19-3014; Rev 1; 10/04
Dual Per-Pin Parametric Measurement Units
General Description
The MAX9949/MAX9950 dual parametric measurement
units (PMUs) feature a small package size, wide force
and measurement range, and high accuracy, making the
devices ideal for automatic test equipment (ATE) and
other instrumentation that requires a PMU per pin or per
site.
The MAX9949/MAX9950 force or measure voltages in
the -2V to +7V through -7V to +13V ranges, dependent
upon the supply voltage (V
CC
and V
EE
). The devices
handle supply voltages of up to +30V (V
CC
to V
EE
) and
a 20V device under test (DUT) voltage swing at full cur-
rent. The MAX9949/MAX9950 also force or measure
currents up to ±25mA with a lowest full-scale range of
±2µA. Integrated support circuitry facilitates use of an
external buffer amplifier for current ranges greater than
±25mA.
A voltage proportional to the measured output voltage
or current is provided at the MSR_ output. Integrated
comparators, with externally set voltage thresholds, pro-
vide detection for both voltage and current levels. The
MSR_ and comparator outputs can be placed in a high-
Z state. Integrated voltage clamps limit the force output
to levels set externally. The force-current or the mea-
sure-current voltage can be offset -0.2V to +4.4V (IOS).
This feature allows for the centering of the control or
measured signal within the external DAC or ADC range.
The MAX9949D/MAX9950D feature an integrated 10kΩ
force-sense resistor between FORCE_ and SENSE_.
The MAX9949F/MAX9950F have no internal force-sense
resistor. These devices are available in a 64-pin 10mm x
10mm, 0.5mm pitch TQFP package with an exposed
8mm x 8mm die pad on the top (MAX9949) or the bottom
(MAX9950) of the package for efficient heat removal. The
exposed paddle is internally connected to V
EE
. The
MAX9949/MAX9950 are specified over the commercial
(0°C to +70°C) temperature range.
Features
♦
Force Voltage/Measure Current (FVMI)
♦
Force Current/Measure Voltage (FIMV)
♦
Force Voltage/Measure Voltage (FVMV)
♦
Force Current/Measure Current (FIMI)
♦
Force Nothing/Measure Voltage (FNMV)
♦
Five Programmable Current Ranges
±2µA
±20µA
±200µA
±2mA
±25mA
♦
-2V to +7V Through -7V to +13V Input Voltage
Range and Higher (Up to 20V Voltage Swing at
Full Current)
♦
Force-Current/Measure-Current Voltage Offset
(IOS)
♦
Programmable Voltage Clamps for the Force
Output
♦
Low-Leakage, High-Z Measure State
♦
3-Wire Serial Interface
♦
Low Power, 8mA (max) per PMU
MAX9949/MAX9950
Ordering Information
PART
MAX9949DCCB
MAX9949FCCB
MAX9950DCCB
MAX9950FCCB
TEMP RANGE
0 C to +70 C
0
o
C to +70
o
C
0 C to +70 C
0 C to +70 C
o
o
o
o
o
o
PIN-PACKAGE
64 TQFP-EPR*
64 TQFP-EPR*
64 TQFP-EP**
64 TQFP-EP**
Applications
Memory Testers
VLSI Testers
System-on-a-Chip Testers
Structural Testers
Exposed pad is internally connected to V
EE
.
*EPR
= Exposed pad on top.
**EP
= Exposed pad on bottom.
Selector Guide
PART
MAX9949DCCB
MAX9949FCCB
MAX9950DCCB
DESCRIPTION
Internal 10kΩ force-sense resistor
No internal force-sense resistor
Internal 10kΩ force-sense resistor
No internal force-sense resistor
Pin Configurations appear at end of data sheet.
MAX9950FCCB
________________________________________________________________
Maxim Integrated Products
1
For pricing, delivery, and ordering information, please contact Maxim/Dallas Direct! at
1-888-629-4642, or visit Maxim’s website at www.maxim-ic.com.
