SILICON
MICROSTRUCTURES
INCORPORATED
•
SM5651/SM5652
Low Pressure, Constant Current DIP
Low Pressure, Constant Voltage DIP
L
OW
P
RESSURE
T
RANSDUCER
F
ULLY
T
EMPERATURE
C
OMPENSATED AND
C
ALIBRATED
D
UAL
-I
N
-L
INE
P
ACKAGE
DESCRIPTION
The
SM5650
Series of OEM pressure
sensors are fully calibrated, temperature
compensated low-pressure sensors in dual
in-line packages for printed circuit board
mounting. These sensors offer improved
performance as well as the option for either
constant current or constant voltage
excitation. Higher pressure ranges are also
available (See
SM5611/SM5612
Datasheet),
resulting in the broadest
selection of standard pressure ranges in the
industry.
The
SM5600
Series pressure sensors are
constructed by attaching a highly stable
piezoresistive pressure sensor chip to a
ceramic substrate. Thick film resistors on
the ceramic are laser trimmed during
manufacturing to provide zero offset
calibration, temperature compensation for
zero offset, and temperature compensation
for sensitivity. In the Model
SM5651,
an
additional resistor is trimmed to normalize
the output of an external differential amplifier
to provide span calibration when the sensor
is driven by a constant current supply. In
the Model
SM5652,
a constant voltage
supply can be used and the normalized
output span of each sensor can then be
easily amplified.
The model
SM5651
is designed for constant
current excitation.
The model
SM5652
is designed for constant
voltage excitation.
Various electrical pin and pressure port
configurations are available for flexibility in
matching this product to specific
applications.
FEATURES
•
•
•
•
•
•
•
•
Low pressure (from 0-0.15 PSI FS to 0-
3.0 PSI FS)
Constant voltage and constant current
versions
Easy to use dual in-line package (DIP)
Wide 0-60°C compensated temperature
range
Span calibration to ±2% for low pressure
Zero offset calibration
High performance, stable packaged
silicon chip
Gage and differential pressure
configurations
APPLICATIONS
•
•
•
•
•
•
Medical equipment
Respiration
HVAC
Level detection
Flow measurement
Industrial control
Rev 1.2 8_02
2001-2002
Silicon Microstructures, Inc.
♦
1701 McCarthy Blvd.
♦
Milpitas, CA 95035 USA
Tel: 408-577-0100
♦
Fax: 408-577-0123
♦
Sales@Si-Micro.Com
♦
WWW.Si-Micro.Com
SM5651/SM5652
CHARACTERISTICS FOR SM5651/SM5652 -
SPECIFICATIONS
Min.
Excitation
Current (SM5651)
Voltage (SM5652)
Output
Span (SM5651)
Span (SM5652)
Offset
Temperature Performance
TC Span
TC Offset
Temp Hysteresis
Accuracy
Linearity
Repeatability
Pressure Hysteresis
Sensitivity Matching
Impedance (SM5651)
Z Input
Z Output
Impedance (SM5652)
Z Input
Z Output
Temperature Range
Calibration
Operating
Storage
Dynamic Characteristics
Proof Pressure
Burst Pressure
Notes:
1.
2.
3.
4.
5.
6.
Positive Pressure is defined as entry on the bottom side of the die; gain, during factory calibration, is set using negative pressure
For the SM5652, 0.15 PSI range, span is 23.75 (min) to 26.25 (max).
Measured over a temperature range of 0 to 60
o
C.
For 0.15 PSI, TC Span=±2.0%FS; TC Offset=±2.0%FS; For 0.3 PSI, TC Span==±0.75%FS
For 0.30 PSI, Hysteresis=±0.45%FS;
For 0.15 PSI, Hysteresis=±0.65%FS
Best fit straight line; measured from top-side of die
For 0.30 PSI, Linearity=±0.5%FS;
ORDERING INFORMATION:
For 0.15 PSI, Linearity=±2.5%FS
Sensitivity matching relates to part-to-part matching
For 0.15 PSI, Sensitivity Matching=5.0%FS
Model 5652 Pin-Out
1 -Signal Out
2 -Vexc
3 +Signal Out*
4 +Vexc
5 Do Not Connect
6 Do Not Connect
Test Conditions: Model SM5651 w/excitation = 1.500mA @ 25
o
C, Model SM5562 w/excitation = 10.00Vdc @ 25
o
C, unless otherwise specified.
Typ.
1.50
10.00
45.0
25.0
+0.20
+0.20
+0.20
+0.05
+0.05
+0.05
+0.05
-0.20
3.00
3.30
8.00
2.50
Max.
3.00
20.00
75.0
25.5
2.00
0.65
1.00
0.30
0.30
0.30
0.30
+2.00
3.80
3.80
25.00
3.80
60
125
125
Units
mA
V
mV
mV
mV
%FS
%FS
%FS
%FS
%FS
%FS
%FS
kΩ
kΩ
kΩ
kΩ
°C
°C
°C
FS Pressure
FS Pressure
Notes
0.00
0.00
25.0
24.5
-2.00
-0.65
-1.00
-0.30
-0.30
-0.30
-0.30
-2.00
1.80
2.70
4.50
2.00
0
-40
-55
10X
15X
1
1, 2
3
3
4
5
1, 6
Model 5651 Pin-out
1 -Signal Out
2 -Iexc
3 +Signal Out*
4 +Iexc
5 Gainset Resistor
6 Gainset Resistor
Circuit Configuration for SM5651
Notes:
- All dimensions are shown in inches
- Tolerance on all dimensions + 0.005” unless otherwise specified.
*Output increases as pressure is increased on Positive Differential
Tube or Absolute Tube
DO NOT connect to “Do Not Connect” pins
Pressure Ranges
PSI
5651/ 5652
0.15
001
0.30
003
0.80
008
1.50
015
3.00
030
Pin Configuration
Notice:
Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the use of any circuits described
herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this publication has been checked, no
responsibility, however, is assumed for inaccuracies.
Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to cause failure of
a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications.
Rev 1.2 8_02
2001-2002
Silicon Microstructures, Inc.
♦
1701 McCarthy Blvd.
♦
Milpitas, CA 95035 USA
Tel: 408-577-0100
♦
Fax: 408-577-0123
♦
Sales@Si-Micro.Com
♦
WWW.Si-Micro.Com
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