PART NUMBER:
±
2g Tri-Axis Accelerometer
KXR94-2050
Rev. A
Oct 09
Specifications
36 Thornwood Drive
Ithaca, New York 14850
Tel: 607-257-1080
Fax: 607-257-1146
www.kionix.com
ECN #
PCN #
REV
PG #
APPROVED BY
PROD. MGR.
TEST MGR.
VP ENG.
DATE
8/6/07
8/6/07
8/6/07
J. Bergstrom
J. Chong
T. Davis
REVISION DESCRIPTION
DATE
REV'D BY
-
09-171
09-171
A
Initial Release
Update tables to add Special Characteristics.
Adjusted current tolerances.
8/6/07
10/19/09
J. Bergstrom
"Kionix" is a registered trademark of Kionix, Inc. Products described herein are protected by patents issued or pending. No license is granted by implication or
otherwise under any patent or other rights of Kionix. The information contained herein is believed to be accurate and reliable but is not guaranteed. Kionix does
not assume responsibility for its use or distribution. Kionix also reserves the right to change product specifications or discontinue this product at any time without
prior notice. This publication supersedes and replaces all information previously supplied.
© 2007 Kionix, Inc. – All rights reserved
Page 1 of 10
PART NUMBER:
±
2g Tri-Axis Accelerometer
KXR94-2050
Rev. A
Oct 09
Specifications
Product Description
The KXR94-2050 is a tri-axis, silicon micromachined accelerometer with a full-scale output range of
±2g (19.6m/s
2
). The sense element is fabricated using Kionix’s proprietary plasma micromachining
process technology. Acceleration sensing is based on the principle of a differential capacitance
arising from acceleration-induced motion of the sense element, which further utilizes common mode
cancellation to decrease errors from process variation, temperature, and environmental stress. The
sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the
device using a glass frit. A separate ASIC device packaged with the sense element provides signal
conditioning and self-test. The accelerometer is delivered in a 5 x 5 x 1.2 mm DFN plastic package
operating from a 2.5 – 5.25V DC supply.
The three outputs (X, Y, Z) are provided on three
analog
output pins. The KXR94 also features an
integrated
4-channel multiplexer
(X, Y, Z, Aux In). The Enable pin must be
high
for normal
operation and
low
for power shutdown.
Functional Diagram
X
Sensor
Self
10
Test
Y
Sensor
Charge
Amplifier
Temp
Sensor
Charge
Amplifier
1kHz
LPF
32K
Output X
2
C
2
32K
Output Y
13
C
3
32K
14
Z
Sensor
Vdd
8
GND
12
GND
3
Charge
Amplifier
Oscillator
Mux
Logic
9
11
Output Z
C
4
4
Aux In
6
7
5
Enable
NC
S0 S1 Vmux
Page 2 of 10
PART NUMBER:
±
2g Tri-Axis Accelerometer
KXR94-2050
Rev. A
Oct 09
Specifications
Product Specifications
Table 1. Mechanical
(specifications are for operation at V
dd
= 3.3 V and T = 25ºC unless stated otherwise)
Parameters
Operating Temperature Range
Zero-g Offset
Zero-g Offset Variation from RT over Temp.
Sensitivity
Sensitivity Variation from RT over Temp.
Offset Ratiometric Error (V
dd
= 3.3V ± 5%)
Sensitivity Ratiometric Error (V
dd
= 3.3V ± 5%)
Non-Linearity
Cross Axis Sensitivity
Self Test Output change on Activation
Bandwidth (-3dB)
Noise Density (on filter pins)
1
Units
!
!
ºC
V
mg/ºC
mV/g
%/ºC
mg
%
% of FS
%
g
Hz
µg
/
√Hz
Min
-40
1.600
647
Typical
-
1.650
±0.2
660
±0.01 (xy)
±0.02 (z)
±4
±1.25 (xy)
±0.20 (z)
0.1
2.0
1.9 (xy)
0.5 (z)
800
45
Max
85
1.700
673
! Special Characteristics
Notes:
1. Internal 1 kHz low pass filter. Lower frequencies are user definable with external
capacitors.
Table 2. Electrical
(specifications are for operation at V
dd
= 3.3 V and T = 25ºC unless stated otherwise)
Parameters
Supply Voltage (V
dd
)
Operating
1
Operating
Current Consumption
Standby
Analog Output Resistance(R
out
)
Input Low Voltage
Input High Voltage
Multiplexer Response Time
2
Power Up Time
!
Units
V
mA
µA
kΩ
V
V
µs
ms
Min
2.5
0.8
-
24
-
0.8 * V
IO
Typical
3.3
1.03
-
32
-
-
4.5
1
Max
5.25
1.25
5
40
0.2 * V
IO
-
! Special Characteristics
Notes:
1. Tolerances for operating current are for Vdd=3.3V
2. Power up time can also be determined by 5 times the RC time constant of the optional
user defined low pass filter.
Page 3 of 10
PART NUMBER:
±
2g Tri-Axis Accelerometer
KXR94-2050
Rev. A
Oct 09
Specifications
Table 3. Environmental
Parameters
Supply Voltage (V
dd
) Absolute Limits
Maximum Operating Temperature Range
Storage Temperature Range
Mech. Shock (powered and unpowered)
ESD
HBM
Units
V
ºC
ºC
g
V
Min
-0.3
-40
-55
-
-
Target
-
-
-
-
-
Max
7.0
125
150
5000 for 0.5ms
3000
Caution: ESD Sensitive and Mechanical Shock Sensitive Component, improper handling can
cause permanent damage to the device.
The LGA plastic package conforms to European Union Directive 2002/95/EC on the restriction
of the use of certain hazardous substances in electrical and electronic equipment (RoHS).
Soldering
Soldering recommendations available upon request or from
www.kionix.com.
Page 4 of 10
PART NUMBER:
±
2g Tri-Axis Accelerometer
KXR94-2050
Rev. A
Oct 09
Specifications
Application Schematic
1
14
13
12
X
C
2
Aux In
Vmux
S0
S1
2
3
4
5
6
7
Z
Y
C
3
C
4
ST
Enable
Vdd
C
1
KXR94
11
10
9
8
Table 4. KXR94 Pad Descriptions
Pad
1
2
3
4
5
6
7
8
9
10
11
12
13
14
Name
NC
X output
GND
Aux In
Vmux
S0
S1
Vdd
Enable
ST
NC
GND
Y Output
Z Output
Center pad
Description
Not Connected Internally (can be connected to Vdd or Gnd)
Analog output of the x-channel. Optionally, a capacitor (C
2
) placed between this pin and ground will form a low pass filter.
Ground
Auxiliary input for multiplexer. Connect to Vdd or Ground if not used.
Multiplexed analog output. Do not connect if multiplexer is not used.
MUX selector 0 (See Output Select Table). Connect to Vdd or Ground if not used.
MUX selector 1 (See Output Select Table). Connect to Vdd or Ground if not used.
The power supply input. Decouple this pin to ground with a 0.1uF ceramic capacitor (C
1
).
Enable:
High
- Normal operation;
Low
- Device is in standby, power down mode
Self Test:
Low
– Normal operation;
High
– Device is in self-test mode
Not Connected Internally (can be connected to Vdd or Gnd)
Ground
Analog output of y-channel. Optionally, a capacitor (C
3
)placed between this pin and ground will form a low pass filter.
Analog output of z-channel. Optionally, a capacitor (C
4
) placed between this pin and ground will form a low pass filter.
Ground
Page 5 of 10
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