Silicon Piezoresistive
Relative Pressure Sensor
KPY 51-RK
KPY 57-RK
Features
Low pressure and temperature hysteresis
Fast response
High sensitivity and linearity
Fatigue free monocrystaline silicon diaphragm
giving high load cycle stability
• High long term stability
• Built in silicon temperature sensor
• Provided for further fabrication, protection cap
•
•
•
•
TO-8-6
Type
KPY 51-RK
KPY 52-RK
KPY 53-RK
KPY 54-RK
KPY 55-RK
KPY 56-RK
KPY 57-RK
Pin Configuration
1
2
3
4
5
6
7
8
Symbol
Pressure Range
0
…
0.25
0
…
0.6
0
…
1.6
0
…
4
0
…
10
0
…
25
0
…
60
Unit
bar
Ordering Code
Q62705-K189
Q62705-K190
Q62705-K191
Q62705-K193
Q62705-K195
Q62705-K197
Q62705-K199
P
0
…
P
N
Capillary tube
+
V
IN
−
V
OUT
Temperature sensor
(typ.
R
25
= 2 kΩ)
Temperature sensor
−
V
IN
+
V
OUT
Not connected
2
+
R
B(P)
R
B(P)
R
T(T)
V
IN
_
6
_
7
R
B(P)
R
B(P)
V
OUT
+
3
4
5
EHS07025
Data Sheet
1
2000-07-01
KPY 51-RK
KPY 57-RK
Absolute Maximum Ratings
Parameter
Pressure overload
KPY 51-RK
KPY 52-RK
KPY 53-RK
KPY 54-RK
KPY 55-RK
KPY 56-RK
KPY 57-RK
Operating temperature range
Storage temperature range
Supply voltage
Symbol
Limit Values
1)
Frontside Rearside
Unit
bar
2
6
10
16
30
75
100
2
6
10
16
30
40
70
−
40
… +
125
−
50
… +
150
12
°C
°C
V
P
MAX
T
A
T
stg
V
IN
1) Frontside coupling applies pressure onto chip face.
Rearside coupling applies pressure through KOVAR
®
centre tube.
Electrical Characteristics
at
T
A
= 25
°C
and
V
IN
= 5 V, unless otherwise specified.
Parameter
Bridge resistance
Sensitivity
KPY 51-RK
KPY 52-RK
KPY 53-RK
KPY 54-RK
KPY 55-RK
KPY 56-RK
KPY 57-RK
Output voltage
KPY 51-RK
KPY 52-RK
KPY 53-RK
KPY 54-RK
KPY 55-RK
KPY 56-RK
KPY 57-RK
Symbol
min.
Limit Values
typ.
−
24.0
15.0
8.8
6.0
2.6
1.2
0.67
30
45
70
120
130
150
200
max.
8
32.0
24.0
12.5
9.0
4.0
2.0
1.0
40
72
100
180
200
250
300
kΩ
mV/
Vbar
4
16.8
11.0
5.6
4.0
1.8
0.88
0.47
Unit
R
B
s
V
fin
21
33
45
80
90
110
140
mV
Data Sheet
2
2000-07-01
KPY 51-RK
KPY 57-RK
Electrical Characteristics
(cont’d)
at
T
A
= 25
°C
and
V
IN
= 5 V, unless otherwise specified.
Parameter
Offset voltage
P
=
P
0
Linearity error (Best fit straight line)
Symbol
min.
Limit Values
typ.
−
max.
mV
−
25
−
−
−
+
25
%
V
fin
±
0.15
±
0.35
±
0.15
−
±
0.1
−
%
V
fin
Unit
V
0
F
L
P
0
=
P
0
…
P
N
KPY 51
…
55-RK
KPY 56/57-RK
Pressure hysteresis
P
H
P
1
=
P
0
,
P
2
=
P
N
,
P
3
=
P
0
KPY 51
…
57-RK
Electrical Characteristics
at
T
1
= 25
°C,
T
2
= 125
°C,
T
3
= 25
°C
and
V
IN
= 5 V, unless otherwise specified.
Parameter
Temperature coefficient of
V
fin
KPY 51-RK
KPY 52-RK
KPY 53-RK
KPY 54-RK
KPY 55-RK
KPY 56-RK
KPY 57-RK
Temperature coefficient of
V
0
KPY 51-RK
KPY 52-RK
KPY 53-RK
KPY 54-RK
KPY 55-RK
KPY 56-RK
KPY 57-RK
Temperature coefficient of
R
B
KPY 51
…
57-RK
Symbol
min.
Limit Values
typ.
−
0.13
−
0.15
−
0.16
−
0.17
−
0.17
−
0.17
−
0.17
−
−
−
−
−
−
−
max.
%/K
−
0.19
−
0.19
−
0.19
−
0.19
−
0.19
−
0.19
−
0.19
−
0.09
−
0.12
−
0.13
−
0.14
−
0.14
−
0.15
−
0.15
%/K
−
0.05
−
0.05
−
0.03
−
0.03
−
0.03
−
0.03
−
0.01
+
0.05
+
0.05
+
0.03
+
0.03
+
0.03
+
0.03
+
0.01
%/K
−
+
0.095
−
Unit
TC
Vfin
TC
V0
TC
RB
Data Sheet
3
2000-07-01
KPY 51-RK
KPY 57-RK
Electrical Characteristics
(cont’d)
at
T
1
= 25
°C,
T
2
= 125
°C,
T
3
= 25
°C
and
V
IN
= 5 V, unless otherwise specified.
Parameter
Temperature hysteresis of
V
0
;
V
fin
KPY 51-RK
KPY 52-RK
KPY 53
…
57-RK
Package Outlines
TO-8-6
Basic Component
20
±0.6
8
±0.6
12.7
±0.1
4
3
2
1
7
8
-
0.9
0.2
Symbol
min.
Limit Values
typ.
−
−
−
max.
Unit
% v.
V
fin
TH
−
0.7
−
0.5
−
0.3
+
0.7
+
0.5
+
0.3
View on Chip
ø2.1
-0.2
ø10.92
-0.2
ø1.05
-0.1
5
6
ø0.65
-0.1
3.9 max
Bond Wire Loop
45˚
1
-
0.4
Component Delivery Form
42
-2
24
-0.8
7.62
3.81
ø5.1
-0.2
3.81
17.3
GMX05634
Weight approx. 4.5 g
Sorts of Packing
Package outlines for tubes, trays etc. are contained in our
Data Book “Package Information”.
Data Sheet
4
Dimensions in mm
2000-07-01
7.62
微控制器 MCU
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