SILICON
MICROSTRUCTURES
INCORPORATED
•
Small, Low Cost OEM Pressure Die
SM5106
Low Cost OEM Pressure Die
DESCRIPTION
The SM5106 is a very small (1.56mm x
1.56mm) silicon micromachined
piezoresistive pressure sensing chip that
has been optimized to provide the highest
possible accuracy for a die of this size.
This performance is achieved through
careful resistor placement and mechanical
configuration. The small die results In a
significant cost saving when compared to
larger sensor die.
This sensor is intended for high volume
applications where cost is a critical factor,
such as consumer tire pressure gauges or
disposable pressure monitors. The SM5106
is available as an absolute pressure sensor
in full-scale ranges of 15 PSI, 30 PSI, 60
PSI, and 150 PSI. It is designed to be
mounted on ceramic or PC board substrates
by OEM manufacturers.
Die are probed, inked, diced, and visually
inspected and shipped on tape in rings.
Custom pressure ranges available in high-
volume applications.
FEATURES
•
•
•
•
•
Available in 15 PSI, 30 PSI, 60 PSI, and
150 PSI ranges
Very Low Cost
Small size (1.56 mm square)
Constant Current or Constant Voltage
Drive
High Millivolt Output
APPLICATIONS
•
•
•
•
•
•
Automotive Tire
Engine Control
Blood Pressure
Pneumatic Gages
Hand-held Meters
Home Appliances
Rev 1.2 8_02
2001-2002
Silicon Microstructures, Inc.
♦
1701 McCarthy Blvd.
♦
Milpitas, CA 95035 USA
Tel: 408-577-0100
♦
Fax: 408-577-0123
♦
Sales@Si-Micro.Com
♦
WWW.Si-Micro.Com
SM5106
CHARACTERISTICS FOR SM5106 -
SPECIFICATIONS
All parameters are measured at 5.000V supply at room temperature, unless otherwise specified.
Min.
Excitation Voltage
Excitation Current
Span (FS Range)
15 PSI
30 PSI
60 PSI
150 PSI
Offset
TC Span
TC Offset
TC Resistance
Linearity
Bridge Impedance
Proof Pressure
Burst Pressure
Operating Temperature
Storage Temperature
0
0
75
85
85
100
-35
-24
-7
+24
-0.45
4
3X
5X
-40
-55
Typ.
5.0
1.5
100
110
125
145
8
-19
-1
+27.5
-0.15
5
Max.
15
2.5
125
130
150
195
35
-15.5
+7
+33
+0.45
6
Units
V
mA
mV
mV
mV
mV
mV
%FS/100°C
%FS/100°C
%/100°C
%FS
kΩ
Rated FS
Rated FS
°C
°C
Notes
1
1
2
3
3
3
4
+125
+150
Notes:
1. Bridge may be driven with positive or negative excitation; positive output for positive pressure applied to circuit side of die
when bridge is driven with positive voltage.
2. Measured at 5V constant voltage excitation.
3. Measured from 0 to 70 C
0.30 mm
4.
Defined as best straight line.
+Vexc
Vsub
1.56
mm
Sig+
0.13 mm
Sig-
ORDERING INFORMATION:
Model Number
SM5106 - 015 - A
A: Absolute (only)
Pressure
range
Pressure
Type
Pressure Ranges
PSI
5106
15
015
30
030
60
060
150 150
0.40
mm
0.20 mm
0.05
mm
0.20 mm
-Vexc
1.56 mm
SM5106 (1.56 mm square as sawn)
Covered under USA Mask-Copyright
See separate Application Notes for typical range of variation in Saw
dimensions.
Notice:
Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the use of any
circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this
publication has been checked, no responsibility, however, is assumed for inaccuracies.
Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to
cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications.
Rev 1.2 8_02
2001-2002
Silicon Microstructures, Inc.
♦
1701 McCarthy Blvd.
♦
Milpitas, CA 95035 USA
Tel: 408-577-0100
♦
Fax: 408-577-0123
♦
Sales@Si-Micro.Com
♦
WWW.Si-Micro.Com
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