Low Pressure
Digital & Analog Sensor
SM7291, SM7391, SM7491
Gauge and Differential Pressure Sensor
FEATURES
•
•
•
•
•
•
•
Pressure range from 0.07 to 0.29 psi; gauge, differential or
asymmetric differential outputs
Digital Accuracy: +/- 1 %FS; Analog Accuracy: +/- 1.5 %FS
16-bit digital, pressure calibrated and temperature
compensated output
I2C and analog Output interface available
Compensated temperature range: -20 to 85°C
Robust JEDEC SOIC-16 package for automated assembly
Manufactured according to ISO9001 and ISO/TS 16949
standards
DESCRIPTION
The SM7X91 series are a low pressure MEMS sensor family offers
state-of-the-art pressure transducer technology and CMOS mixed
signal processing technology to produce a digital & analog output, fully
conditioned, multi-order pressure and temperature compensated
outputs. This series provides JEDEC standard SOIC-16 package with a
dual vertical or horizontal ports options. It is available in gauge,
differential, asymmetric differential configurations. With the dual
porting, a reference measurement is possible to minimize errors due
to changes in ambient pressure.
Combining the pressure sensor with a signal-conditioning ASIC in a
single package simplifies the use of advanced silicon micro-machined
pressure sensors. The pressure sensor can be mounted directly on a
standard printed circuit board and a high level, calibrated pressure
signal can be acquired from the digital interface. This eliminates the
need for additional circuitry, such as a compensation network or
microcontroller containing a custom correction algorithm.
Customer-specified pressure ranges and supply voltages are
available.
The SM7291, SM7391 and SM7491 series shipped in sticks or tape &
reel.
Medical
Sleep Apnea
CPAP
Ventilators
Gas Flow Instrumentation
Air Flow Monitors
Negative Pressure Wound Therapy
Industrial
Airflow Measurement
Pneumatic Gauges
Pressure Switches
Safety Cabinets
Life Sciences
Gas Flow Instrumentation
Consumer
Sports Equipment
Appliances
Silicon Microstructures, Inc. 2001-2017. All rights reserved.
DOC # 40D7860.02
Page 1
SM7291, SM7391, SM7491 Series
www.si-micro.com
1. Absolute Maximum Ratings
All parameters are specified at VDD = 3.3 V / 5.0 V supply voltage at 25°C, unless otherwise noted.
No.
1
2
3
4
5
6
7
Characteristic
Compensated Temperature
Operating Temperature
Storage Temperature
Proof Pressure
Burst Pressure
(a, c)
(a)
Symbol
T
COMP
T
OP
T
STG
P
Proof
P
Burst
VDD
MIN/MAX
Minimum
-20
-40
-40
Maximum
85
105
125
1
3
Units
°C
°C
°C
psi
psi
V
(a)
(a, d)
Supply voltage
Media Compatibility(a, b)
-0.3
6
Notes:
a. Tested on a sample basis.
b. Clean, dry gas compatible with wetted materials. Wetted materials include silicon, epoxy, RTV, gold and aluminum.
c. Proof pressure is defined as the maximum pressure to which the device can be taken and still perform within specifications after
returning to the operating pressure range
d. Burst pressure is the pressure at which the device suffers catastrophic failure resulting in pressure loss through the device.
2. ESD
All parameters are specified at VDD = 3.3 V / 5.0 V supply voltage at 25°C, unless otherwise noted.
No.
8
Description
ESD HBM Protection at all Pins
Condition
AEC Q100-002 (HBM)
chip level test
Symbol
V
ESD(HBM)
Min.
-2
Typ.
Max.
+2
Units
kV
3. Electrical Characteristics
All parameters are specified at VDD = 5.0 V / 3.3 V DC supply voltage at 25 C, unless otherwise noted.
o
No.
9
Description
Supply Voltage
Symbol
V
DD
Min.
4.75
3
Typ.
5.0
3.3
V
V
4.5
3
Max.
