COMMERCIAL LASERS
High-Power Q-Switched Diode-Pumped UV Laser
Q Series
Key Features
• Highest commercially available pulse energy and peak power
• Tighter process control due to superior energy stability
enabled by unique intracavity harmonic generation
• Capable of processing widest range of materials due to wide
range of pulse energies and repetition rates
• High reliability due to low fluence in harmonic crystals and
no cavity optic coatings exposed to UV
• 355 or 532 nm outputs available
Applications
• Solar cell processing
• Wafer scribing
• Full-cut thin wafer dicing
• Low-k dielectric grooving
• Micro via drilling
• Micromachining of silicon and metals
The JDSU Q Series lasers lead the market for high-power Q-switched diode-pumped
UV lasers used for a wide variety of micromachining and solar cell processing
applications. Whether for high pulse-energy processing of refractory materials
such as silicon; high repetition rate processing of packaging materials such as
Kapton; or patterning thin-film solar cells, the Q Series lasers deliver unsurpassed
performance combined with industry-leading uptime.
Due to the self-stabilizing characteristics of intracavity UV harmonic generation,
all Q Series lasers exhibit inherently high pulse-to-pulse energy and long-term
output power stability. In addition, the excellent thermal stability of the unique
Nd:YAG-based direct-coupled pump (DCP) architecture maintains exceptionally
stable beam position and profile, which is important for processes requiring
accurate feature placement. These advantages enable Q series lasers to achieve
the tightest possible process tolerances for micromachining and other materials
processing applications.
NORTH AMERICA
:
800 498-JDSU (5378)
WORLDWIDE
:
+800 5378-JDSU
WEBSITE
:
www.jdsu.com
HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER
2
Q Series 355 nm Laser Head
(Specifications in inches [mm] unless otherwise noted. Dimensions include mounting pads.)
LOCATION POINT, 3X
.25
[6.4]
8.75 [222.3]
10.00 [254.0]
9.84 [250.0]
5.00
[127.0]
4.92
[125.0]
4.92
[125.0]
5.00
[127.0]
3X, .266 WIDE X .346 LONG SLOT
[3X, 6.8 WIDE X 8.8 LONG SLOT]
COOLING WATER CONNECTION, 2X
.90
[22.9]
5.50 [139.7]
2.75 [69.8]
A
3.39 [86.1]
1.987 [50.47]
3X MOUNTING PADS
Laser Center
1.050 [26.65]
.100 [2.54]
32.00 [812.8]
.040
[1.0]
2.19 [55.6]
1.06
[26.9]
4.82
[122.4]
.94
[23.9]
UMBILICAL CABLE PORT
Detail A
Scale 1:2
.669
[17.00]
Power Supply and Chiller
(Specifications in inches [mm] unless otherwise noted. )
17.3
[440]
16.80
[426.7]
21.0
[533]
WATER FILL PORT
VOLTAGE SELECTION
ACCESS
WATER HOSE FITTINGS
14.34
[364.2]
10.4
[264]
13.00
[329]
ELECTRICAL
INTERFACE PANEL
4X, .218 X .375
3.00 [76.2]
.24 [6.1]
.35 [8.9]
3.48 [88.4]
18.30 [464.8]
HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER
3
Q30X 355nm Models
Typical Performance
Typical Performance
15
300
Q301
Q304
355-nm Average Power (W)
250
Pulse Widths (ns)
10
Q302
200
150
Q303
5
100
50
0
0
0
20 40 60 80 100 120 140
Pulse Repetition Rate (kHz)
