FMA Series
Mass flow sensors for gases
FEATURES
· Ranges 0...1000 sccm
1
and 0...6 slpm
2
· Actual mass flow sensing
· 1...5 V output
· Manifold mount/O-ring sealed
· Sensortechnics PRO services
MEDIA COMPATIBILITY
To be used with dry gases only
The FMA series is NOT designed for liquid
flow and will be damaged by liquid flow through
the sensor
SPECIFICATIONS
Maximum ratings
Supply voltage
3
8 to 15 V
typ. 10 ±0.01 V
ELECTRICAL CONNECTION
P1
P2
Power consumption
FMAL001DU
FMAL006DU
Output load
NPN (Sinking)
PNP (Sourcing)
Temperature limits
Operating
Storage
Mechanical shock
60 mW
75 mW
10 mA
20 mA
1 2 3
-25 to 85°C
-40 to 90°C
100 g (5 drops, 6 axes)
Pin 1: V
out
Pin 2: +V
s
Pin 3: GND
Note:
1
sccm denotes standard cubic centimeters per minute, 1000 sccm = 1 slpm
2
slpm denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0°C, 1 bar, 50% RH.
3
Output voltage is ratiometric to supply voltage
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FMA Series
Mass flow sensors for gases
FLOW SENSOR CHARACTERISTICS
4
(V
S
= 10 ±0.01 V, T
A
= 25°C)
Part no.
FMAL001DU
FMAL006DU
Flow range
(full scale)
1000 sccm
1
6 SLPM
2
Max. flow
ch an g e
5
5.0 l/sec
5.0 l/sec
Output voltage
@ trim point
5 ±0.15 V @ 1000 sccm
1
5 ±0.15 V @ 6 SLPM
2
PERFORMANCE CHARACTERISTICS
(V
S
= 10 ±0.01 V, T
A
= 25°C)
Characteristics
Zero offset
Repeatability and hysteresis
(combined)
Ratiometricity error
3
Temperature effects
6
Offset
Span
-25 to 85 °C
-25 to 25 °C
FMAL001DU
FMAL006DU
25 to 85 °C
FMAL001DU
FMAL006DU
Response time
Common mode pressure
FMAL001DU
FMAL006DU
FMAL001DU
FMAL006DU
Min.
0.95
Typ.
1.0
Max.
1.05
±0.5
±1.0
±0.3
Unit
V
% reading
±0.025
-5.0
-6.0
V
% reading
6.0
6.0
1.0
3.0
150
p si
25
ms
Notes:
1
sccm denotes standard cubic centimeters per minute, 1000 sccm = 1 slpm
2
SLPM denotes standard liters per minute, which is a flow measurement referenced to standard conditions of 0°C, 1 bar, 50% RH.
3
Output voltage is ratiometric to supply voltage
4
A 5 micron filter is recommended for all devices.
5
Maximum allowable rate of flow change to prevent damage.
6
Shift is relative to 25 °C.
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FMA Series
Mass flow sensors for gases
FLOW SPECIFICATIONS
(V
S
= 10 ±0.01 V, T
A
= 25°C)
FMAL001DU
Press.
(mbar)
2.23
1.87
1.52
1.16
0.94
0.71
0.50
0.33
0.19
0.08
0.00
Flow
(sccm)
7
1000
900
800
700
600
500
400
300
200
100
0
Nom.
(V
DC
)
5.00
4.97
4.89
4.78
4.63
4.43
4.15
3.76
3.23
2.49
1.00
Tol.
(± V
DC
)
0.15
0.16
0.17
0.18
0.19
0.20
0.21
0.19
0.17
0.14
0.05
Press.
(mbar)
20.0
14.7
9.07
6.40
3.35
1.17
0.00
FMAL006DU
Flow
(slpm)
7
6
5
4
3
2
1
0
Nom.
(V
DC
)
5.00
4.89
4.70
4.40
3.80
3.10
1.00
Tol.
(± V
DC
)
0.15
0.20
0.25
0.35
0.30
0.30
0.05
Note:
7
Devices are calibrated in mass flow. Tolerance values apply to calibration type only.
OUTPUT VS. FLOW CURVES
FMAL001DU
FMAL006DU
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FMA Series
Mass flow sensors for gases
OUTLINE DRAWING
30.5
(1.20)
27.7
(1.09)
14.0
(0.55)
32.2
(1.19)
7.62
(0.30)
3 2 1
0.64
(0.025)
34.0
(1.34)
3.0
(0.12)
10.9 8.4
(0.43) (0.33)
Ø 3.0
(Ø 0.12)
Ø 3.51
(Ø 0.138)
2.54
(0.10)
7.9
(0.31)
12.7
(0.50)
17.3
(0.68)
2.5
(0.10)
4.8
(0.19)
Ø 6.2
(Ø 0.24)
P1
1 2 3
P2
Ø 2.0
(Ø 0.08)
Pin 1: V
out
Pin 2: +V
s
Pin 3: GND
third angle projection
mass:
approx. 11 g
dimensions in mm (inches)
Note: Positiv flow direction is defined as proceeding from port 1 (P1) to port 2 (P2) and
results in positive output.
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FMA Series
Mass flow sensors for gases
GAS CORRECTION FACTORS
8
Gas type
Helium (He)
Hydrogen (H
2
)
Argon (Ar)
Nitrogen (N
2
)
Oxygen (O
2
)
Ai r
Nitric oxide (NO)
Carbon monoxide (CO)
Methane (CH
4
)
Ammonia (NH
3
)
Nitrous oxide (N
2
O)
Nitrogen dioxide (NO
2
)
Carbon dioxide (CO
2
)
Correction factor (approx.)
0.5
9
0.7
9,10
0.95
1.0
1.0
1.0
1.0
1.0
1.1
1.1
1.35
1.35
1.35
Notes:
8
Gas correction factors are referenced to nitrogen (N
2
) as calibration gas type. Approximate gas correction factors are provided
as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates.
9
When sensing Hydrogen (H
2
) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage:
Hydrogen typ. 12 V, Helium typ. 15 V
10
Hydrogen (H
2
) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing
hydrogen flow and are designated with an "H" at the end of the order number.
ORDERING INFORMATION - AVAILABLE LISTINGS
Note:
Preferred listings are highlighted in grey
Flow range
1 0 0 0 sccm
6 S LP M
Dry gas
FMAL001DU
FMAL006DU
Hydrogen gas
10
FMAL001HU
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... plus other services on request
Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the
application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others.
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