Dual Per-Pin Parametric Measurement Units
MAX9949/MAX9950
ABSOLUTE MAXIMUM RATINGS
V
CC
to AGND .......................................................................+20V
V
EE
to AGND.........................................................................-15V
V
CC
to V
EE
...........................................................................+32V
V
L
to AGND............................................................................+6V
AGND to DGND.....................................................-0.5V to +0.5V
All Other Pins ...................................(V
EE
- 0.3V) to (V
CC
+ 0.3V)
Digital Inputs/Outputs ...................................-0.3V to (V
L
+ 0.3V)
Continuous Power Dissipation (T
A
= +70°C)
64-Pin TQFP-EP (derate 43.5mW/°C above +70°C)....3478mW
Θ
JA
..............................................................................+23.0°C/W
Θ
JC
..................................................................................+8°C/W
Junction Temperature ......................................................+150°C
Storage Temperature Range .............................-65°C to +150°C
Operating Temperature (commercial) Range ........0°C to +70°C
Lead Temperature (soldering 10s) ..................................+300°C
Stresses beyond those listed under “Absolute Maximum Ratings” may cause permanent damage to the device. These are stress ratings only, and functional
operation of the device at these or any other conditions beyond those indicated in the operational sections of the specifications is not implied. Exposure to
absolute maximum rating conditions for extended periods may affect device reliability.
DC ELECTRICAL CHARACTERISTICS
(V
CC
= +12V, V
EE
= -7V, V
L
= +3.3V, T
A
= T
MIN
to T
MAX
, unless otherwise noted. T
A
< +25°C guaranteed by design and characterization.
Typical values are at T
A
= +25°C, unless otherwise specified.) (Note 1)
PARAMETER
FORCE VOLTAGE (Note 2)
Force Input Voltage Range
V
IN0
_
,
V
IN1
_
DUT current at full
scale
DUT current = 0
Input Bias Current
Forced-Voltage Offset Error
Forced-Voltage Offset
Temperature Coefficient
Forced-Voltage Gain Error
Forced-Voltage Gain
Temperature Coefficient
Forced-Voltage Linearity Error
MEASURE CURRENT (Note 2)
Measure-Current Offset
Measure-Current Offset
Temperature Coefficient
Measure-Current Gain Error
Measure-Current Gain
Temperature Coefficient
Linearity Error
Measure Output Voltage Range
over Full Current Range (Note 7)
I
MLER
T
A
= +25°C, gain, offset, and
common-mode errors
calibrated out (Notes 3, 4, 5)
V
IOS
= V
DUTGND
V
IOS
= 4V + V
DUTGND
Ranges A–D
Range E
-0.02
-1
-4
0
I
MGE
T
A
= +25°C (Note 6)
-1
±20
+0.02
+1
+4
8
I
MOS
T
A
= +25°C (Note 3)
-1
±20
+1
+1
%FSR
ppm/°C
%
ppm/°C
%FSR
nA
V
V
FLER
T
A
= +25°C, gain and offset errors
calibrated out (Notes 3, 4)
-0.02
V
FGE
T
A
= +25°C, nominal gain of +1
-1
V
FOS
T
A
= +25°C
-25
±100
0.005
±10
+0.02
+1
V
CC
= +12V, V
EE
= -7V
V
CC
= +18V, V
EE
= -
V
EE
+
3.5V
-2
-7
V
EE
+
3.5V
±1
+25
V
CC
-
3.5V
+7
+13
V
CC
-
3.5V
µA
mV
µV/°C
%
ppm/°C
%FSR
V
V
SYMBOL
CONDITIONS
MIN
TYP
MAX
UNITS
Forced Voltage
V
DUT
V
MSR
2
_______________________________________________________________________________________
Dual Per-Pin Parametric Measurement Units
DC ELECTRICAL CHARACTERISTICS (continued)
(V
CC
= +12V, V
EE
= -7V, V
L
= +3.3V, T
A
= T
MIN
to T
MAX
, unless otherwise noted. T
A
< +25°C guaranteed by design and characterization.
