Silicon Piezoresistive
Relative Pressure Sensor
KPY 51-RK
KPY 57-RK
Features
Low pressure and temperature hysteresis
Fast response
High sensitivity and linearity
Fatigue free monocrystaline silicon diaphragm
giving high load cycle stability
• High long term stability
• Built in silicon temperature sensor
• Provided for further fabrication, protection cap
•
•
•
•
TO-8-6
Type and
Marking
KPY 51 RK
KPY 52 RK
KPY 53 RK
KPY 54 RK
KPY 55 RK
KPY 56 RK
KPY 57 RK
Pin Configuration
1
2
3
4
5
6
7
8
Symbol
Pressure Range
0
…
0.25
0
…
0.6
0
…
1.6
0
…
4
0
…
10
0
…
25
0
…
60
Unit
bar
Ordering Code
Q62705-K189
Q62705-K190
Q62705-K191
Q62705-K193
Q62705-K195
Q62705-K197
Q62705-K199
P
0
…
P
N
Capillary tube
+
V
IN
−
V
OUT
Temperature sensor
(typ.
R
25
= 2 kΩ)
Temperature sensor
−
V
IN
+
V
OUT
Not connected
Semiconductor Group
1
02.97
KPY 51-RK
KPY 57-RK
Absolute Maximum Ratings
Parameter
Pressure overload
KPY 51 RK
KPY 52 RK
KPY 53 RK
KPY 54 RK
KPY 55 RK
KPY 56 RK
KPY 57 RK
Operating temperature range
Storage temperature range
Supply voltage
Symbol
Limit Values
1)
Frontside Rearside
Unit
bar
2
6
10
16
30
75
100
2
6
10
16
30
40
70
−
40
… +
125
−
50
… +
150
12
˚C
˚C
V
P
MAX
T
A
T
stg
V
IN
1) Frontside coupling applies pressure onto chip face.
Rearside coupling applies pressure through Kovar centre tube.
Electrical Characteristics
at
T
A
= 25 ˚C and
V
IN
= 5 V, unless otherwise specified.
Parameter
Bridge resistance
Sensitivity
KPY 51 RK
KPY 52 RK
KPY 53 RK
KPY 54 RK
KPY 55 RK
KPY 56 RK
KPY 57 RK
Output voltage
KPY 51 RK
KPY 52 RK
KPY 53 RK
KPY 54 RK
KPY 55 RK
KPY 56 RK
KPY 57 RK
Symbol
min.
Limit Values
typ.
−
24.0
15.0
8.8
6.0
2.6
1.2
0.67
30
45
70
120
130
150
200
max.
8
32.0
24.0
12.5
9.0
4.0
2.0
1.0
40
72
100
180
200
250
300
kΩ
mV/
Vbar
4
16.8
11.0
5.6
4.0
1.8
0.88
0.47
Unit
R
B
s
V
fin
21
33
45
80
90
110
140
mV
Semiconductor Group
2
KPY 51-RK
KPY 57-RK
Electrical Characteristics
(cont’d)
at
T
A
= 25 ˚C and
V
IN
= 5 V, unless otherwise specified.
Parameter
Offset voltage
P
=
P
0
Linearity error (Best fit straight line)
P
0
=
P
0
…
P
N
KPY 51
…
55 RK
KPY 56/57 RK
Pressure hysteresis
P
H
P
1
=
P
0
,
P
2
=
P
N
,
P
3
=
P
0
KPY 51
…
57 RK
Symbol
min.
Limit Values
typ.
−
max.
mV
−
25
+
25
%
V
fin
−
−
−
±
0.15
±
0.35
±
0.15
−
±
0.1
−
%
V
fin
Unit
V
0
F
L
Electrical Characteristics
at
T
1
= 25 ˚C,
T
2
= 125 ˚C,
T
3
= 25 ˚C and
V
IN
= 5 V, unless otherwise specified.
Parameter
Temperature coefficient of
V
fin
KPY 51 RK
KPY 52 RK
KPY 53 RK
KPY 54 RK
KPY 55 RK
KPY 56 RK
KPY 57 RK
Temperature coefficient of
V
0
KPY 51 RK
KPY 52 RK
KPY 53 RK
KPY 54 RK
KPY 55 RK
KPY 56 RK
KPY 57 RK
Temperature coefficient of
R
B
KPY 51
…
57 RK
Symbol
min.
Limit Values
typ.
−
0.13
−
0.15
−
0.16
−
0.17
−
0.17
−
0.17
−
0.17
−
−
−
−
−
−
−
+
0.095
max.
%/K
−
0.19
−
0.19
−
0.19
−
0.19
−
0.19
−
0.19
−
0.19
−
0.09
−
0.12
−
0.13
−
0.14
−
0.14
−
0.15
−
0.15
%/K
−
0.05
−
0.05
−
0.03
−
0.03
−
0.03
−
0.03
−
0.01
+
0.05
+
0.05
+
0.03
+
0.03
+
0.03
+
0.03
+
0.01
%/K
−
−
Unit
TC
Vfin
TC
V0
TC
RB
Semiconductor Group
3
KPY 51-RK
KPY 57-RK
Electrical Characteristics
(cont’d)
at
T
1
= 25 ˚C,
T
2
= 125 ˚C,
T
3
= 25 ˚C and
V
IN
= 5 V, unless otherwise specified.
Parameter
Temperature hysteresis of
V
0
;
V
fin
KPY 51 RK
KPY 52 RK
KPY 53
…
57 RK
Package Outline
TO-8-6
Symbol
min.
Limit Values
typ.
max.
% v.
Unit
TH
−
0.7
−
0.5
−
0.3
−
−
−
+
0.7
+
0.5
+
0.3
V
fin
Weight approx. 4.5 g
Dimension in mm
Exterior Packaging
I.e. tubes, trays, boxes are shown in our Data Book “Package Information”.
Semiconductor Group
4
模拟与混合信号
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