VSO
®
Low Flow
Normally closed proportional solenoid valve
FEATURES
· 2-way normally closed
· Applications where control is critical
or flow is required below 600 sccm
· Provides computer-automated
calibrations and full calibration
traceability
· Uses either DC current or pulse width
modulation with closed loop feedback
to deliver optimal system performance
· Maintains ideal flow through thermal
compensation
· Highly repeatable
· Oxygen and analytically clean
MEDIA COMPATIBILITY
Air, argon, helium, hydrogen, methane, nitrogen,
oxygen & others
PHYSICAL PROPERTIES
Operating environment
Storage temperature
Length
0 to 55 °C
-40 to 70 °C
45.3 mm (1.785 in)
16.5 mm (0.625 in)
17 mm (0.67 in)
manifold mount with 17 µm screens
63 g (2.2 oz)
0.508 cm
3
(0.031 in
3
)
17 µm
None required
ELECTRICAL
Power
Voltage
max. 2 W
max. 6.5, 8, 12 or 18 V
DC
Width
Height
Porting
Weight
Internal volume
Filtration (recommended)
Lubrication
VSO is a registered trademark of Parker Hannifin Corporation.
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VSO
®
Low Flow
Normally closed proportional solenoid valve
PERFORMANCE CHARACTERISTICS
Part no.
910000200...
Orifice siz es
0.003" (0.076 mm)
Leak rate
1
≤
0.2 sccm of helium
(bubble tight)
R esp o n se
<15 msec cycling
FLOW CURVE
2
Notes:
1
sccm denotes Standard Cubic Centimeters per Minute. It is a unit for the flow rate at standard conditions of temperature and
pressure. 1000 sccm = 1 slpm.
2
slpm denotes Standard Liters per Minute. It is a unit for the flow rate at standard conditions of temperature and pressure.
1 slpm = 1000 sccm.
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VSO
®
Low Flow
Normally closed proportional solenoid valve
OUTLINE DRAWING
Basic valve dimensions
Port and mounting hole diagrams
dimensions in inches (mm)
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VSO
®
Low Flow
Normally closed proportional solenoid valve
ELECTRICAL INTERFACE
(Wire leads,
no terminals)
PNEUMATIC INTERFACE
(No barbs,
face seal to manifold
with screeen)
ORDERING INFORMATION
Coil selection
Series
Options
910
Model number
Max. voltage*
000200
VSO, low flow,
0.003" (0.076 mm)
orifice size
001:
002:
003:
004:
6.5 V
DC
8 V
DC
12 V
D C
18 V
D C
Resistance**
47
Ω
68
Ω
136
Ω
274
Ω
Current***
0.152 A
0.115 A
0.080 A
0.060 A
* max. voltage for continuous full flow, ambient temp. 55°C
** coil resistance for room temp.
*** input current for full flow
Example:
910
000200
001
Note: Not all combinations might be available.
Please contact your nearest Sensortechnics sales representative for further information.
Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the
application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others.
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