32 CHANNEL HIGH VOLTAGE AMPLIFIER
MA32
M I C R O T E C H N O L O G Y
HTTP://WWW.APEXMICROTECH.COM
(800) 546-APEX
(800) 546-2739
PRELIMINARY
FEATURES
• HIGH VOLTAGE OPERATION, 300V
• OUTPUT VOLTAGE UP TO 290V
• LOW QUIESCENT CURRENT
• AVAILABLE AS BARE DIE
DESCRIPTION
The MA32 is a precision 32 channel high voltage driver for
capacitive loads such as micro electromechanical systems
(MEMS). The gain of each high voltage driver is internally set
for 50 V/V. This allows selection of a 0 to 5V DAC for driving
each channel linearly from 0 to approximately 250V. The
internal gain setting resistors have a total series resistance
>=2MΩ to minimize static power dissipation when outputs
are at high voltage.
The MA32 is packaged in a 240 pin quad-flat pack.
(QFP).
APPLICATION
• HIGH VOLTAGE LINEAR DRIVERS FOR
ELECTRICALLY ACTUATED MEMS (micro
electromechanical systems)
BLOCK DIAGRAM
APEX MICROTECHNOLOGY CORPORATION • TELEPHONE (520) 690-8600 • FAX (520) 888-3329 • ORDERS (520) 690-8601 • EMAIL prodlit@apexmicrotech.com
MA32
ABSOLUTE MAXIMUM RATINGS
SUPPLY VOLTAGE, +V
hv
SUPPLY VOLTAGE, V
DD
to V
SS
BIAS VOLTAGE, BVh
OUTPUT CURRENT, source, sink
POWER DISSIPATION, continuous@T
C
=25°C
ESD SUSCEPTIBILITY
2
TEMPERATURE, pin solder - 10s max
TEMPERATURE, junction 2
TEMPERATURE, storage
OPERATING TEMPERATURE RANGE, case
TEST CONDITIONS
MIN
ABSOLUTE MAXIMUM RATINGS
SPECIFICATIONS
350V
12V
V
DD
+ 3V
1mA
4.8W
1500V
220°C
125°C
-55° to +125°C
-25 to +85° C
TYP
MAX
500
500
15
UNITS
mV
mV
mV/√kh
V
µA
V/µs
Khz
V/V
V/V
%
pF
db
V
V
V
mA
mA
°C/W
°C
°C
SPECIFICATIONS
PARAMETER
HIGH VOLTAGE AMP, each channel
OFFSET VOLTAGE, initial
4
OFFSET VOLTAGE, between channels
4
OFFSET VOLTAGE, vs time
OUTPUT VOLTAGE SWING
OUTPUT CURRENT, continuous
SLEW RATE
POWER BANDWIDTH
GAIN, Metal mask option 1
GAIN, Metal mask option 2
GAIN ERROR, between channels
LOAD CAPACITANCE
CROSSTALK
POWER SUPPLY
5
VOLTAGE, V
hv
VOLTAGE, V
hv
VOLTAGE, Total supply
1
, V
SS
to V
DD
CURRENT, quiescent V
hv
CURRENT, quiescent V
SS,
V
DD
THERMAL
RESISTANCE, junction to air
TEMPERATURE RANGE, Junction
TEMPERATURE RANGE, Case
I
O
=100µA
C
L
=100pF
Vo =225Vp-p
V
hv
-10
225
0.35
0.9
49.1
59
-23
30
285
220
9
V
hv
-6.5
290
0.70
1.25
50
60
0.73
50
50.9
61
1.5
100
200
10
0.346
190
26
Tc>25°C
8
300
200
12
3.2
250
Meets full range specifications
Meets full range specifications
0
0
150
70
NOTES: 1.
2.
3.
4.
The specification given for V
SS
and V
DD
is the total voltage that may be applied between the V
SS
and V
DD
pins.
Human-body model, 100pF discharge through a 1.5K ohm resistor.
Unless otherwise noted all test conditions are the nominal specifications. Tc=25°C, internal gain =50.
Offset voltage is given as the maximum error on the output of each channel due to the input offset voltage of the
channel amplifier times the internally set gain of 50.