Typical values are at T
A
= +25°C, unless otherwise specified.) (Note 1)
PARAMETER
Current-Sense Amp Offset
Voltage Input
Rejection of Output Measure
Error Due to Common-Mode
Sense Voltage
SYMBOL
V
IOS
CONDITIONS
Relative to V
DUTGND
Specified as the percent of full-scale range
change at the measure output per volt
change in the DUT voltage
Range E, R_E = 1MΩ
Range D, R_D = 100kΩ
Measure Current Range
Range C, R_C = 10kΩ
Range B, R_B = 1kΩ
Range A, R_A = 80Ω
FORCE CURRENT (Note 2)
Input Voltage Range for Setting
Forced Current Over Full Range
Current-Sense Amp Offset
Voltage Input
V
IOS
Input Bias Current
Forced-Current Offset
Forced-Current Offset
Temperature Coefficient
Forced-Current Gain Error
Forced-Current Gain
Temperature Coefficient
Forced-Current Linearity Error
I
FLER
T
A
= +25°C, gain, offset, and
common-mode errors
calibrated out (Notes 3, 4, 5)
Ranges A–D
Range E
-0.02
-1
+0.001
-2
-20
-200
-2
-25
-25
±100
V
MGER
T
A
= +25°C, nominal gain of +1
-1
±0.005
±10
+1
I
FGE
T
A
= +25°C (Note 6)
-1
±20
+0.02
+1
+0.007
+2
+20
+200
+2
+25
+25
mA
µA
V
INI
V
IOS
I
FOS
V
IOS
= V
DUTGND
V
IOS
= 4V + V
DUTGND
Relative to V
DUTGND
T
A
= +25°C (Note 3)
-4
0
-0.2
±1
-1
±20
+1
+1
+4
+8
+4.4
V
V
µA
%FSR
ppm/°C
%
ppm/°C
%FSR
nA
%FSR/V
-2
-20
-200
-2
-25
MIN
-0.2
TYP
MAX
+4.4
UNITS
V
MAX9949/MAX9950
CMVR
LER
0.001
0.007
+2
+20
+200
+2
+25
%FSR/V
µA
mA
Rejection of Output Error Due to
Common-Mode Load Voltage
CMRI
OER
Specified as the percent of full-scale range
change of the forced current per volt
change in the DUT voltage
Range E, R_E = 1MΩ
Range D, R_D = 100kΩ
Forced-Current Range
Range C, R_C = 10kΩ
Range B, R_B = 1kΩ
Range A, R_A = 80Ω
MEASURE VOLTAGE (Note 2)
Measure-Voltage Offset
Measure-Voltage Offset
Temperature Coefficient
Gain Error
Measure-Voltage Gain
Temperature Coefficient
V
MOS
T
A
= +25°C
mV
µV/°C
%
ppm/°C
_______________________________________________________________________________________
3
Dual Per-Pin Parametric Measurement Units
MAX9949/MAX9950
DC ELECTRICAL CHARACTERISTICS (continued)
(V
CC
= +12V, V
EE
= -7V, V
L
= +3.3V, T
A
= T
MIN
to T
MAX
, unless otherwise noted. T
A
< +25°C guaranteed by design and characterization.
Typical values are at T
A
= +25°C, unless otherwise specified.) (Note 1)
PARAMETER
Measure-Voltage Linearity Error
SYMBOL
V
MLER
CONDITIONS
T
A
= +25°C, gain and offset errors
calibrated out (Notes 3, 4, 5)
DUT current at
full scale
V
MSR
DUT current = 0V
V
CC
= +12V, V
EE
= -7V
V
CC
= +18V, V
EE
= -12V
MIN
-0.02
-2
-7
V
EE
+
3.5V
-5
-45
+28
D option only
7.8
V
EE
+
3.5V
-5
V
EE
+
3.5V
T
A
= +25°C
-25
±1
V
CLLO
_,
V
CLHI
_
V
EE
+
3.4V
V
EE
+
3.5V
-100
5V logic
Input High Voltage (Note 8)
V
IH
3.3V logic
2.7V logic
Input Low Voltage (Note 8)
Input Current
Input Capacitance
COMPARATOR OUTPUTS (Note 8)
Output High Voltage
Output Low Voltage
High-Z State Leakage Current
High-Z State Output Capacitance
V
OH
V
OL
V
L
= +2.375V to +5.5V, R
PUP
= 1kΩ
