note 4.)
−10
to 60°C
Between sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
6.3 g
Volumetric flow rate at 25°C, 101.3 kPa.
Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Reference (typical)
With no condensation or icing.
CAD Data
Please visit our CAD Data website, which is noted on the last page.
Dimensions
●
MEMS Flow Sensors
D6F-W01A1
D6F-W04A1
D6F-W10A1
Two, R: 1.6
(Unit: mm)
CAD Data
9
Mounting Hole Dimensions
3.2
±0.2
1.2
4.2
±0.2
Flow inlet
2.6
8
Flow outlet
20
8
R4
2.6
1.2
Two, M3 screws
MADE IN JAPAN
30.5
±0.2
19.5
5
39 24
5
Flow outlet
2 dia., Depth: 2.5
4
3.2 ±0.2 dia.
30.5
±0.05
7
R4
Lot number label
35
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