Data Sheet
MiCS-5914
1108 rev 4
The MiCS-5914 is a compact MOS sensor.
The MiCS-5914 is a robust MEMS sensor for ammonia
detection; suitable also for gas leak detection and
indoor and outdoor air quality monitoring.
Features
• Smallest footprint for compact designs
(5 x 7 x 1.55 mm)
• Robust MEMS sensor for harsh environments
• High-volume manufacturing for low-cost
applications
• Short lead-times
10.0
1.0
Propane
Rs/R0
Hydrogen
0.1
Ethanol
Ammonia
Iso-butane
Detectable gases
• Ammonia
• Ethanol
• Hydrogen
• Propane
• Iso-butane
NH
3
C
2
H
5
OH
H
2
C
3
H
8
C
4
H
10
1 – 500ppm
10 – 500ppm
1 – 1000ppm
>1000ppm
>1000ppm
0.0
1
10
100
1000
Concentration [ppm]
10000
100000
Continuous power ON, 25°C, 50% RH
For more information please contact:
info.em@sgxsensortech.com
SGX Sensortech, Courtils 1
CH-2035 Corcelles-Cormondrèche
Switzerland
www.sgxsensortech.com
Page 1 of 5
Data Sheet
MiCS-5914
1108 rev 4
Performance sensor
Characteristic
RED sensor
Sensing resistance in air (see note 1)
Symbol
R
0
Typ
-
Min
10
Max
1500
Unit
k
Typical NH3 detection range
Sensitivity factor (see note 2)
FS
S
R
-
1
1.5
300
15
ppm
-
Notes:
1.
Sensing resistance in air R
0
is measured under controlled ambient conditions, i.e. synthetic air at 23
±5°C and 50 ± 10% RH. Sampling test.
2.
Sensitivity factor is defined as R
s
in air divided by R
s
at 1 ppm of NH
3
. Test conditions are 23 ± 5°C
and 50 ± 10% RH. Indicative values only. Sampling test.
IMPORTANT PRECAUTIONS:
Read the following instructions carefully before using the MiCS-5914 described here to avoid erroneous
readings and to prevent the device from permanent damage.
•
The sensor must be reflow soldered in a neutral atmosphere, without soldering flux vapours.
•
The sensor must not be exposed to high concentrations of organic solvents, silicone vapours or
cigarette-smoke in order to avoid poisoning the sensitive layer.
•
Heater voltage above the specified maximum rating will destroy the sensor due to overheating.
•
This sensor is to be placed in a filtered package that protects it against water and dust projections.
•
SGX sensortech strongly recommends using ESD protection equipment to handle the sensor.
Page 2 of 5
Data Sheet
MiCS-5914
1108 rev 4
MiCS-5914 with recommended supply circuit (top view)
R1 is typically a E96 resistor at 93.1
.
This resistor is
necessary to obtain the right temperature on the heater
while using a single 5V power supply. The resulting voltage
is typically VH = 2.2V.
Power circuit and measurement circuit
MiCS-5914 with measurement circuit (top view)
The voltage measured on the load resistor is directly linked
to the resistance of the sensor respectively. RLOAD must be
820
at the lowest in order not to damage the sensitive
layer.
Parameter
Symbol
Typ
Min
Max
Unit
Heating power
Heating voltage
Heating current
Heating resistance
at nominal power
P
H
V
H
I
H
R
H
66
2.2
30
72
60
-
-
64
73
-
-
80
mW
V
mA
Rating
Maximum heater power dissipation
Maximum sensitive layer power dissipation
Voltage supplyHeating current
Symbol
P
H
Ps
Vsupply
Value / Range
88
8
4.9 – 5.1
Unit
mW
mW
V
Relative humidity range
Ambient operating temperature
Storage temperature range
Storage humidity range
RH
Tamb
Tsto
RHsto
5 – 95
-30 – 85
-40 – 120
5 - 95
%RH
°C
°C
%RH
Page 3 of 5
Data Sheet
MiCS-5914
1108 rev 4
Package outline dimensions
The package is compatible with SMD assembly process.
Operating
A
conditions
B
C
D
E
F
G
Rh2
Rs2
Rh1
Rs1
Pin
Connection
H
J
K
MiCS-5914 configuration (bottom view)
Sensor configuration
The silicon gas sensor structure consists of an accurately micro machined diaphragm with an
embedded heating resistor and the sensing layer on top.
The internal connections are shown above.
Page 4 of 5
Data Sheet
MiCS-5914
1108 rev4
Power circuit
The two resistors (82 ohm for RED and 51+82
Packaging
ohm for OX) are necessary to obtain the right
The sensors are the two in a tape and reel for
temperatures onpackagedindependent heaters
expedition.
while using a 5V power supply.
The sensors are placed in a carrier type. The
dimensions of the cavity are 5.5 x 7.5 x 2.55 mm
(the tolerance is +/- 0.2 mm).
The outside dimension of the reel is either 178
+- mm (for a maximum of 700 sensors ) or 330
+ 0.25 / -4 mm (for a maximum of 2000
sensors).
For more information please contact:
info.em@sgxsensortech.com
SGX Sensortech, Courtils 1
CH-2035 Corcelles-Cormondrèche
Switzerland
www.sgxsensortech.com
Whilst SGX sensortech has taken care to ensure the accuracy of the information contained herein it accepts no responsibility for the consequences
of any use thereof and also reserves the right to change the specification of goods without notice. SGX sensortech accepts no liability beyond the set
out in its standard conditions of sale in respect of infringement of third party patents arising from the use of tubes or other devices in accordance
with information contained herein.
Page 5 of 5
京公网安备 11010802033920号
Copyright © 2005-2026 EEWORLD.com.cn, Inc. All rights reserved
电子工程世界
