Pressure sensors
Barometric pressure transducer for SMT
Series/Type:
Ordering code:
Date:
Version:
ASB 1200 E
2009-08-03
2
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Identification/Classification 2
(header 2 + bottom left header bar):
Ordering code: (top right header bar)
Series/Type: (top right header bar)
Preliminary data (optional):
(if necessary)
Department:
Date:
Version:
ASB 1200 E
Preliminary data
AS SEN PD
2009-08-03
2
Pressure sensors
Barometric pressure transducer for SMT
EPCOS AG 2009. Reproduction, publication and dissemination of this publication, enclosures hereto and the information
contained therein without EPCOS' prior express consent is prohibited
Pressure sensors
Barometric pressure transducer for SMT
Preliminary data
Applications
Medical devices
Weather stations
Handheld devices (Mobile, navigation, …)
Features
Piezoresistive MEMS technology
Measured media:
Air, non-aggressive gases (gas humidity
0 ... 100% r.h., short term dewing admissible).
Suitable for IP54 applications (gel protected).
Unsuitable for substances, which react with
glass, silicon, stainless steel, ceramics,
aluminum, silicone glue or silicone gel.
Whetstone bridge with mV output,
ratiometric to supply voltage
RoHS-compatible, halogen-free
SMT ceramic package for PCB mounting
Outstanding long-term stability
Delivery mode
Tray
Dimensional drawings
3
1.7
0.5
0.8
2.2
ASB 1200 E
4
3
1
Ø2.5
Ø2
3
1
electrical diagram:
4
2
0.7
R1
3
R3
R2
1
R4
1: Vout+
2: VDD–
3: Vout–
4: VDD+
Material: PtAg
2
All dimensions in mm
AS SEN PD
Please read Cautions and warnings and
Important notes at the end of this document.
Page 2 of 8
2009-08-03
Pressure sensors
Barometric pressure transducer for SMT
Preliminary data
Technical data
Absolute maximum ratings
Parameter
Supply voltage
Maximum supply voltage
V
DD
Without damage
1)
ASB 1200 E
Symbol
Conditions
Min.
Typ.
Max.
Unit
10
V
Temperature ranges
2)
Operating temperature range
Storage temperature range
T
a
T
st
–40
tbd
–40
85
°
C
°
C
For t <15 min
3)
125
°
C
Pressure ranges
Operating pressure ranges
Over pressure
Burst pressure
p
r
p
ov
p
berst
Absolute pressure
Absolute pressure
Absolute pressure
4)
5)
6)
0
3
5
1.2
bar
p
r
p
r
Electrical specifications
Parameter
Symbol
Conditions
Min.
Typ.
Max.
Unit
Supply voltage / bridge resistance
Operating supply voltage
Total bridge resistance
Temperature coefficient
of total bridge resistance
V
DD
R
S
7)
1.0
8)
3.0
3.3
2.4
6
6.0
4.0
2.7
8
V
k
Ω
10 /K
10 /K
–6
2
–3
@ 25 °
C
@ 25 °
C
2.6
2.1
4
α
Rs
β
Rs
9)
Output signal @ V
DD
= 5 V
Offset
Sensitivity
Temperature coefficient
of the sensitivity
Pressure hysteresis
V
0
S
@ 25 °
C
@ 25 °
C
@ 25 °
C
16)
10)
13)
–30
0
+30
mV
mV/bar
10 /K
10 /K
% FS
–6
2
–3
See next table
–2.5
3
–0.1
–2.2
5
–1.9
8
0.1
α
S
β
S
pHys
15)
Long-term stability (Full scale normal output FSON = 120 mV)
Temperature hysteresis of offset
Temperature cycle drift of offset
High temperature drift of offset
Long term stability of offset
THV
0
TCDV
0
HTDV
0
LTSV
0
17)
17)
17)
17)
tbd
tbd
tbd
tbd
% FSON
% FSON
% FSON
% FSON
AS SEN PD
2009-08-03
Page 3 of 8
Please read Cautions and warnings and
Important notes at the end of this document
.
Pressure sensors
Barometric pressure transducer for SMT
Preliminary data
Operating pressures and ordering codes
Parameter @ 25 ° V
DD
= 5 V
C,
Operating pressure
4)
ASB 1200 E
Symbol
p
r
TCV
0
TCV
0
L
S
–
+
Typ.
