x
}abh
abbbb
n|e X
xMOY [L abh abbbb SMfKV
UJ}
xMz U dJYOPQJ
N
nMKVz UQSU dMz JKVfdd[JV OPY MT
T P\
U
SJKU
PYfVT O[
KU
J[ KMPU dKMYfQT Odd[QOTMPV
JQT Q
V
U U
IR W R |eW k
nW
c
WJN
T
XOT ZM[O\J XOP\J
JY
T
c dJK U eJN dJK fK XOP\J
OTP\
OT J
k MN U
PO[R OdOQUOPQJ XOP\J
T
R OdOQUOPQJ eM[ OPQJ
T
JK
r
Zw
XOT z MK P\ {M[O\J
JY
yU
T
xJOyO\J R fK JPT
K
R}
r nw
k MN U
PO[R OdOQUOPQJ U
T
P
r
Zw
XOT z MKyU {M[O\J
JY
P\ T
s
T
OP r |w
r
pb t
apbu vw
]^
_
b^
ao
ab
b^
a]
IJKMK OPQJ R SOK JKVTQV
L N
OQT U U
]^ ` R abbZ^ R
_Z^
`
ghh i j abh
b^
lm n aobbb n
pbq r t pb t
s j
apbu vw
]^ abb
_
p
W b^ Z _ |
baR
r
w
pb |LJKOdd[QOTMP MLK JY
T
U U
OT
{M[O\J L
T
MKp N U J}W b^ Z MK_ |
PfT
baR
r SU
~ QSJ{JKU \K JKpb
V JOT w
n
a]
b^
al
ph
b^
ap
Z}
r
Zw
XOT ~ MK P\ ZM[O\J U Z
JY
yU
T
P
_h
b^
ap
hb
b^
ab
]_
b^
b
abb
b^
bo
xJOyO\J R fK JPT
K
rOP w
T
` U dOTMP nOQT
VVU U
MK
abbb n
~ SJP QOdOQUOPQJ U M{JKabbb ntT
T
V
OP
r
Zw
XOT z MK P\ {M[O\J
JY
yU
T
eJN dJK fK T [T
OT J OUU
r
apbu vw
W dJYOPQJ
N
XOTM
U
j abh
abbb n
b^
bp
VSO[ OYYJYb^ z US U JOVJ MLJ{JK abbb n
[J
bp T PQK
]^ ab a] ph _h hb ]_ abb
_
l
o
_
]
p
l
p
_
p
_
p
_
p
_
}
p
_
gph pb
j
ghh pb
j
|LJKOdd[QOTMP MLK JY z MK P\ {M[O\J OPY N O
U fN
T
U U
OT
yU
T
N
dJK U [ Kdd[ QfK JPTVdJQUU MLj abh tR OdOQUMK
N VVU J U J
K
LJY
T V
N JJTT QSOK JKVTQV K
SJ
OQT U U JfUJN JPT [VT J[ }
K
U JY
Mz
~ USU
T P
phq
pbq MLT U TO[N JOVfK {O[
SJ PUU
JY fJ
xMOY xUJ
L
R OdOQUOPQJ R SOP\J
T
xJOyO\J R fK JPT
K
T
OP
xJVV T
SOP T U TO[VdJQUU {O[
SJ PUU
LJY fJ
pbbq
xJVV T
SOP pbbq MLT U TO[VdJQUU {O[
SJ PUU
LJY fJ
R OVJ ` U
]^_gab~ a]gabb~
O
` o lbbb hbbb
` ab
]bbb mbbb
` ap^ obbb abbbb
h
r Vw
SK
xMOY [L
UJ
SJ[ L
LxUJ
j abh
abbb
|LJKxJO{U QOdOQUMKfPYJKPM [ OTj abh L
T
P\
T
MOY
MKabbb SMfK OdOQUMK N JJTT
VtR
T V
SJ
QSOK JKVTQV [VT OM{J^
OQT U U U JY
s xeW X nc X XW
IxW
IIx R XXk e
nK
JfJPQ QMJLU JPT
LQU
R Odr nw
]^ __
oi
_i pmb
__bi ]ob
opbi aobb
ppbbi aobbb
~ Zr w
Z
hbr
]bw
b^
_b
b^
_h
b^
lb
b^
lh
b^
hb
abbr
apbw
b^
lp
b^
