MiniatureLowPressureSensors
Low Pressure (1” H
2
O to 30 “ H
2
O) Sensors
Features
• 0 to 1” H
2
O to 0 to 30” H
2
O Pressure Ranges
• Matched pressure port volumes
• Temperature Compensated
• Calibrated Zero and Span
• Medical Instrumentation
• Environmental Controls
• HVAC
General Description
The Millivolt Output pressure sensors is based upon a proprietary technology to reduce all output offset or common mode errors. This
model provides a calibrated millivolt output with superior output offset characteristics. Output offset errors due to change in temperature,
stability to warm-up, stability to long time period, and position sensitivity are all significantly reduced when compared to conventional
compensation methods. In addition the sensor utilizes a silicon, micromachined, stress concentration enhanced structure to provide a very
linear output to measured pressure.
These calibrated and temperature compensated sensors give an accurate and stable output over a wide temperature range. This series is
intended for use with non-corrosive, non-ionic working fluids such as air, dry gases and the like.
The output of the device is ratiometric to the supply voltage and operation from any D.C. supply voltage up to +16 V is acceptable.
e
www.allsensors.com
a
16035 Vineyard Blvd. Morgan Hill, CA 95037
p
408 225 4314
f
408 225 2079
Equivalent Circuit
+Vsupply
3
Input Resittance
Output Resistance
4.5 k ohm
1.5 k ohm
-Voutput
4
+ Voutput
2
-Vsupply
1
All Sensors
DS-0108 Rev A
all sensors
Applications
Pressure Sensor Characteristics Maximum Ratings
Supply Voltage, Vs
Common-mode pressure
Lead Temperature
(soldering 2-4 sec.)
16 Vdc
10 psig
250°C
Environmental Specifications
Temperature Ranges
Compensated
Operating
Storage
Humidity Limits
0 to 50(70)° C
-25 to 85° C
-40 to 125° C
0 to 95% RH
(non condensing)
Standard Pressure Ranges
Single in Line Packages-SIP
One Port
Part Number
Operating Pressure
0 - 1 “H2O
2 INCH-G-MV-MINI
5 INCH-G-MV-MINI
10 INCH-G-MV-MINI
20 INCH-G-MV-MINI
30 INCH-G-MV-MINI
0 - 2 “H2O
0 - 5 “H2O
0 - 10 “H2O
0 - 20 “H2O
0 - 30 “H2O
2 INCH-D1-MV-MINI
5 INCH-D1-MV-MINI
10 INCH-D1-MV-MINI
20 INCH-D1-MV-MINI
30 INCH-D1-MV-MINI
Two Ports Same Side
Part Number
Two Ports Opposite Side
Part Number
1 INCH-D2-MV-MINI
2 INCH-D2-MV-MINI
5 INCH-D2-MV-MINI
10 INCH-D2-MV-MINI
20 INCH-D2-MV-MINI
30 INCH-D2-MV-MINI
Dual in Line Packages
One Port
Part Number
2 INCH-GDIP-MV-MINI
5 INCH-GDIP-MV-MINI
10 INCH-GDIP-MV-MINI
20 INCH-GDIP-MV-MINI
30 INCH-GDIP-MV-MINI
Operating Pressure
0 - 2 “H2O
0 - 5 “H2O
0 - 10 “H2O
0 - 20 “H2O
0 - 30 “H2O
Two Ports Same Side
Part Number
2 INCH-D1DIP-MV-MINI
5 INCH-D1DIP-MV-MINI
10 INCH-D1DIP-MV-MINI
20 INCH-D1DIP-MV-MINI
30 INCH-D1DIP-MV-MINI
Two Ports Opposite Side
Part Number
2 INCH-D2DIP-MV-MINI
5 INCH-D2DIP-MV-MINI
10 INCH-D2DIP-MV-MINI
20 INCH-D2DIP-MV-MINI
30 INCH-D2DIP-MV-MINI
Performance Characteristics for 1 INCH-D2-MV-MINI
Parameter, note 1
Operating Range, differential pressure
Output Span, @ 1 “H2O, note 5
Offset Voltage @ zero differential pressure
Offset Temperature Shift (0°C-50°C), note 2
Offset Warm-up Shift, note 3
Offset Position Sensitivity (1g)
Offset Long Term Drift (one year)
Linearity, hysteresis error, note 4
Span Shift (0°C-50°C), @ 1 “H2O, note 2
0.05
8.0
Minimum
Nominal
1.0
1
0
12.0
±500
±250
±100
±50
±200
0.25
±300
Maximum
Units
“H2O
m
V
m
V
uV
uV
uV
uV
%fs
uV
MiniatureLowPressureSensors
Performance Characteristics for 2 INCH-Dx-MV-MINI
Parameter, note 1
Operating Range, differential pressure
Output Span, @ 2 “H2O, note 5
Operating Range, differential pressure
Output Span, @ 4 “H2O, note 5
Offset Voltage @ zero differential pressure
Offset Temperature Shift (0°C-50°C), note 2
Offset Warm-up Shift, note 3
Offset Position Sensitivity (1g)
Offset Long Term Drift (one year)
Linearity, hysteresis error, note 4
