VSO
®
Normally closed proportional solenoid valve
FEATURES
· 2-way normally closed
· Offers operating pressure up to
150 psig and a range of orifice sizes
· Satisfies a 0.2 sccm leakage
specification of He for 100 million life
cycles and offers high repeatability
· Provides computer-automated
calibrations and full calibration
traceability
· Uses either DC current or pulse width
modulation with closed loop feedback
to deliver optimal system performance
· Maintains ideal flow through thermal
compensation
· Oxygen and analytically clean
MEDIA COMPATIBILITY
Air, argon, helium, hydrogen, methane, nitrogen,
oxygen & others
PHYSICAL PROPERTIES
Operating environment
Storage temperature
0 to 55 °C
-40 to 70 °C
45.3 mm (1.785 in)
16.5 mm (0.625 in)
17 mm (0.67 in)
Barbs or 10-32 UNF female;
manifold mount with screens
63 g (2.2 oz)
0.508 cm
3
(0.031 in
3
)
ELECTRICAL
Power
Voltage
max. 2 W
Length
Width
Height
max. 5.5, 8, 11.5, 13.5, 20 or 29 V
DC
Porting
Weight
Internal volume
Filtration (recommended)
VSONC1..., VSONC2...
all others
Lubrication
17 µm
40 µm
None required
VSO is a registered trademark of Parker Hannifin Corporation.
October 2006 / 254
1/4
www.sensortechnics.com
VSO
®
Normally closed proportional solenoid valve
PERFORMANCE CHARACTERISTICS
Part no.
VSONC1...
VSONC2...
VSONC3...
VSONC4...
VSONC5...
VSONC6...
Pressure
0..150 psid
0...150 psid
0...150 psid
0...75 psid
0...100 psid
0...50 psid
Vacuum
Orifice siz es
0.010" (0.245 mm)
0.020" (0.510 mm)
Leak rate
1
R esp o n se
0...27 "Hg
(0...13 psi)
0.030" (0.762 mm)
0.040" (1.016 mm)
0.050" (1.270 mm)
0.065" (1.651 mm)
≤
0.2 sccm
of helium
(bubble tight)
<30 msec
cycling
(2 W)
FLOW CURVE
2
Notes:
1
sccm denotes Standard Cubic Centimeters per Minute. It is a unit for the flow rate at standard conditions of temperature and
pressure. 1000 sccm = 1 slpm.
2
slpm denotes Standard Liters per Minute. It is a unit for the flow rate at standard conditions of temperature and pressure.
1 slpm = 1000 sccm.
October 2006 / 254
2/4
www.sensortechnics.com
VSO
®
Normally closed proportional solenoid valve
OUTLINE DRAWING
Basic valve dimensions
Port and mounting hole diagrams
dimensions in inches (mm)
October 2006 / 254
3/4
www.sensortechnics.com
VSO
®
Normally closed proportional solenoid valve
ELECTRICAL INTERFACE OPTIONS
VSONC...F...
(Wire leads,
no terminals)
VSONC...P...
(PC mount, 4 pins)
PNEUMATIC INTERFACE OPTIONS
VSONC...0...
(No barbs,
face seal to manifold)
VSONC...1...
(No barbs,
face seal to manifold
with screen)
VSONC...5...
(10-32 UNF
threaded female)
VSONC...8...
(0.125" barbs, 1/8" I.D.
tubing, 1/4" O.D. max)
ORDERING INFORMATION
Model no.
Standard
Options
VSONC 1:
2:
3:
4:
5:
6:
Max.
pressure
Series
Orifice
S
(0.245 mm)
B ody
series
Coil selection
Elastomer
A:
B:
Max.
Resis-
Current***
voltage* tance**
5.5 V
DC
8 V
DC
11
Ω
23
Ω
47
Ω
68
Ω
0.304 A
0.212 A
0.152 A
0.125 A
0.091 A
0.066 A
Electrical
interface
Pneumatic
interface*
150 psid 0.010"
150 psid 0.020"
(0.510 mm)
11:
Series
V:
FKM/
11
brass
25:
Series
C:
FFKM*/
25*
brass
F:
wire leads,
0:
manifold
18"
mount
P:
PC board
mount,
4 PC pins
1:
manifold
mount with
screens**
5:
10-32 UNF
threaded
female
(Series 25)
8:
1/8" barbs
* Series 11 only
except with option 5
* * this option will
affect price
150 psid 0.030"
(0.762 mm)
75 psid 0.040"
(1.016 mm)
I:
FKM/
C:
11.5 V
DC
stainless
steel
D:
13.5 V
DC
H:
FFKM*/
stainless
steel
* available in
* this optios will
nickel- plated affect price;
brass only
contact
Sensortechnics
for details
100 psid 0.050"
(1.270 mm)
E:
F:
20 V
D C
136
Ω
29 V
D C
274
Ω
50 psid 0.065"
(1.651 mm)
* max. voltage for continuous full
flow, ambient temp. 55°C
** coil resistance for room temp.
*** input current for full flow
Example: VSONC
1
S
11
V
A
F
8
Note: Not all combinations might be available.
Please contact your nearest Sensortechnics sales representative for further information.
Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the
application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others.
October 2006 / 254
4/4
www.sensortechnics.com
微控制器 MCU
京公网安备 11010802033920号
Copyright © 2005-2026 EEWORLD.com.cn, Inc. All rights reserved
电子工程世界