Q33X Lower Coast 355nm Models
Typical Performance
Typical Performance
10
200
Q331
Q332
Q333
355-nm Average Power (W)
8
6
4
2
0
0
160
Pulse Widths (ns)
120
80
40
0
20 40 60 80 100 120 140
Pulse Repetition Rate (kHz)
HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER
4
Q Series Laser Head Specifications
Parameter
Wavelength
Spatial mode
M-squared
1
Waist location
1
(internal, from beam exit)
Waist diameter
1
, 1/e
2
Beam divergence
1
, full angle
Beam pointing drift, full angle
Pointing drift, over 8 hours, full angle
2
Beam position accuracy, unit to unit
Beam pointing accuracy, unit to unit
Repetition rate
Internally triggered
Externally triggered
Constant pulse energy range
Average output power
3
At 10, 20, and 30 kHz
At 30, 50, and 70 kHz
At 70, 100, and 130 kHz
At 40, 60, and 90 kHz
Pulse width
4
At 10, 20, and 30 kHz
At 30, 50, and 70 kHz
At 70, 100, and 130 kHz
At 40, 60, and 90 kHz
Pulse energy fluctuations
5
At 10, 20, and 30 kHz
At 30, 50, and 70 kHz
At 70, 100, and 130 kHz
At 40, 60, and 90 kHz
Power drift over 8 hours
2, 6
Beam roundness
Polarization
Warm-up time
From cold start
From standby
Operating ambient temperature
Relative humidity, non-condensing
Weight
Q301-HD
355 nm
TEM
00
<1.2
42±0.4 cm
0.26 mm nominal
1.8±0.35 mrad
<10 µrad/°C
<50 µrad
<2.5 mm from nominal
<1° from nominal
5 to 250 kHz
0 to 250 kHz
<10 kHz
≥10.0,
8.0 and 6.0 W
-
-
-
34±10,52±15,69±15 ns
-
-
<1.0%, 10 – 30 kHz
-
-
-
<±2%
>85% circular
>100:1, horizontal
<20 minutes
<10 minutes
15 to 35°C
10 to 80%
14.5 kg
Q302-HD
355 nm
TEM
00
<1.2
42±0.4 cm
0.26 mm nominal
1.8±0.35 mrad
<10 µrad/°C
<50 µrad
<2.5 mm from nominal
<1° from nominal
5 to 250 kHz
0 to 250 kHz
<30 kHz
-
≥8.0,
6.8, and 5.0 W
-
-
-
78±20,107±20,135±30 ns
-
-
-
<1.5%, 30 – 50 kHz
-
-
<±2%
>85% circular
>100:1, horizontal
<20 minutes
<10 minutes
15 to 35°C
10 to 80%
14.5 kg
Q303-HD
355 nm
TEM
00
<1.2
42±0.4 cm
0.26 mm nominal
1.8±0.35 mrad
<10 µrad/°C
<50 µrad
<2.5 mm from nominal
<1° from nominal
5 to 250 kHz
0 to 250 kHz
<50 kHz
Q304-HD
355 nm
TEM
00
<1.2
42±0.4 cm
0.25 mm nominal
2.0±0.35 mrad
<10 µrad/°C
<50 µrad
<2.5 mm from nominal
<1° from nominal
5 to 250 kHz
0 to 250 kHz
<40 kHz
-
-
≥6.5,
4.5, and 2.9 W -
-
≥11.0,
9.5, 6.3 W
-
-
-
-
135±35,180±45,225±60 ns -
-
95±30,130±35,180±50 ns
-
-
<1.5%, <2.0%, <2.5%
-
<±2%
>85% circular
>100:1, horizontal
<20 minutes
<10 minutes
15 to 35°C
10 to 80%
14.5 kg
-
-
-
<1.5%, 40 – 90 kHz
<±2%
>85% circular
>100:1, horizontal
<20 minutes
<10 minutes
15 to 35°C
10 to 80%
14.5 kg
1. Specifications hold over different repetition rate ranges, depending on the laser model, as follows:
Q301 from 10 to 30 kHz, for Q302 from 30 to 70 kHz, for Q303 from 70 to 130 kHz, and Q304 from 40 to 90 kHz.
2. Ambient temperature constant ±2°C.
3. Averaged for 1 hour after >80 minutes of continuous operation.
4. Pulse duration measured according to method detailed in JDSU application note titled “Optical Pulse Width Measurement Techniques for Q-Series Lasers.”
