Model 85 UltraStable
316L SS Pressure Sensor
High Performance, Small Profile
0-100 mV Output
Absolute and Gage
Low Pressure
Hydraulic Controls
Process Control
Oceanography
Refrigeration/Compressors
Pressure Transmitters
Level Systems
DESCRIPTION
This ia a micromachined piezoresistive silicon pressure sensor. It
is designed for OEM applications where compatibility with
corrosive media must be maintained. The sensor chip is
mounted on a TO style header, which is resistance welded to a
316 stainless steel package. A 316 stainless steel convoluted
isolation diaphragm is welded to the package, sealing a small
volume of silicone oil between the diaphragm and the sensor
chip. The ISO pressure housing utilizes the oil column to couple
the piezoresistive sensor to the isolation diaphragm. A thickfilm
ceramic compensation board with laser trimmed resistors, and
an additional gain set resistor to normalize pressure sensitivity
are an integral part of the sensor package. A variety of threaded
process fittings are available. Fittings include standards like 1/4
and 1/8 NPT, 1/4 BSP as well as custom process fittings.
FEATURES
Weldable and O-Ring Flush Mount
-20°C to +85°C Compensated
Temperature Range
+0.1% Pressure Non-linearity
+1.0% Interchangeable Span
(provided by gain set resistor)
Solid State Reliability
Low Power
Electrical options include cable and connector.
DIMENSIONS
STANDARD RANGES
Range
0 to 15
0 to 30
0 to 50
0 to 100
0 to 300
0 to 500
psig
psia
●
●
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1-68
ISO – Wide Temperature Range
316L SS Pressure Sensor
PERFORMANCE SPECIFICATIONS
Model 85 UltraStable
All parameters measured at 1.5mA drive and at 25°C after 10 second warm up, unless otherwise specified. Unless specifically indicated, only those parameters
indicated as tested are verified on each part. Parameters are specified for the compensated version only.
PARAMETERS
Full Scale Output Span
Zero Offset
Pressure Non-linearity
Pressure Hysteresis
Input Resistance
Output Resistance
Temperature Error - Span
Temperature Error - Zero
Thermal Hysteresis - Span
Thermal Hysteresis - Zero
Long Term Stability - Offset
Long Term Stability - Span
Supply Current
Output Load Resistance
Insulation Resistance (50 VDC)
Pressure Overload
Compensated Operating Temperature
Operating Temperature Range
Storage Temperature Range
Media - Pressure Port
Media - Reference Port
Weight
–20°C to +85°C
–40°C to +125°C
–50°C to +125°C
Liquids and Gases compatible with 316L Stainless Steel
Compatible with Silicon, Pyrex, Gold, Fluorosilicone Rubber and
316L Stainless Steel
13 g
10
0.5
5
50
3X
MIN
75
-1
-0.10
-0.05
2,000
4000
-0.75
-0.5
0.05
0.05
0.1
0.1
1.5
2.0
0.02
3,500
TYP
100
0
MAX
150
1
0.10
0.05
4,500
25000
0.75
0.5
UNITS
mV
mV
% Span
% Span
NOTES
1, 2
2
3
Ω
Ω
% Span
% Span
% Span
% Span
±% Span/yr.
±% Span/yr.
mA
M
Ω
M
Ω
Rated
9
9
9
6
7
8
4
4, 5
4
4
Notes
1. For amplified output circuits, 3.012V ± 1% interchangeability with gain
set resistor. See Application Note TN-003.
2.
3.
4.
5.
6.
Measured at vacuum for absolute (A), ambient for gage (G).
Best fit straight line.
Over Temperature range: -20°C to +85°C Span with respect to +25°C.
15 psi range sensors have a temperature error of ±0.75% (Max) of
Zero from -20°C to 85°C.
Guarantees output/input ratiometricity.
7.
8.
9.
Load resistance to reduce measurement errors due to output loading.
Between case and sensing element.
Maximum temperature range for product with standard cable and
connector is –20°C to +105°C.
10. Weight depends upon configuration (cable, connector, pressure fitting).
11. For gage units used at pressures below atmosphere, the span accuracy
is not guaranteed.
ORDERING INFORMATION
APPLICATION SCHEMATIC
CONNECTIONS
PAD NO. / CABLE
1
2
3
4
5
6
FUNCTION
+OUT
-EX
+EX
-OUT
GAIN
GAIN
October 2001
ISO – Wide Temperature Range
Feel free to contact customer service with any questions at
Toll free 1(800)745-8008; Phone (757)766-1500; Fax (757)766-4297
1-69
嵌入式系统
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