5. The MA32 requires two power supplies for proper operation. To prevent damage to the MA32 or the
load, the power supply turn on sequence must be followed. V
DD
should be on and stabilized for 100µs
prior to turn on of Vhv.
CLOSED LOOP FREQUENCY RESPONSE
CLOSED LOOP PHASE RESPONSE
30
Closed Loop Phase, P (°)
0
-30
-60
-90
-120
-150
40
30
20
10
Closed Loop Gain, Av (db)
0
-180
-10
100
1000
10000
100000
-210
100
1000
10000
100000
Frequency, F (Hz)
Frequency, F(Hz)
APEX MICROTECHNOLOGY CORPORATION
• 5980 NORTH SHANNON ROAD • TUCSON, ARIZONA 85741 • USA • APPLICATIONS HOTLINE: 1 (800) 546-2739
TYPICAL PERFORMANCE
GRAPHS
MA32
CROSSTALK
PULSE RESPONSE
300
250
-50
Output Voltage, Vo (V)
-55
Crosstalk, (db)
200
150
100
50
0
-50
-60
-55
-70
10
100
Frequency, F (Hz)
0
1000
200 400 600 800 1000 1200 1400 1600 1800 2000
Time, T (µs)
Vdd SUPPLY CURRENT vs. TEMP
405
Vhv SUPPLY CURRENT vs. TEMP
400
200
Vhv Supply Current, lq (µA)
Vhv Supply Current, lq (µA)
485
490
485
380
375
370
175
150
125
0
0
20
40
20
40
60
80
100
120
140
Temperature, T (•C)
60 80
100
Temperature, T (°C)
120
140
POWER RESPONSE
300
250
Output Voltage, Vo (Vp-p)
200
150
100
50
0
1000
Frequency, F (Hz)
10000
APEX MICROTECHNOLOGY CORPORATION • TELEPHONE (520) 690-8600 • FAX (520) 888-3329 • ORDERS (520) 690-8601 • EMAIL prodlit@apexmicrotech.com
MA32
GENERAL
Please read Application Note 1 “General Operating
Considerations” which covers stability, supplies, heat sinking,
mounting, current limit, SOA interpretation, and specification
interpretation. Visit www.apexmicrotech.com for design
tools that help automate tasks such as calculations for
stability, internal power dissipation, current limit; heat
sink selection; Apex’s complete Application Notes library;
Technical Seminar Workbook; and Evaluation Kits.
OPERATING
CONSIDERATIONS
Unused pins should NOT be tied to ground or any other
potential. Unused pins must be floating. The unused pins
between each output are required for high voltage isolation.
Tying these pins to ground or power supply voltage defeats
this purpose.
PIN OUT:
PIN NUMBERS
48,62,64,66,68,70,72,74,76,78, 80,82,84,86,88,90,
92,94,96,98,100,102,104,106,108,110,112,114,116,
118,120,129
10,240,238,236,234,232,230,228,226,224,222,220
218,216,214,212,210,208,206,204,202,200,198
196,194,192,190,188,186,184,182,171
18, 27, 154, 163
29,152
38,143
FUNCTION
Inputs 1-32 respectively
NOTES
Inputs are not-inverting
Outputs 1-32 respectively
V
HV
, High Voltage Supply
GND, analog ground
BH
V
, Output Bias
All pins should be connected. Proper
power supply bypassing is required
Must be =VddL. See absolute
max ratings. This pin must be
by-passed to ground with >10nF
ceramic capacitor.
All pins should be connected.
Proper power supply bypassing
is required.
All pins should be connected.
Proper power supply is required.
Pins are open internally.
Do Not Ground
45,136
V
DD
+ Low voltage supply
39, 43, 46, 133, 138, 142
All Other
V
SS
, + Low voltage supply
N/C
This data sheet has been carefully
CORPORATION
• 5980 NORTH SHANNON ROAD
is
TUCSON,
possible inaccuracies
• USA •
All specifications
HOTLINE: 1 (800) 546-2739
APEX MICROTECHNOLOGY
checked and is believed to be reliable, however, no responsibility
•
assumed for
ARIZONA 85741
or omissions.
APPLICATIONS
are subject to change without notice.
MA32U REV. 2 JULY 2001 © 2001 Apex Microtechnology Corp.
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