5.25
Units
V
3.6
9
0.9
-
o
9
VDD + 0.3
-
o
V
V
mA
mA
10
11
12
13
Low level input voltage at Digital I/O
High level input voltage at Digital I/O
Current Consumption with analog output
Current Consumption without analog output
V
IN,I2C,lo
V
IN,I2C,hi
.9
-0.3
-0
.9
0.8*VDD
-0
Silicon Microstructures, Inc. 2001-2017. All rights reserved.
DOC # 40DS7860.02
Page 2
SM7291, SM7391, SM7491 Series
www.si-micro.com
4. External Components
No.
14
Description
Supply bypass capacitor
Symbol
C
VDD
Min.
Typ.
100
Max.
Units
nF
5. OPERATING CHARACTERISTICS TABLE
All parameters are specified at VDD = 5.0 V / 3.3 V DC supply voltage at 25°C, unless otherwise noted.
No.
15
16
17
18
19
20
21
22
23
Characteristic
Digital Pressure Output
Digital Pressure Output
@
@
Symbol
P
MIN
P
MAX
DOUT
MIN
DOUT
MAX
DFS
Minimum
Typical
-26214
26214
52428
16
Maximum
Units
Counts
Counts
Counts
Bits
Digital Full Scale Span
Resolution
Digital Output Accuracy
Analog Pressure Output
Analog Pressure Output
(f, g, h)
DACC
AOUT
MIN
AOUT
MAX
AFS
AACC
-1
10
90
80
-1.5
+1
%FS
%VDD
%VDD
%VDD
@
P
MIN
P
MAX
@
Analog Full Scale Span
Analog Output Accuracy
(f, g, h)
+1.5
%FS
Calibrated Pressure Ranges
No.
21
22
23
Device Type
SM7291 – Gauge
SM7391 – Differential
SM7491 -- Asymmetric
P
MIN
(psi)
0
-0.29 to -0.07
-0.29 to 0
P
MAX
(psi)
+0.07 to +0.29
+0.07 to +0.29
0 to +0.29
Comment
Absolute value of P
MIN
must match absolute value of P
MAX
Delta between P
MAX
and P
MIN
must be at least 0.07 psi
Notes:
e. Only the typical values are shown here. However, the digital output values can be customized or changed upon request. Please refer
to the tear sheet for the specific product to get updated information.
f. The accuracy specification applies across the compensated temp range. This specification includes the combination of linearity,
repeatability, and hysteresis errors over pressure, temperature, and voltage.
g. Maximum 10-year total output shift < ±1%FS based on 1000 hours of HTOL testing.
h. For less demanding applications, devices with relaxed accuracy specifications are available.
*Custom calibration pressures and voltages are available to meet specific customer demands.
Silicon Microstructures, Inc. 2001-2017. All rights reserved.
DOC # 40DS7860.02
Page 3
SM7291, SM7391, SM7491 Series
www.si-micro.com
5. Sensor Transfer Function
Digital Pressure Transfer Function
=
+
_
− _
(
−
)
_
− _
and
are minimum and maximum rating pressure in specified pressure unit on the specification.
_
and
_
are minimum and maximum digital counts on the specification.
_
is digital reading from the output and
is the converted pressure output based on
_
.
For example, the
and
for the sensor are specified as -0.1 and +0.1 psi. The
and
are -
26214 and +26214. So,
= −0.1 +
+ 26214
× 0.2 psi
52428
Silicon Microstructures, Inc. 2001-2017. All rights reserved.
DOC # 40DS7860.02
Page 4
SM7291, SM7391, SM7491 Series
www.si-micro.com
6. Package Dimensions
Notes:
•
•
•
•
•
All dimensions in units of [mm]
Moisture Sensitivity Level (MSL): Level 3
Wetted materials: Silicon, glass, gold, aluminum, copper, stainless, epoxy, mold compound.
[B] is tube connected to bottom side of sensor die.
[T] is tube connected to top side of sensor die. Topside pressure is positive pressure. An increase in topside pressure will result in
an increase in sensor output unless otherwise noted on the tear sheet.
Silicon Microstructures, Inc. 2001-2017. All rights reserved.
DOC # 40DS7860.02
Page 5
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