hb
b^
hh
b^
]b
b^
mb
a
b^
mb
b^
m_
b^
mm
b^
ob
b^
oh
ab
b^
b
b^
p
b^
l
b^
]
b^
o
abb
a^
bb
a^
bb
a^
bb
a^
bb
a^
bb
H
|x s W s xR eXc xeW R |I|R W X
k
R
ec
R | W e|x
Y
x
`
n b^
h
Y b^
a
h
p^
b
b^
h
aa
b^
h
]^
_
p^
h
b^
h
aa
o
_^
h
b^
]
ap pb
a]
ab
h
b^
]
ap^
h
h
b^
]
a^
b
a]
m^
h
b^
o
ao
m^
h
b^
o
`
n
lN U
P
ahN U
P
OL {JPT ofdw
JT
r
x
ap pb _b a] ph _h a] ph _h pb _b lb
a] ph
pb _b
pb _b
ph _h
xpb ph _b _h lb x p^
b
xaa ap a] x a^
h
x
` W k W k tX|e` Zc xe| |k ` R |I|R W R
s
c
e|k
~ Z
r w
Z
R Od
r nw
]^
o
r ow
]X
ab
r
abbw
ah
r
ahbw
pp
r
ppbw
__
r
__bw
lm
r
lmbw
h]
r
h]bw
]o
r
]obw
op
r
opbw
abb
r
abaw
apb
r
apaw
ahb
r
ahaw
aob
r
aoaw
ppb
r
ppaw
pmb
r
pmaw
__b
r
__aw
_b
r
_aw
lmb
r
lmaw
h]b
r
h]aw
]ob
r
]oaw
opb
r
opaw
abbb
r
abpw
apbb
r
appw
ahbb
r
ahpw
aobb
r
aopw
ppbb
r
pppw
pmbb
r
pmpw
__bb
r
__pw
_bb
r
_pw
lmbb
r
lmpw
h]bb
r
h]pw
]obb
r
]opw
opbb
r
oppw
abbbb
r
ab_w
apbbb
r
ap_w
ahbbb
r
ah_w
aobbb
r
ao_w
r
aw
]^ x| w
_r
r
pw
r
_w
r
aw
abr w
x
r
pw
r
_w
r
aw
a]r w
xR
r
pw
r
_w
r
aw
phr w
x`
r
pw
r
_w
r
aw
_hr
xw
r
pw
r
_w
r
aw
hbr
xnw
r
pw
r
_w
r
aw
]_r w
x
r
pw
r
_w
r
aw
abbr | w
s
r
pw
r
_w
ab ap
o ap
p]b
b^
bhb
o pb
ab a]
o a]
o ap
o a]
o ap
]lb
b^
a_
ab ap
o pb
o ap
]lb
b^
a_
o a]
ab ap
o pb
o ap
]lb
o a]
b^
a_ ab ap
olb
o]h
olb
o]h
abhb
hhh
m_b
m]b
ab
b^
am
b^
ap
b^
ap
ab pb
b^
ba ap^ a]
h
b^
bol ab ap
h
b^
b]b ap^ pb
h
b^
bhh ap^ ph
hao
hpm
hh
m]h
omh
o pb
ab a]
lbo
lbb
__h
b^
_]
ab pb
ab pb
b^
p]
h
b^
ph ap^ pb
a] a]
b^
am
h
b^
ao ap^ ph
_ph
lbo
lbb
hao
hh
m]h
oh
omh
b^
_l
b^
p]
b^
ph
b^
am
b^
a]
b^
a_
b^
aa
b^
b]
b^
bob
b^
bmb
b^
bmp
b^
bom
b^
bob ab a] abhb
b^
b] ab pb appb
b^
b]b ab pb allb
b^
a] ap^ _b abab
h
b^
a_ ap^ _h aalb
h
b^
b] ao pb a_bb
b^
bom
b^
bob ab a] apab
b^
b] ab pb albb
h
b^
b]b ap^ a] alhb
ab pb a]hb
b^
bl] ab _b aab
b^
bl ap^ pb abb
h
b^
blp
b^
b_a
h
b^
b_h ap^ ph pp_b
b^
bl_ ap^ _b p]hb
h
b^
bpm ap^ _h poob
h
b^
bpl a] ph p_b
b^
bpb a] _b _lhb
b^
bpa a] _h _]ab
b^
bam ao _h lppb
b^
