MS52XX
SMD Pressure Sensor
SPECIFICATIONS
1, and 12 bar absolute pressure range
Uncompensated
Piezoresistive silicon micromachined sensor
Surface mount 7.6 x 7.6 mm
Low-noise, high-sensitivity, high-linearity
The MS52XX SMD pressure sensor series is designed for
pressure systems with the highest demands on resolution and
accuracy. The device consists of a silicon micromachined
pressure sensor die mounted on a 7.6 x 7.6 mm ceramic carrier
protected by a metal cap. The MS52XX can be delivered in a
highly-sensitive version giving a maximal output voltage or in a
highly-linear version giving a linear output voltage directly
proportional to the applied pressure.
High Sensitivity Version
Full
Product
scale
code
span
MS5201-AN
240 mV
High Linearity Versions
Full
Product
scale
code
span
MS5201-BN
MS5212-BM
150 mV
150 mV
Full scale
pressure
1 bar
12 bar
Linearity
±0.20 % FS
Linearity
±0.05 % FS
±0.05 % FS
SENSOR SOLUTIONS
/// MS52XX
06/2017
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MS52XX
SMD Pressure Sensor
FEATURES
Low-cost SMD ceramic package
High-reliability, low-drift
-40 °C to +125 °C operation range
Optional: Gel protection against humidity and
water
APPLICATIONS
Absolute pressure sensor systems
High resolution altimeters, variometers
Barometers
Engine controls
Tire pressure
PIN CONFIGURATION
SENSOR SOLUTIONS
/// MS52XX
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MS52XX
SMD Pressure Sensor
PIN DESCRIPTION
Pin Name
OUT-
GND
VS+
OUT+
Pin No
1
2
3
4
Function
Negative output voltage of Wheatstone bridge
Ground
Supply voltage of Wheatstone bridge
Positive output voltage of Wheatstone bridge
ABSOLUTE MAXIMUM RATINGS
Parameter
Supply voltage
Storage temperature
Overpressure MS5201-AN
MS5201-BN
MS5212-BM
Symbol
VS+
T
S
P
Conditions
Ta = 25 °C
Min
-
-40
-
-
-
Max
20
+125
5
10
30
Unit
V
°C
bar
Ta = 25 °C
SENSOR SOLUTIONS
/// MS52XX
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MS52XX
SMD Pressure Sensor
ELECTRICAL CHARACTERISTICS
HIGH SENSITIVITY VERSION
Parameter
Operating pressure range
Full-scale span (FS)
Sensitivity
Linearity
Operating temperature range
Zero pressure offset
Pressure hysteresis
Temperature hysteresis
Repeatability
Bridge resistance
Temperature coefficient of resistance
Temperature coefficient of span
Temperature coefficient of offset
Min
0
190
190
-
-40
-40
-
-
-
3.0
+2'400
-1'500
-80
Typ
-
240
240
±0.15
-
0
-
0.3
-
3.4
2'900
-1'900
-
Max
1
290
290
±0.4
125
40
±0.20
0.8
±0.20
3.8
+3'300
-2'300
+80
(Vs+ = 5 V; Ta = 25 °C)
Unit
Notes
bar
mV
mV/bar
% FS
1, 6
°C
mV
% FS
2, 6
% FS
3, 6
% FS
4, 6
kΩ
ppm/°C
5, 6
ppm/°C
5, 6
µV/°C
5, 6
MS5201-AN
NOTES
1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range.
2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating pressure
range.
3) Maximum difference in offset after one thermal cycle from -40°C to +125°C.
4) Same as 2) after 10 pressure cycles.
5) Slope of the end-point straight line from 25°C to 60°C.
6) Not 100% tested.
SENSOR SOLUTIONS
/// MS52XX
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MS52XX
SMD Pressure Sensor
ELECTRICAL CHARACTERISTICS (CONT.)
HIGH LINEARITY VERSIONS
Parameter
Operating pressure range
Full-scale span (FS)
Sensitivity
Linearity
Operating pressure range
Full-scale span (FS)
Sensitivity
Linearity
Operating temperature range
Zero pressure offset
Pressure hysteresis
Temperature hysteresis
Repeatability
Bridge resistance
Temperature coefficient of resistance
Temperature coefficient of span
Temperature coefficient of offset
Min
0
120
120
-
0
120
10
-40
-40
-
-
-
3.0
+2'400
-1'500
-80
Typ
-
150
150
±0.05
-
150
12.5
±0.15
-
0
-
0.3
-
3.4
2'900
-1'900
-
Max
1
180
180
±0.20
12
180
15
±0.20
125
40
±0.20
0.8
±0.20
3.8
+3'300
-2'300
+80
(Vs+ = 5 V; Ta = 25 °C)
Unit
Notes
bar
mV
mV/bar
% FS
1, 6
bar
mV
mV/bar
% FS
1, 6
°C
mV
% FS
2, 6
% FS
3, 6
% FS
4, 6, 7
kΩ
ppm/°C
5, 6
ppm/°C
5, 6
µV/°C
5, 6
MS5201-BN
MS5212-BM
All Ranges
NOTES
1) Deviation at one half full-scale pressure from the least squares best line fit over pressure range.
2) Maximum difference of output voltage after 1 pressure cycle at any pressure within the operating pressure
range.
3) Maximum difference in offset after one thermal cycle from -40°C to +125°C.
4) Same as 2) after 10 pressure cycles.
5) Slope of the end-point straight line from 25°C to 60°C.
6) Not 100% tested.
7) MS5212-BM: Max. 0.3% FS.
SENSOR SOLUTIONS
/// MS52XX
06/2017
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