5. Pulse Energy Fluctuations =
σ
/
μ
x 100%,
σ
= standard deviation,
μ
= average pulse energy.
6. Measured after more than 80 minutes of continuous operation.
HIGH-POWER Q-SWITCHED DIODE-PUMPED UV LASER
5
Q Series Laser Head Specifications
Continued
Parameter
Wavelength
Spatial mode
M-squared
1
Waist location
1
(internal, from beam exit)
Waist diameter
1
, 1/e
2
Beam divergence
1
, full angle
Beam pointing drift, full angle
Pointing drift, over 8 hours, full angle
2
Beam position accuracy, unit to unit
Beam pointing accuracy, unit to unit
Repetition rate
Internally triggered
Externally triggered
Constant pulse energy range
Average output power
3
At 10, 20, and 30 kHz
At 30, 50, and 70 kHz
At 70, 100, and 130 kHz
Pulse width
4
At 10, 20, and 30 kHz
At 30, 50, and 70 kHz
At 70, 100, and 130 kHz
Pulse energy fluctuations
5
At 10, 20, and 30 kHz
At 30, 50, and 70 kHz
At 70, 100, and 130 kHz
Power drift over 8 hours
2, 6
Beam roundness
Polarization
Warm-up time
From cold start
From standby
Operating ambient temperature
Relative humidity, non-condensing
Weight
Q331-HD
355 nm
TEM
00
<1.2
42±0.4 cm
0.26 mm nominal
1.8±0.35 mrad
<10 µrad/°C
<50 µrad
<2.5 mm from nominal
<1° from nominal
5 to 250 kHz
0 to 250 kHz
<10 kHz
≥5.0,
4.0 and 3.0 W
-
-
34±10, 52±15, 69±15 ns
-
Q332-HD
355 nm
TEM
00
<1.2
42±0.4 cm
0.26 mm nominal
1.8±0.35 mrad
<10 µrad/°C
<50 µrad
<2.5 mm from nominal
<1° from nominal
5 to 250 kHz
0 to 250 kHz
<30 kHz
-
≥4.0,
3.4, and 2.5 W
-
-
78±20, 107±20, 135±30 ns
-
-
<3%, 30 – 50 kHz
-
<±2%
>85% circular
>100:1, horizontal
<20 minutes
<10 minutes
15 to 35°C
10 to 80%
14.5 kg
Q333-HD
355 nm
TEM
00
<1.2
42±0.4 cm
0.26 mm nominal
1.8±0.35 mrad
<10 µrad/°C
<50 µrad
<2.5 mm from nominal
<1° from nominal
5 to 250 kHz
0 to 250 kHz
<50 kHz
-
-
≥3.6,
2.5, and 1.6 W
-
-
132±30, 168±40, 204±55 ns
-
-
<3%, <2.0%, <2.5%
<±2%
>85% circular
>100:1, horizontal
<20 minutes
<10 minutes
15 to 35°C
10 to 80%
14.5 kg
<2.0%, 10 – 30 kHz
-
-
<±2%
>85% circular
>100:1, horizontal
<20 minutes
<10 minutes
15 to 35°C
10 to 80%
14.5 kg
1. Specification holds over different repetition rate ranges, depending on the laser model, as follows:
Q331 from 10 to 30 kHz, for Q332 from 30 to 70 kHz, for Q333 from 70 to 130 kHz.
2. Ambient temperature constant ±2°C.
3. Averaged for 1 hour after >80 minutes of continuous operation.
4. Pulse duration measured according to method detailed in JDSU application note titled “Optical Pulse Width Measurement Techniques for Q-Series Lasers.”
5. Pulse Energy Fluctuations =
σ
/
μ
x 100%,
σ
= standard deviation,
μ
= average pulse energy.
6. Measured after more than 80 minutes of continuous operation.
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