Data Sheet
MiCS-4514
0278 rev 16
The MiCS-4514 is a compact MOS sensor with two fully
independent sensing elements on one package.
The MiCS-4514 is a robust MEMS sensor for the
detection of pollution from automobile exhausts.
10.00
Ethanol
10.00
CO
Features
• Smallest footprint for compact designs
(5 x 7 x 1.55 mm)
• Robust MEMS sensor for harsh environments
• High-volume manufacturing for low-cost
applications
• Short lead-times
CO
Hydrogen
1.00
1.00
Rs/R0
Rs/R0
H2S
Ammonia
Ammonia
Methane
Methane
Propane
Propane
Iso-butane
Iso-butane
0.10
0.10
Ethanol
Hydrogen
0.01
0.01
0.1
0.1
1
1
10
10
100
1000
100
1000
Concentration [ppm]
Concentration [ppm]
10000
10000
100000
100000
RED sensor, continuous power ON, 25°C, 50% RH
Detectable gases
• Carbon monoxide
• Nitrogen dioxide
• Ethanol
• Hydrogen
• Ammonia
• Methane
CO
NO
2
C
2
H
5
OH
H
2
NH
3
CH
4
1 – 1000ppm
0.05 – 10ppm
10 – 500ppm
1 – 1000ppm
1 – 500ppm
>1000ppm
Rs/R0
100.00
NO2
10.00
Hydrogen
1.00
NO
0.10
0.01
0.01
0.1
1
Concentration [ppm]
10
100
For more information please contact:
info.em@sgxsensortech.com
SGX Sensortech, Courtils 1
CH-2035 Corcelles-Cormondrèche
Switzerland
www.sgxsensortech.com
OX sensor, continuous power ON, 25°C, 50% RH
Page 1 of 5
Data Sheet
MiCS-4514
0278 rev 16
Performance RED sensor
Characteristic
RED sensor
Sensing resistance in air (see note 1)
Typical CO detection range
Sensitivity factor (see note 2)
Symbol
R
0
FS
S
60
-
Typ
-
Min
100
1
1.2
Max
1500
1000
50
Unit
kΩ
ppm
-
Performance OX sensor
Characteristic
OX sensor
Sensing resistance in air (see note 1)
Typical NO
2
detection range
Sensitivity factor (see note 3)
Symbol
R
0
FS
S
R
-
Typ
-
Min
0.8
0.05
2
Max
20
10
-
Unit
kΩ
ppm
-
Notes:
1. Sensing resistance in air R
0
is measured under controlled ambient conditions, i.e. synthetic air at 23
±5°C and 50 ± 10% RH for RED sensor and synthetic air at 23 ±5°C and ≤ 5% RH for OX sensor.
Sampling test.
2. Sensitivity factor is defined as Rs in air divided by Rs at 60 ppm CO. Test conditions are 23 ± 5°C and
50 ± 10% RH. Indicative values only. Sampling test.
3. Sensitivity factor is defined as Rs at 0.25 ppm NO
2
, divided by Rs in air. Test conditions are 23 ± 5°C
and ≤ 5% RH . Indicative values only. Sampling test.
IMPORTANT PRECAUTIONS:
Read the following instructions carefully before using the MiCS-4514 described here to avoid erroneous
readings and to prevent the device from permanent damage.
•
The sensor must be reflow soldered in a neutral atmosphere, without soldering flux vapours.
•
The sensor must not be exposed to high concentrations of organic solvents, silicone vapours or
cigarette-smoke in order to avoid poisoning the sensitive layer.
•
Heater voltage above the specified maximum rating will destroy the sensor due to overheating.
•
This sensor is to be placed in a filtered package that protects it against water and dust projections.
•
SGX sensortech strongly recommends using ESD protection equipment to handle the sensor.
Page 2 of 5
Data Sheet
MiCS-4514
0278 rev 16
MiCS-4514 with recommended supply circuit (top view)
RDRED is a 82
Ω
and RDOX is a 133Ω. These resistors are
necessary to obtain the right temperatures on the two
independant heaters while using a single 5V power supply.
The resulting voltages are typically VHRED = 2.4V and
VHOX= 1.7V.
Power circuit and measurement circuit
MiCS-4514 with measurement circuit (top view)
The two voltages measured on the load resistors are
directly linked to the resistances of the RED and OX sensors
respectively. RLOAD must be 820
Ω
at the lowest in order
not to damage the sensitive layer.
Parameter
RED sensor/OX sensor
Heating power
Heating voltage
Heating current
Heating resistance
at nominal power
Symbol
P
H
V
H
I
H
R
H
Typ
76/43
2.4/1.7
32/26
74/66
Min
71/30
-
-
66/59
Max
81/50
-
-
82/73
Unit
mW
V
mA
Ω
Rating
Maximum heater power dissipation
Maximum sensitive layer power dissipation
Voltage supplyHeating current
Relative humidity range
Ambient operating temperature
Storage temperature range
Storage humidity range
Symbol
P
H
Ps
Vsupply
RH
Tamb
Tsto
RHsto
Value / Range
88 (RED sensor)/50 (OX
sensor)
8
4.9 – 5.1
5 – 95
-30 – 85
-40 – 120
5 - 95
Unit
mW
mW
V
%RH
°C
°C
%RH
Page 3 of 5
Data Sheet
MiCS-4514
0278 rev 16
Package outline dimensions
The package is compatible with SMD assembly process.
Pin
A
B
C
Connection
Rh1 OX
Rs1 OX
Rh1 RED
Operating
D Rs1 RED
conditions
E
The heating power
NC
typically 80 mW and 43
is
F
Rh2 RED
mW for the RED and OX sensor respectively.
Heating voltage is 2.35 and 1.7 V.
G
Rs2 RED
Heating current is 34 and 26 mA.
H
Rh2 OX
Heating resistance at nominal power is 74 and
J
Rs2 OX
66 ohm.
K
NC
The resistance under air is 100 – 1500 kohm for
the RED sensor and 0.8 – 20 kohm for the OX
sensor.
MiCS-4514 configuration (bottom view)
Sensor configuration
The silicon gas sensor structure consists of an accurately micro machined diaphragm with an
embedded heating resistor and the sensing layer on top.
The MiCS-4514 includes two sensor chips with independent heaters and sensitive layers. One sensor
chip detects oxidising gases (OX) and the other sensor detects reducing gases (RED). The internal
connections are shown above.
Page 4 of 5
Data Sheet
MiCS-4514
0278 rev 16
Power circuit
The two resistors (82 ohm for RED and 51+82
Packaging
ohm for OX) are necessary to obtain the right
The sensors are the two in a tape and reel for
temperatures onpackagedindependent heaters
expedition.
while using a 5V power supply.
The sensors are placed in a carrier type. The
dimensions of the cavity are 5.5 x 7.5 x 2.55 mm
(the tolerance is +/- 0.2 mm).
The outside dimension of the reel is either 178
+- mm (for a maximum of 700 sensors ) or 330
+ 0.25 / -4 mm (for a maximum of 2000
sensors).
For more information please contact:
info.em@sgxsensortech.com
SGX Sensortech, Courtils 1
CH-2035 Corcelles-Cormondrèche
Switzerland
www.sgxsensortech.com
Whilst SGX sensortech has taken care to ensure the accuracy of the information contained herein it accepts no responsibility for the consequences
of any use thereof and also reserves the right to change the specification of goods without notice. SGX sensortech accepts no liability beyond the set
out in its standard conditions of sale in respect of infringement of third party patents arising from the use of tubes or other devices in accordance
with information contained herein.
Page 5 of 5
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