V
L
= +2.375V to +5.5V, R
PUP
= 1kΩ
±1
6.0
V
L
- 0.2
+0.4
V
V
µA
pF
V
IL
I
IN
C
IN
5V and 3.3V logic
2.5V logic
±1
3.0
+3.5
+2.0
+1.7
+0.8
+0.7
V
µA
pF
V
V
CC
-
3.4V
V
CC
-
3.5V
+100
10
TYP
MAX
+0.02
+7
+13
V
CC
-
3.5V
+5
-28
+45
13.3
V
CC
-
3.5V
+5
V
CC
-
3.5V
+25
nA
mA
kΩ
V
UNITS
%FSR
Measure Output Voltage Range
over Full DUT Voltage (V
DUT
)
FORCE OUTPUT
Off-State Leakage Current
Short-Circuit Current Limit
Force-to-Sense Resistor
SENSE INPUT
Input Voltage Range
Leakage Current
COMPARATOR INPUTS
Input Voltage Range
Offset Voltage
Input Bias Current
VOLTAGE CLAMPS
Input Control Voltage
Clamp Voltage Range
Clamp Voltage Accuracy
DIGITAL INPUTS
T
A
= +25°C
I
LIM-
I
LIM+
R
FS
V
nA
V
mV
µA
V
V
mV
4
_______________________________________________________________________________________
Dual Per-Pin Parametric Measurement Units
DC ELECTRICAL CHARACTERISTICS (continued)
(V
CC
= +12V, V
EE
= -7V, V
L
= +3.3V, T
A
= T
MIN
to T
MAX
, unless otherwise noted. T
A
< +25°C guaranteed by design and characterization.
Typical values are at T
A
= +25°C, unless otherwise specified.) (Note 1)
PARAMETER
DIGITAL OUTPUTS
(Note 8)
Output High Voltage
Output Low Voltage
POWER SUPPLY
Positive Supply
Negative Supply
Total Supply Voltage
Logic Supply
Positive Supply Current
Negative Supply Current
Logic Supply Current
Analog Ground Current
Digital Ground Current
Power-Supply Rejection Ratio
V
CC
V
EE
V
CC
- V
EE
V
L
I
CC
I
EE
I
L
I
AGND
I
DGND
PSRR
No load, clamps enabled
No load, clamps enabled
No load, all digital inputs at rails
No load, clamps enabled
No load, all digital inputs at rails
1MHz, measured at force output
60Hz, measured at force output
20
85
+2.375
(Note 1)
(Note 1)
+10
-15
+12
-7
+18
-5
+30
+5.5
16.0
16.0
1.2
0.9
1.4
V
V
V
mA
mA
mA
mA
mA
dB
V
OH
V
OL
I
OUT
= 1mA, V
L
= +2.375V to +5.5V, relative
to DGND
I
OUT
= -1mA, V
L
= +2.375V to +5.5V,
relative to DGND
V
L
-
0.25
0.2
V
V
SYMBOL
CONDITIONS
MIN
TYP
MAX
UNITS
MAX9949/MAX9950
AC ELECTRICAL CHARACTERISTICS
(V
CC
= +12V, V
EE
= -7V, V
L
= +3.3V, C
CM
= 120pF, C
L
= 100pF, T
A
= T
MIN
to T
MAX
, unless otherwise noted. T
A
< +25°C guaranteed
by design and characterization. Typical values are at T
A
= +25°C, unless otherwise specified.) (Note 1)
PARAMETER
FORCE VOLTAGE (Notes 9, 10)
Range E, R_E = 1MΩ
Range D, R_D = 100kΩ
Settling Time
Range C, R_C = 10kΩ
Range B, R_B = 1kΩ
Range A, R_A = 80Ω
Maximum Stable Load
Capacitance
FORCE VOLTAGE/MEASURE CURRENT (Notes 9, 10)
Range E, R_E = 1MΩ
Range D, R_D = 100kΩ
Settling Time
Range C, R_C = 10kΩ
Range B, R_B = 1kΩ
Range A, R_A = 80Ω
Range Change Switching
In addition to force-voltage and measure-
current settling times, range A to range B,
R_A = 80Ω, R_B = 1kΩ
480
50
35
20
25
10
µs
45
µs
2500
160
35
25
20
25
pF
30
µs
SYMBOL
CONDITIONS
MIN
TYP
MAX
UNITS
_______________________________________________________________________________________
5
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