SILICON
MICROSTRUCTURES
INCORPORATED
•
•
SM5108
Ultra-Small, Low-Cost,
OEM Pressure Die
For Extremely High-Volume Applications
Ultra-Small, Low Cost OEM Pressure Die
DESCRIPTION
The SM5108 is a extremely small (0.65 mm
x 0.65 mm) silicon micromachined
piezoresistive pressure sensing chip that
has been optimized to provide the highest
possible accuracy for a die of this size. This
performance is achieved through careful
resistor placement and mechanical
configuration. The small die results in a
significant cost saving when compared to
larger sensor die. Over 24,000 die come on
a 150 mm wafer.
This sensor is intended for high volume
applications where cost is a critical factor,
such as consumer tire pressure gauges or
disposable pressure gauges. The SM5108 is
available as an absolute pressure sensor in
full-scale ranges of 15 PSI, 30 PSI, 60 PSI,
and 150 PSI. It is designed to be mounted
on ceramic or PC board substrates by high-
volume OEM manufacturers.
Die are probed, diced, and visually
inspected and shipped on tape in rings.
Custom pressure ranges are available in
high-volume applications.
Minimum order quantities apply to this
product.
FEATURES
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•
•
•
•
Available in 15 PSI, 30 PSI, 60 PSI, and
150 PSI ranges
Extremely Low Cost
Small size (0.65 mm square)
Constant Current or Constant Voltage
Drive
High Millivolt Output
APPLICATIONS
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•
•
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Automotive Tire Pressure Monitoring
Engine Control
Barometric Sensing
Pneumatic Gages
Hand-held Meters
Home Appliances
Rev 1.3 6_05
©
2003 - 2004
Silicon Microstructures, Inc.
♦
1701 McCarthy Blvd.
♦
Milpitas, CA 95035 USA
Tel: 408-577-0100
♦
Fax: 408-577-0123
♦
sales@si-micro.com
♦
www.si-micro.com
SM5108
CHARACTERISTICS FOR SM5108 -
SPECIFICATIONS
All parameters are measured at 5.000V supply at room temperature, unless otherwise specified.
Min.
Excitation Voltage
Excitation Current
Span (FS Range)
15 PSI
30 PSI
60 PSI
150 PSI
Offset
TC Span
TC Offset
TC Resistance
Linearity
Bridge Impedance
Input Capacitance
Proof Pressure
Burst Pressure
Operating Temperature
Storage Temperature
0
0
65
65
65
100
-35
-24
-7
+24
-0.2
4
3X
5X
-40
-55
Typ.
5.0
1.5
100
100
100
150
-19
-1
+27.5
-0.07
5
<2
Max.
15
2.5
135
135
135
200
35
-15.5
+7
+33
+0.2
6
Units
V
mA
mV
mV
mV
mV
mV
%FS/100°C
%FS/100°C
%/100°C
%FS
kΩ
pF
Rated FS
Rated FS
°C
°C
Notes
1
1
2
3
3
3
4
+125
+150
Notes:
1. Bridge may be driven with positive or negative excitation; positive output for positive pressure applied to circuit side of die
when bridge is driven with positive voltage.
2. Measured at 5V constant voltage excitation.
+ Sig
+Vexc
3. Measured from 0 to 70 C
4.
Defined as best straight line.
ORDERING INFORMATION:
Pressure Ranges
PSI
5108
15
015
30
030
60
060
150 150
A: Absolute (only)
- Vexc
- Vexc
- Sig
Top-View of SM5108
(0.65 mm square as sawn)
Total thickness = 0.65 mm
Notice:
Covered under USA Mask-Copyright
Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the use of any
circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this
publication has been checked, no responsibility, however, is assumed for inaccuracies.
Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to
cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications.
Rev 1.3 6_05
©
2003 - 2004
Silicon Microstructures, Inc.
♦
1701 McCarthy Blvd.
♦
Milpitas, CA 95035 USA
Tel: 408-577-0100
♦
Fax: 408-577-0123
♦
sales@si-micro.com
♦
www.si-micro.com
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