Silicon Piezoresistive
Relative Pressure Sensor
Features
Low pressure and temperature hysteresis
Fast response
High sensitivity and linearity
Fatigue free monocrystaline silicon diaphragm
giving high load cycle stability
• High long term stability
• Built in silicon temperature sensor
• Media compatible stainless housing
•
•
•
•
KPY 51-R
KPY 56-R
Stainless Steel Package
Type and
Marking
KPY 51 R
KPY 52 R
KPY 53 R
KPY 54 R
KPY 55 R
KPY 56 R
Pin Configuration
1
2
3
4
5
6
7
8
Symbol
Pressure Range
0
…
0.25
0
…
0.6
0
…
1.6
0
…
4
0
…
10
0
…
25
Unit
bar
Ordering Code
Q62705-K174
Q62705-K171
Q62705-K176
Q62705-K178
Q62705-K180
Q62705-K182
P
0
…
P
N
Capillary tube
+
V
IN
−
V
OUT
Temperature sensor
(typ.
R
25
= 2 kΩ)
Temperature sensor
−
V
IN
+
V
OUT
Not connected
Semiconductor Group
1
02.97
KPY 51-R
KPY 56-R
Absolute Maximum Ratings
Parameter
Pressure overload
KPY 51 R
KPY 52 R
KPY 53 R
KPY 54 R
KPY 55 R
KPY 56 R
Operating temperature range
Storage temperature range
Supply voltage
Symbol
Limit Values
1)
Frontside Rearside
Unit
bar
2
6
10
16
30
75
2
6
10
16
30
40
−
40
… +
125
−
50
… +
130
12
˚C
˚C
V
P
MAX
T
A
T
stg
V
IN
1) Frontside coupling applies pressure onto chip face.
Rearside coupling applies pressure through Kovar centre tube.
Electrical Characteristics
at
T
A
= 25 ˚C and
V
IN
= 5 V, unless otherwise specified.
Parameter
Bridge resistance
Sensitivity
KPY 51 R
KPY 52 R
KPY 53 R
KPY 54 R
KPY 55 R
KPY 56 R
Output voltage
KPY 51 R
KPY 52 R
KPY 53 R
KPY 54 R
KPY 55 R
KPY 56 R
Offset voltage
P
=
P
0
Symbol
min.
Limit Values
typ.
−
24.0
15.0
8.8
6.0
2.6
1.2
30
45
70
120
130
150
−
max.
8
32.0
24.0
12.5
9.0
4.0
2.0
40
72
100
180
200
250
mV
−
25
+
25
kΩ
mV/
Vbar
4
16.8
11.0
5.6
4.0
1.8
0.88
Unit
R
B
s
V
fin
21
33
45
80
90
110
mV
V
0
Semiconductor Group
2
KPY 51-R
KPY 56-R
Electrical Characteristics
(cont’d)
at
T
A
= 25 ˚C and
V
IN
= 5 V, unless otherwise specified.
Parameter
Linearity error (Best fit straight line)
P
0
=
P
0
…
P
N
KPY 51
…
55 R
KPY 56 R
Pressure hysteresis
P
1
=
P
0
,
P
2
=
P
N
,
P
3
=
P
0
KPY 51
…
56 R
Symbol
min.
Limit Values
typ.
max.
%
V
fin
−
−
±
0.15
±
0.35
±
0.15
−
±
0.1
−
%
V
fin
Unit
F
L
P
H
−
Electrical Characteristics
at
T
1
= 25 ˚C,
T
2
= 80 ˚C,
T
3
= 25 ˚C and
V
IN
= 5 V, unless otherwise specified.
Parameter
Temperature coefficient of
V
fin
KPY 51 R
KPY 52 R
KPY 53 R
KPY 54 R
KPY 55 R
KPY 56 R
Temperature coefficient of
V
0
KPY 51 R
KPY 52 R
KPY 53 R
KPY 54 R
KPY 55 R
KPY 56 R
Temperature coefficient of
R
B
KPY 51
…
56 R
Temperature hysteresis of
V
0
;
V
fin
KPY 51
…
56 R
Symbol
min.
Limit Values
typ.
−
−
−
−
−
−
−
−
−
−
−
−
max.
%/K
−
0.20
−
0.20
−
0.20
−
0.20
−
0.20
−
0.20
−
0.09
−
0.12
−
0.13
−
0.14
−
0.15
−
0.15
%/K
−
0.03
−
0.03
−
0.03
−
0.03
−
0.03
−
0.03
+
0.08
+
0.08
+
0.05
+
0.05
+
0.05
+
0.05
%/K
−
+
0.095
−
% v.
V
fin
−
±
0.2
−
Unit
TC
Vfin
TC
V0
TC
RB
TH
Semiconductor Group
3
KPY 51-R
KPY 56-R
Package Outline
Stainless Steel Package
Weight 15.5 g
Dimension in mm
Exterior Packaging
I.e. tubes, trays, boxes are shown in our Data Book “Package Information”.
Semiconductor Group
4
嵌入式系统
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