Span Shift (0°C-50°C), @ 2 “H2O, note 2
0.05
18.0
9.0
Minimum
Nominal
2.0
10.0
4.0
20.0
22.0
±500
±250
±100
±50
±200
0.25
±200
11.0
Maximum
Units
“H2O
m
V
m
V
uV
uV
uV
uV
uV
%fs
uV
Performance Characteristics for 5 INCH-Dx-MV-MINI
Parameter, note 1
Operating Range, differential pressure
Output Span, note 5
Offset Voltage @ zero differential pressure
Offset Temperature Shift (0°C-50°C), note 2
Offset Warm-up Shift, note 3
Offset Position Sensitivity (1g)
Offset Long Term Drift (one year)
Linearity, hysteresis error, note 4
Span Shift (0°C-50°C), note 2
0.05
19.0
Minimum
Nominal
5.0
20.0
21.0
±500
±150
±50
±10
±100
0.25
±200
Maximum
Units
“H2O
mV
uV
uV
uV
uV
uV
%fs
uV
Performance Characteristics for 10 INCH-Dx-MV-MINI
Parameter, note 1
Operating Range, differential pressure
Output Span, note 5
Offset Voltage @ zero differential pressure
Offset Temperature Shift (0°C-70°C), note 2
Offset Warm-up Shift, note 3
Offset Position Sensitivity (1g)
Offset Long Term Drift (one year)
Linearity, hysteresis error, note 4
Span Shift (0°C-70°C), note 2
0.05
19.0
Minimum
Nominal
10.0
20.0
21.0
±500
±150
±50
±5
±100
0.25
±200
Maximum
Units
“H2O
mV
uV
uV
uV
uV
uV
%fs
uV
All Sensors
DS-0108 Rev A
a
16035 Vineyard Blvd. Morgan Hill, CA 95037
p
408 225 4314
f
408 225 2079
e
www.allsensors.com
all sensors
m
V
Performance Characteristics for 20 INCH-Dx-MV-MINI
Parameter, note 1
Operating Range, differential pressure
Output Span, note 5
Offset Voltage @ zero differential pressure
Offset Temperature Shift (0°C-70°C), note 2
Offset Warm-up Shift, note 3
Offset Position Sensitivity (1g)
Offset Long Term Drift (one year)
Linearity, hysteresis error, note 4
Span Shift (0°C-70°C), note 2
0.05
19.0
Minimum
Nominal
5.0
20.0
21.0
±500
±150
±50
±5
±100
0.25
±200
Maximum
Units
“H2O
m
V
uV
uV
uV
uV
uV
%fs
uV
Performance Characteristics for 30 INCH-Dx-MV-MINI
Parameter, note 1
Operating Range, differential pressure
Output Span, note 5
Offset Voltage @ zero differential pressure
Offset Temperature Shift (0°C-70°C), note 2
Offset Warm-up Shift, note 3
Offset Position Sensitivity (1g)
Offset Long Term Drift (one year)
Linearity, hysteresis error, note 4
Span Shift (0°C-70°C), note 2
0.05
19.0
Minimum
Nominal
30.0
20.0
21.0
±500
±150
±50
±5
±100
0.25
±200
Maximum
Units
“H2O
mV
uV
uV
uV
uV
uV
%fs
uV
Specification Notes
A
LL PARAMETERS ARE MEASURED AT
12.0
VOLT EXCITATION
,
FOR THE NOMINAL FULL SCALE PRESSURE AND ROOM TEMPERATURE UNLESS
OTHERWISE SPECIFIED
. P
RESSURE MEASUREMENTS ARE WITH POSITIVE PRESSURE APPLIED TO THE
B-PORT
CONFIGURATION
.
NOTE
2: S
HIFT IS RELATIVE TO
25°C.
NOTE
3: S
HIFT IS WITHIN THE FIRST HOUR OF EXCITATION APPLIED TO THE DEVICE
.
NOTE
4: M
EASURED AT ONE
-
HALF FULL SCALE RATED PRESSURE USING BEST STRAIGHT LINE CURVE FIT
.
NOTE
5: T
HE VOLTAGE ADDED TO THE OFFSET VOLTAGE AT FULL SCALE PRESSURE
.
NOTE
1:
MiniatureLowPressureSensors
Physical Dimensions
Dual in Line (SDXL)**
pin
pin
pin
pin
1: +Vout
2: gnd
3: -Vout
5: Vsupply
0.280
(7.1)
Two Pressure Port Same Side
0.50
(12.7)
6 5 4
0.62
(15.7)
Pin 1 2 3
0.10
Typical
(2.54)
0.080 O.D.
(2.00)
Dual in Line (DIP)
Two Pressure Port Two Sides
**SDXL ORDERING INFORMATION
One Port
Part Number
2 INCH-GDIP-MV-SDXL
5 INCH-GDIP-MV-SDXL
10 INCH-GDIP-MV-SDXL
20 INCH-GDIP-MV-SDXL
30 INCH-GDIP-MV-SDXL
Operating Pressure
0 - 2 “H2O
0 - 5 “H2O
0 - 10 “H2O
0 - 20 “H2O
0 - 30 “H2O
Two Ports Same Side
Part Number
2 INCH-D1DIP-MV-SDXL
5 INCH-D1DIP-MV-SDXL
10 INCH-D1DIP-MV-SDXL
20 INCH-D1DIP-MV-SDXL
30 INCH-D1DIP-MV-SDXL
Two Ports Opposite Side
Part Number
2 INCH-D2DIP-MV-SDXL
5 INCH-D2DIP-MV-SDXL
10 INCH-D2DIP-MV-SDXL
20 INCH-D2DIP-MV-SDXL
30 INCH-D2DIP-MV-SDXL
All Sensors
DS-0108 Rev A
a
16035 Vineyard Blvd. Morgan Hill, CA 95037
p
408 225 4314
f
408 225 2079
e
www.allsensors.com
all sensors
MEMS传感器
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