LDE Series
Digital low differential pressure sensors
FEATURES
· Pressure ranges from 25 to 500 Pa (0.1 to 2 inH
2
O)
· Pressure sensor based on thermal micro-flow
measurement
· High flow impedance
→
very low flow-through leakage
→
high immunity to dust and humidity
→
no loss in sensitivity using long tubing
· Calibrated and temperature compensated
· Unique offset autozeroing feature ensuring
superb long-term stability
· Offset accuracy better than 0.2 %FS
· Total accuracy better than 0.5 %FS typical
· On-chip temperature sensor
· Analog output and digital SPI interface
· RoHS and REACH compliant
· Quality Management System according to
EN ISO 13485 and EN ISO 9001
MEDIA COMPATIBILITY
Air and other non-corrosive gases
SPECIFICATIONS
Maximum ratings
Supply voltage V
S
LDE...3...
LDE...6...
Output current
Soldering recommendations
Reflow soldering, peak temperature
Wave soldering, pot temperature
Hand soldering, tip temperature
Temperature ranges
Compensated
Operating
Storage
Humidity limits (non-condensing)
Vibration
1
Mechanical shock
2
ELECTRICAL CONNECTION
3
Top-down view
2.70 ... 3.60 V
DC
4.75 ... 5.25 V
DC
1 mA
235...245 °C
260 °C
370...425 °C
0 ... +70 °C
-20 ... +80 °C
-40 ... +80 °C
97 %RH
20 g
500 g
1 2 3 4 5
10 9 8 7 6
Pin
1
2
3
4
5
6
7
8
9
10
Function
Reserved
V
S
GND
Vout
Vout
S C LK
MOSI
MISO
/CS
Reserved
There are three use cases that will change
the manner in which the LDE sensor is
connected in-circuit. For detailed pin
connections see page 12.
Specification notes:
1.
Sweep 20 to 2000 Hz, 8 min, 4 cycles per axis, MIL-STD-883, Method 2007.
2.
5 shocks, 3 axes, MIL-STD-883E, Method 2002.4.
3.
The maximum voltage applied to pin 1 and pins 6 through 10 should not exceed V
S
+0.3 V.
E / 11815 / D0
1/13
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LDE Series
Digital low differential pressure sensors
PRESSURE SENSOR CHARACTERISTICS
Part no.
LDES025U...
LDES050U...
LDES100U...
LDES250U...
LDES500U...
LDES025B...
LDES050B...
LDES100B...
LDES250B...
LDES500B...
0...25 Pa
0...50 Pa
0...100 Pa
0...250 Pa
0...500 Pa
0...±25 Pa
0...±50 Pa
Operating pressure
/ 0...0.25 mbar
/ 0...0.5 mbar
/ 0...1 mbar
/ 0...2.5 mbar
/ 0...5 mbar
/ 0...±0.5 mbar
(0.1 inH
2
O)
(0.2 inH
2
O)
(0.4 inH
2
O)
(1 inH
2
O)
(2 inH
2
O)
(±0.2 inH
2
O)
(±0.4 inH
2
O)
(±1 inH
2
O)
(±2 inH
2
O)
2 bar
(30 psi)
5 bar
(75 psi)
Proof pressure
4
Burst pressure
4
/ 0...±0.25 mbar (±0.1 inH
2
O)
0...±100 Pa / 0...±1 mbar
0...±250 Pa / 0...±2.5 mbar
0...±500 Pa / 0...±5 mbar
GAS CORRECTION FACTORS
5
Gas type
Dry air
Oxygen (O
2
)
Nitrogen (N
2
)
Argon (Ar)
Carbon dioxide (CO
2
)
Correction factor
1.0
1.07
0.97
0.98
0.56
Specification notes:
4.
The max. common mode pressure is 5 bar.
5.
For example with a LDES500... sensor measuring CO
2
gas, at full-scale output the actual pressure will be 500 Pa x 0.56 = 280 Pa.
∆
P
eff
= ∆
P
sensor
×
gas correction factor
∆P
eff
= True differential pressure
∆P
sensor
= Differential pressure as indicated by output voltage
E / 11815 / D0
2/13
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LDE Series
Digital low differential pressure sensors
PERFORMANCE CHARACTERISTICS
6
LDE...6...
(V
S
=5.0 V
DC
, T
A
=20 °C, P
Abs
=1 bara, calibrated in air, output signals analog and digital are
non-ratiometric
to V
S
)
all 25 Pa and 50 Pa devices
Characteristics
Noise level (RMS)
Offset warm-up shift
Offset long term stability
7
Offset repeatability
Span repeatability
10, 11
Current consumption (no load)
8
Response time (t
63
)
Power-on time
Min.
Typ.
±0.01
±0.05
±0.01
±0.25
7
5
Max.
less than noise
±0.1
Unit
Pa
Pa/year
Pa
% of reading
mA
ms
8
25
Digital output
Characteristics
Scale factor (digital output)
9
Min.
Typ.
1200
600
±0.1
±0.4
Max.
Unit
counts/Pa
0...25 / 0...±25 Pa
0...50 / 0...±50 Pa
Zero pressure offset accuracy
10
Span accuracy
10, 11
Thermal effects
Offset
Span
5...55
0...70
5...55
0...70
°C
°C
°C
°C
±1
±2
±0.2
±0.75
±0.2
±0.4
±1.75
±2.75
%FSS
% of reading
%FSS
% of reading
Analog output (unidirectional devices)
Characteristics
Zero pressure offset
Full scale output
Span accuracy
10, 11
Thermal effects
Min.