bah ao lb lpob
b^
bal
b^
bap
o ap
]lb
b^
a_
o a]
ab ap
olb
o]h
b^
bom o pb abhb
b^
bob ab a] apab
b^
b] ab pb albb
h
b^
b]b ap^ a] alhb
ab pb a]hb
b^
bl] ab _b aab
h
b^
bl ap^ pb abb
b^
blp a] pb ppab
b^
b_a
h
b^
b_h ap^ ph
pp_b
b^
bl] ab _b a]b
b^
bl ap^ pb a]]b
h
h
b^
blp ap^ ph ahb
b^
b_a
h
b^
b_h ap^ _b p_ab
ap^ _h phmb
h
b^
bpm a] ph phhh
b^
bpl a] _b _bab
b^
bpb a] _h _ahb
b^
bpa ao _b _]_h
b^
bam ao _h _]ob
b^
bah ao lb _obb
b^
bal
b^
bap
b^
bl_
h
b^
blh ap^ _b abab
b^
b_l a] ph a_hb
b^
b_b ao pb a_bb
b^
bph a] _b a]hb
b^
bph a] _h abb
b^
bpp ao _h aob
ba ao lb plmb
b^
b^
bpa
bam
b^
b^
bal
b^
bob a] _h abb
b^
b]p ao _h pa_b
b^
bmp ao _h aob
b^
bl ao lb plmb
b^
blb
b^
b_]
b^
b_p
b^
blb
b^
b_]
b^
b_]
b^
b_p
o ap
ab ap
o a]
]lb
o]h
olb
b^
a_
b^
bo
o a]
ab ap
olb
o]h
b^
bom o pb abhb
b^
bob ab a] apab
b^
b] ab pb
b^
b]b ap^ a]
h
albb
alhb
o pb abhb
ab a] apab
ab pb albb
ap^ a] alhb
h
ab pb a]hb
ab _b aab
ap^ pb abb
h
ap^ ph pp_b
h
ap^ _b p]hb
h
ap^ _h poob
h
a] pb ph_b
a] ph p_b
a] _b _lhb
a] _h _]ab
ao _b lamb
ao _h lppb
ao lb lpob
o pb abhb
b^
bom ab a] apab
b^
b]
b^
b]b ab pb albb
ab pb a]hb
b^
bl] ap^ a] apab
h
b^
bl
h
b^
blp ap^ pb abb
b^
b_a ao pb ppab
h
b^
b_h ap^ ph pp_b
h
b^
bpm ap^ _b p]hb
h
b^
bpl ap^ _h poob
b^
bpb
b^
bpm a] _h p_b
b^
bpa a] _b _lhb
b^
bam a] _h _]ab
b^
bah ao _h lppb
b^
bah ao lb lpob
b^
bal
b^
bap
b^
bl] ab pb a]hb
b^
b] ab _b aab
b^
b]b ap^ pb abb
h
ap^ _b p]hb
h
b^
b_h ap^ ph
h
b^
bl_ ap^ _b
h
h
b^
bpm ap^ _h
pp_b
p]hb
poob
h
b^
bpm ap^ _h poob
bpl a] ph p_b
b^
b^
bpb a] _b _]hb
b^
bpa a] _h _]ab
b^
bam ao _h lppb
b^
bah ao lb lpob
b^
bal
b^
bal
b^
bap
b^
bpl a] ph p_b
b^
bpb a] _b _lhb
b^
bpa a] _h _]ab
b^
bam ao _h lbob
b^
bah ao _h lppb
b^
bal ao lb lpob
b^
bap
abbu v
W dJYOPQJ r OTj pb t
N
abbu vw
s O
O[Mz O[ Kdd[ QfK JPTr | KN ^
[
J U J
K
N
^ V^abh t
abbu vw
R OVJ U
vJ ` xr N w
N
MEMS传感器
京公网安备 11010802033920号
Copyright © 2005-2026 EEWORLD.com.cn, Inc. All rights reserved
电子工程世界
