SILICON
MICROSTRUCTURES
INCORPORATED
•
•
SM5420
Low-Cost,
SO-8 Packaged Pressure Sensor
For High-Volume Applications
Ultra-Small, Low Cost OEM Pressure Package
DESCRIPTION
The SM5420 is a small outline SO-8 packaged
pressure sensor. The sensor uses SMI’s
SM5108 micromachined, piezoresistive
pressure sensing chip that has been optimized
to provide the highest possible accuracy for a
package of this size. This performance is
achieved through careful resistor placement
and mechanical configuration along with
advanced MEMS processing.
This sensor is intended for high volume
applications where cost is a critical factor,
such as consumer tire pressure gauges or
automotive tire pressure monitoring. The
SM5420 is available as an absolute pressure
sensor in full-scale ranges of 15 PSI, 30 PSI,
60 PSI, and 100 PSI. It is designed to be
surface-mounted on ceramic or PC board
substrates by high-volume OEM
manufacturers.
The SM5420 is available in a ported
configuration to allow positive positioning of a
pressure source over the inlet or in a non-
ported configuration to be used for sensing
general environmental pressures or with an o-
ring seal. The port position has been chosen
to minimize the chance of pressure pulses
directly impacting the face of the sensor die for
added long-term reliability in hostile
environments. The part comes with gel over
the die as standard; the part can be ordered
without gel in high volumes where the
maximum stability is required, such as in
barometric, weather station sensing
applications. Please contact SMI for more
information.
The SM5420 is shipped either in IC tubes or in
tape-and-reel.
Custom pressure ranges are available in high-
volume applications.
Minimum order quantities apply to this
product.
Rev 1.2 4_05
2004 - 2005
Silicon Microstructures, Inc.
♦
1701 McCarthy Blvd.
♦
Milpitas, CA 95035 USA
Tel: 408-577-0100
♦
Fax: 408-577-0123
♦
sales@si-micro.com
♦
www.si-micro.com
FEATURES
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•
Available in 15 PSI, 30 PSI, 60 PSI, and
100 PSI ranges
o
Wide Temperature range (-40 to +125 C)
Suitable for Automated Assembly
Extremely Low Cost
Small foot-print (0.16 in X 0.20 in)
package
Constant Current or Constant Voltage
Drive
High millivolt Output
APPLICATIONS
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•
•
•
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Automotive Tire Pressure Monitoring
Engine Control
Barometric Sensing
Altitude Correction Detection
Pneumatic Gauges
Hand-held Meters
Home Appliances
SM5420
CHARACTERISTICS FOR SM5420 -
SPECIFICATIONS
All parameters are measured at 5.000V supply at room temperature, unless otherwise specified.
Min.
Excitation Voltage
Excitation Current
Span (FS Range), PSI (kPa)
15 (103)
30 (207)
60 (414)
100 (689)
Offset
TC Span
TC Offset
TC Resistance
Linearity
Bridge Impedance
Input Capacitance
Proof Pressure
Burst Pressure
Operating Temperature
Storage Temperature
0
0
65
65
65
65
-35
-24
-7
+24
-0.20
4
3X
5X
-40
-55
Typ.
5.0
1.5
100
100
100
100
-19
-1
+27.5
-0.07
5
<2
Max.
15
2.5
135
135
135
135
35
-15.5
+7
+33
+0.20
6
Units
V
mA
mV
mV
mV
mV
mV
%FS/100°C
%FS/100°C
%/100°C
%FS
kΩ
pF
Rated FS
Rated FS
°C
°C
Notes
1
1
2
2
3
3
3
4
+125
+150
1
2
3
4
Notes:
1. Bridge may be driven with positive or negative excitation; positive output for positive pressure applied to circuit side of die
when bridge is driven with positive voltage.
2. Measured at 5V constant voltage excitation.
3. Measured from 0 to 70 C
4.
Defined as best straight line.
5. All parts are gelled unless custom ordered. Consult factory for details.
PIN OUT
8
NC
8
+IN
Out+
7
NC
NC
6
Out-
2
-IN
1
5
-IN
2
ORDERING INFORMATION:
Model Number
Pressure
Shipping
Type
4
5
6
H
configuration
SM5420 - XXX - A - P - T
Pressure
Range
Pressure Range = 015, 030, 060, or 100
for 15, 30, 60, or 100 PSI respectively
Pressure Type = A (absolute only)
Cap Type = H (hole) or P (port)
Shipping = T (tape) or S (IC stick)
SM5420
Pin-out
Cap
Type
Pressure Ranges
PSI
15
30
60
100
5420
015
030
060
100
P
configuration
Notice:
Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the
use of any circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement.
While
the information in this publication has been checked, no responsibility, however, is assumed for inaccuracies.
Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to
cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications.
Rev 1.2 4_05
2004 - 2005
Silicon Microstructures, Inc.
♦
1701 McCarthy Blvd.
♦
Milpitas, CA 95035 USA
Tel: 408-577-0100
♦
Fax: 408-577-0123
♦
sales@si-micro.com
♦
www.si-micro.com
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