1.2
-8
-6
±0.3
100
Units
bar
µV/VK
µV/VK
% FS
mV/bar
Temperature coefficient
11)
of offset voltage
[typ]
Nonlinearity
Sensitivity
[typ]
14)
[typ]
13)
Ordering code
AS SEN PD
B58610A0000A001
ASB 1200 E
Product type
2009-08-03
Page 4 of 8
Please read Cautions and warnings and
Important notes at the end of this document
.
Pressure sensors
Barometric pressure transducer for SMT
Preliminary data
Symbols and Terms
1)
2)
ASB 1200 E
3)
4)
5)
6)
7)
Maximum power supply V
DD
This is the maximal allowed voltage, which may be applied to the piezoresistive bridge circuit without damage.
Operating temperature range T
a
This is the operating Temperature range T
a,min
to T
a,max
. Because most of the sensor parameters depend on assembling
conditions like gluing, wire bonding etc, the die has to be tested over the operating temperature range by the customer
fully assembled. For design verification and process control samples are tested over a reduced measuring temperature
range of T
meas,min
to T
meas,max
.
Storage temperature range T
st
If the pressure sensor dies are stored in the temperature range T
st,min
to T
st,max
without applied voltage power supply, this
will not affect the performance of the pressure sensor dies.
Operating pressure range p
r
In the operating pressure range 0 to p
r,max
the pressure sensor die output characteristic is as defined in this specification.
Over pressure p
OV
Pressure cycles in the pressure range 0 to p
ov
do not affect the performance of the pressure sensor dies.
Burst pressure p
berst
Up to the burst pressure p
berst
the diaphragm of the sensor die will not be destroyed mechanically. This parameter is
tested at room temperature on samples by increasing the applied pressure until the diaphragm is destroyed.
Operating power supply V
DD
The pressure sensor parameters are defined for a power supply voltage of V
DD
= 5 V. In the operating power supply
voltage range V
DD,min
to V
DD,max
the ratiometric parameters r(V
DD
) like sensitivity, offset voltage and the temperature
coefficient of the offset voltage are defined by:
r
(
V
DD
)
=
r(5[ V ])
8)
V
DD
5[ V ]
Total bridge resistance R
S
The total bridge resistance is defined between pad X5 and X2 (see the dimensional drawing in this data sheet) of the
closed piezoresistive bridge circuit. The total bridge resistance is in a good approximation the output impedance of the
piezoresistive bridge circuit. This parameter is tested completely on a wafer (wafer level test measurement).
Temperature coefficients of resistance
α
Rs
and
β
Rs
:
The temperature coefficients of resistance are tested for design verification on samples
over a reduced temperature range T
meas
,
min
= –20 ° to T
meas
,
max
= 80 ° with T
R
= 25 °
C
C
C.
The temperature coefficients of first and second order are defined with the polynomial:
9)
R
S
(T)
=
R
S
(T
=
25
°
C )
1
+α
Rs
T
−
25
°
C
+β
Rs
T
−
25
°
C
(
)
(
)
2
10)
11)
The coefficients
α
Rs
and
β
Rs
are calculated using the three measurement points of R
s
(T) at T
meas,min
, T
R
and T
meas,max
.
Offset voltage V
0
The offset voltage V
0
is the output voltage V
out
(p = 0 bar abs) at zero absolute pressure and for a bridge voltage power
supply V
DD
= 5 V. For design verification V
0
is measured on samples by extrapolating the output characteristic to zero
bar.
It should be noted that this parameter may be influenced by the assembly.
Temperature coefficient of offset voltage TCV
0
The temperature coefficients of offset voltage are defined for a bridge voltage power supply V
DD
= 5 V.
These parameters strongly depend on assembly conditions like gluing, wire bonding etc.
The temperature coefficients of offset voltage are tested for design verification on samples
over a reduce temperature range, using the temperature T
meas
,
min
= –20 ° T
meas
,
max
= 80 ° and T
R
= 25 °
C,
C
C.
Assuming the offset voltage is mainly due to induce stress TCV
0
may be calculated by extrapolating using:
V
0
(T )
=
1
+ α
s
(T
−
25
°
C)
+ β
s
(T
−
25
°
C)
2
V
o
(25
°
C)
+
v
1
(T
−
25
°
C)
+
v
2
(T
−
25
°
C)
2
(
)(
)
AS SEN PD
2009-08-03
Page 5 of 8
Please read Cautions and warnings and
Important notes at the end of this document
.