0.49
Typ.
0.50
4.50
±0.4
Max.
0.51
±0.75
±15
±30
±2
±2.75
Unit
V
% of reading
mV
% of reading
Offset
Span
5...55
0...70
5...55
0...70
°C
°C
°C
°C
±1.25
±2
Analog output (bidirectional devices)
Characteristics
Zero pressure offset
Output
Span accuracy
10, 11
Thermal effects
at max. specified pressure
at min. specified pressure
Offset
Span
5...55
0...70
5...55
0...70
°C
°C
°C
°C
Min.
2.49
Typ.
2.50
4.50
0.50
±0.4
Max.
2.51
Unit
V
±1.25
±2
±0.75
±15
±30
±2
±2.75
% of reading
mV
% of reading
E / 11815 / D0
3/13
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LDE Series
Digital low differential pressure sensors
PERFORMANCE CHARACTERISTICS
6
LDE...6...
(V
S
=5.0 V
DC
, T
A
=20 °C, P
Abs
=1 bara, calibrated in air, output signals analog and digital are
non-ratiometric
to V
S
)
all 100 Pa, 250 Pa and 500 Pa devices
Characteristics
Noise level (RMS)
Offset warm-up shift
Offset long term stability
7
Offset repeatability
12
Span repeatability
10, 11
Current consumption (no load)
8
Response time (t
63
)
Power-on time
Min.
Typ.
±0.01
±0.05
±0.02
±0.25
7
5
Max.
less than noise
±0.1
Unit
%FSS
%FSS/year
Pa
% of reading
mA
ms
8
25
Digital output
Characteristics
Scale factor (digital output)
9
Min.
Typ.
300
120
60
±0.05
±0.4
Max.
Unit
counts/Pa
0...100 / 0...±100 Pa
0...250 / 0...±250 Pa
0...500 / 0...±500 Pa
Zero pressure offset accuracy
10
Span accuracy
10, 11
Thermal effects
Offset
5...55
0...70
Span
5...55
0...70
°C
°C
°C
°C
±1
±2
±0.1
±0.75
±0.1
±0.2
±1.75
±2.75
%FSS
% of reading
%FSS
% of reading
Analog output (unidirectional devices)
Characteristics
Zero pressure offset
Full scale output
Span accuracy
10, 11
Thermal effects
Min.
0.49
Typ.
0.50
4.50
±0.4
Max.
0.51
±0.75
±10
±12
±1.75
±2.75
Unit
V
% of reading
mV
% of reading
Offset
Span
5...55
0...70
5...55
0...70
°C
°C
°C
°C
±1
±2
Analog output (bidirectional devices)
Characteristics
Zero pressure offset
Output
Span accuracy
10, 11
Thermal effects
at max. specified pressure
at min. specified pressure
Offset
Span
5...55
0...70
5...55
0...70
°C
°C
°C
°C
Min.
2.49
Typ.
2.50
4.50
0.50
±0.4
Max.
2.51
Unit
V
±1
±2
±0.75
±10
±12
±1.75
±2.75
% of reading
mV
% of reading
E / 11815 / D0
4/13
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LDE Series
Digital low differential pressure sensors
PERFORMANCE CHARACTERISTICS
6
LDE...3...
(V
S
=3.0 V
DC
, T
A
=20 °C, P
Abs
=1 bara, calibrated in air, output signals analog and digital are
non-ratiometric
to V
S
)
all 25 Pa and 50 Pa devices
Characteristics
Noise level (RMS)
Offset warm-up shift
Offset long term stability
7
Offset repeatability
Span repeatability
10, 11
Current consumption (no load)
8
Response time (t
63
)
Power-on time
Min.
Typ.
±0.01
±0.05
±0.01
±0.25
14
5
Max.
less than noise
±0.1
Unit
Pa
Pa/year
Pa
% of reading
mA
ms
16
25
Digital output
Characteristics
Scale factor (digital output)
9
Min.
Typ.
1200
600
±0.1
±0.4
Max.
Unit
counts/Pa
0...25 / 0...±25 Pa
0...50 / 0...±50 Pa
Zero pressure offset accuracy
10
Span accuracy
10, 11
Thermal effects
Offset
Span
5...55
0...70
5...55
0...70
°C
°C
°C
°C
±1
±2
±0.2
±0.75
±0.2
±0.4
±1.75
±2.75
%FSS
% of reading
%FSS
% of reading
Analog output (unidirectional devices)
Characteristics
Zero pressure offset
Full scale output
Span accuracy
10, 11
Thermal effects
Min.
0.29
Typ.
0.30
2.70
±0.4
Max.
0.31
±0.75
±15
±30
±2
±2.75
Unit
V
% of reading
mV
% of reading
Offset
Span
5...55
0...70
5...55
0...70
°C
°C
°C
°C
±1.25
±2
Analog output (bidirectional devices)
Characteristics
Zero pressure offset
Output
Span accuracy
10, 11
Thermal effects
at max. specified pressure
at min. specified pressure
Offset
Span
5...55
0...70
5...55
0...70
°C
°C
°C
°C
Min.
1.49
Typ.
1.50
2.70
0.30
±0.4
Max.
1.51
Unit
V
±1.25
±2
±0.75
±15
±30
±2
±2.75
% of reading
mV
% of reading
E / 11815 / D0
5/13
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